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<div class=Section1>
<p class=MsoNormal><span style='font-family:"Calibri","sans-serif";color:windowtext'>Hi:<o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Calibri","sans-serif";color:windowtext'><o:p> </o:p></span></p>
<p class=MsoNormal><span style='color:windowtext'>Recently, our silicon nitride
LPCVD tube generates very low deposition rate.<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:windowtext'>Normally, the depo rate for
LSN is 18A/min, and 30A/min for stoic. Nitride.<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:windowtext'>Now, only about 7A/min for
both. The temperature gauge, pressure gauge and MFCs are newly calibrated.<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:windowtext'>Anything suggestion for the
sudden depo rate drop? <o:p></o:p></span></p>
<p class=MsoNormal><span style='color:windowtext'>Thank you very much. <o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Calibri","sans-serif";color:windowtext'><o:p> </o:p></span></p>
<p class=MsoNormal><span style='font-family:"Calibri","sans-serif";color:windowtext'><o:p> </o:p></span></p>
<p class=MsoNormal><span style='font-family:"Times New Roman","serif";
color:windowtext'>Li Chen<o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Times New Roman","serif";
color:windowtext'>MicroFabrication Lab<o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Times New Roman","serif";
color:windowtext'>Dept. of Electrical Engineering and Computer Science<o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Times New Roman","serif";
color:windowtext'>Case Western Reserve University<o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Times New Roman","serif";
color:windowtext'>Bingham 342, 10900 Euclid Avenue<o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Times New Roman","serif";
color:windowtext'>Cleveland, OH 44106-7200<o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Times New Roman","serif";
color:windowtext'>Tel: (216) 368-0393<o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Times New Roman","serif";
color:windowtext'>Fax:(216) 368-6888<o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Times New Roman","serif";
color:windowtext'>Email: <a href="mailto:lichen@case.edu"><span
style='color:blue'>lichen@case.edu</span></a><o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Times New Roman","serif";
color:windowtext'>Web: <a href="http://mems.case.edu/"><span style='color:blue'>mems.case.edu</span></a><o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Times New Roman","serif";
color:windowtext'><o:p> </o:p></span></p>
<p class=MsoNormal><span style='font-family:"Times New Roman","serif";
color:windowtext'><o:p> </o:p></span></p>
<p class=MsoNormal><o:p> </o:p></p>
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