[labnetwork] Mask Aligner for 200 mm wafers

[Philippe Mérel]

Hello everyone,

We are looking to purchase a mask aligner for wafers up to 200 mm, with backside alignment capability. We are currently looking at two models:


  *
SUSS MA/BA8 Gen 4
  *
EVG 610

Any direct experience you can share with these aligners (or similar systems) and/or those companies (customer support) will be very helpful.

If you are satisfied with models from other companies, please mention it.

Thank you



Philippe Mérel PhD

Coordonnateur Laboratoire de Nanofabrication et de Nanocaractérisation (LNN)

Institut Interdisciplinaire d’Innovation Technologique – 3iT

Université de Sherbrooke

https://www.usherbrooke.ca/3it/

[cid:374ede07-4a81-479c-b857-d911671cba9c]

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