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Sorry to bother you all<br><br>We plan to do AlGaAs wet oxidation (typ. sample size is <1cm2) around 300-500 degree. Any one know the exhaust requirement from safety point of view, i.e. what is needed to handle the by-product AsH3? What is the possible ppm for this by-product in the exhaust tube and in the oxidation tube?<br><br>Any info/regulations related to the safety of this setup is highly appreciated.<br><br>Weidong<br><br /><hr />Introducing Live Search cashback . It's search that pays you back! <a href='http://search.live.com/cashback/?&pkw=form=MIJAAF/publ=HMTGL/crea=introsrchcashback' target='_new'>Try it Now</a></body>
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