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<body lang=EN-CA link=blue vlink=purple>

<div class=Section1>

<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'>We have a sputtering & evaporation system with 2 RF & 2 DC
cathodes. To date, we have only sputtered metals but we are considering
sputtering oxides as well. I wonder whether others think this is a good idea or
not and what, if any, chamber cleaning and conditions procedures are used when
switching between oxides & metals. Specifically, the metals currently used
in the system are nickel, titanium, chromium, aluminum, & gold. The oxides
that we are considering are SiO<sub>2</sub>, TiO<sub>2</sub></span>, ZnO, Al<sub>2</sub>O<sub>3</sub>,
& ITO.<o:p></o:p></font></p>

<p class=MsoNormal><font size=2 face="Times New Roman"><o:p> </o:p></font></p>

<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'>I have heard that is not a good idea to sputter metals and oxides in
the same system but I don’t know the reasons for this. Also, I know that
some labs have metals only & oxides only sputtering systems, whereas others
have a sputtering system for both metals & oxides. My own experience is
with a system in which SiO<sub>2</sub>, niobium, aluminum, & molybdenum
were deposited. When metals were sputtered after SiO<sub>2</sub> sputtering,
there was a lot of arcing in the deposition chamber, which damaged the devices
being fabricated on silicon wafers. Consequently, after oxide sputtering, the
chamber was conditioned by oxygen glow discharge cleaning and a lengthy metal
deposition until the arcing ceased.<o:p></o:p></span></font></p>

<p class=MsoNormal><font size=2 face="Times New Roman"><o:p> </o:p></font></p>

<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'>Any advice would be greatly appreciated.<o:p></o:p></span></font></p>

<p class=MsoNormal><font size=2 face="Times New Roman"><o:p> </o:p></font></p>

<p class=MsoNormal><font size=2 face="Times New Roman"><o:p> </o:p></font></p>

<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'>Regards,<o:p></o:p></span></font></p>

<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'>Philip Kubik<o:p></o:p></span></font></p>

<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'><o:p> </o:p></span></font></p>

<p class=MsoNormal><font size=2 face=Arial><span style='font-size:10.0pt;
font-family:Arial'>_________________________</span></font><o:p></o:p></p>

<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'> <o:p></o:p></span></font></p>

<p class=MsoNormal><font size=2 face=Arial><span style='font-size:10.0pt;
font-family:Arial'>Philip Kubik, Ph.D.<br>
Cleanroom Engineer<br>
4D Labs, Simon Fraser University<br>
8888 University Dr.<br>
Burnaby, BC, Canada V5A 1S6<br>
Office phone: 778-782-8026</span></font><o:p></o:p></p>

<p class=MsoNormal><font size=2 face=Arial><span style='font-size:10.0pt;
font-family:Arial'>Email: </span></font><a href="mailto:Philip.Kubik@4DLabs.ca"><font
face=Arial><span style='font-family:Arial'>Kubik@4DLabs.ca</span></font></a><o:p></o:p></p>

<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'> </span><o:p></o:p></font></p>

<p class=MsoNormal><font size=2 face="Times New Roman"><o:p> </o:p></font></p>

</div>

</body>

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