<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv=Content-Type content="text/html; charset=us-ascii">
<meta name=Generator content="Microsoft Word 11 (filtered medium)">
<style>
<!--
/* Font Definitions */
@font-face
{font-family:Wingdings;
panose-1:5 0 0 0 0 0 0 0 0 0;}
@font-face
{font-family:"MS Mincho";
panose-1:2 2 6 9 4 2 5 8 3 4;}
@font-face
{font-family:Verdana;
panose-1:2 11 6 4 3 5 4 4 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
@font-face
{font-family:"Myriad Pro";
panose-1:0 0 0 0 0 0 0 0 0 0;}
@font-face
{font-family:"\@MS Mincho";
panose-1:2 2 6 9 4 2 5 8 3 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:10.0pt;
font-family:"Times New Roman";}
h1
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:0in;
text-indent:0in;
page-break-after:avoid;
mso-list:l13 level1 lfo38;
font-size:14.0pt;
font-family:Arial;
font-weight:bold;}
h2
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:.5in;
text-indent:-.5in;
page-break-after:avoid;
mso-list:l13 level2 lfo38;
font-size:12.0pt;
font-family:Arial;
font-weight:bold;
font-style:italic;}
h3
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:.6in;
text-indent:-.6in;
page-break-after:avoid;
mso-list:l13 level3 lfo38;
font-size:12.0pt;
font-family:Arial;
font-weight:normal;
text-decoration:underline;}
h4
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:.7in;
text-indent:-.7in;
page-break-after:avoid;
mso-list:l13 level4 lfo38;
font-size:11.0pt;
font-family:Arial;
font-weight:bold;}
h5
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:.8in;
text-indent:-.8in;
page-break-after:avoid;
mso-list:l13 level5 lfo38;
font-size:11.0pt;
font-family:Arial;
font-weight:normal;
text-decoration:underline;}
h6
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:.8in;
text-indent:-.8in;
page-break-after:avoid;
mso-list:l13 level6 lfo38;
font-size:11.0pt;
font-family:Arial;
font-weight:normal;
font-style:italic;}
p.MsoHeading7, li.MsoHeading7, div.MsoHeading7
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:.9in;
text-indent:-.9in;
page-break-after:avoid;
mso-list:l13 level7 lfo38;
font-size:10.0pt;
font-family:Arial;
font-weight:bold;}
p.MsoHeading8, li.MsoHeading8, div.MsoHeading8
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:1.0in;
text-indent:-1.0in;
page-break-after:avoid;
mso-list:l13 level8 lfo38;
font-size:10.0pt;
font-family:Arial;
text-decoration:underline;}
p.MsoHeading9, li.MsoHeading9, div.MsoHeading9
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:1.1in;
text-indent:-1.1in;
page-break-after:avoid;
mso-list:l13 level9 lfo38;
font-size:10.0pt;
font-family:Arial;
font-style:italic;}
p.MsoIndex1, li.MsoIndex1, div.MsoIndex1
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:10.0pt;
margin-bottom:.0001pt;
text-indent:-10.0pt;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoIndex2, li.MsoIndex2, div.MsoIndex2
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:20.0pt;
margin-bottom:.0001pt;
text-indent:-10.0pt;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoIndex3, li.MsoIndex3, div.MsoIndex3
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:30.0pt;
margin-bottom:.0001pt;
text-indent:-10.0pt;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoIndex4, li.MsoIndex4, div.MsoIndex4
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:40.0pt;
margin-bottom:.0001pt;
text-indent:-10.0pt;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoIndex5, li.MsoIndex5, div.MsoIndex5
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:50.0pt;
margin-bottom:.0001pt;
text-indent:-10.0pt;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoIndex6, li.MsoIndex6, div.MsoIndex6
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:60.0pt;
margin-bottom:.0001pt;
text-indent:-10.0pt;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoIndex7, li.MsoIndex7, div.MsoIndex7
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:70.0pt;
margin-bottom:.0001pt;
text-indent:-10.0pt;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoIndex8, li.MsoIndex8, div.MsoIndex8
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:80.0pt;
margin-bottom:.0001pt;
text-indent:-10.0pt;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoIndex9, li.MsoIndex9, div.MsoIndex9
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:1.25in;
margin-bottom:.0001pt;
text-indent:-10.0pt;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoToc1, li.MsoToc1, div.MsoToc1
{margin:0in;
margin-bottom:.0001pt;
font-size:10.0pt;
font-family:Arial;
font-weight:bold;}
p.MsoToc2, li.MsoToc2, div.MsoToc2
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:10.0pt;
margin-bottom:.0001pt;
font-size:10.0pt;
font-family:Arial;
font-style:italic;}
p.MsoToc3, li.MsoToc3, div.MsoToc3
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:20.0pt;
margin-bottom:.0001pt;
font-size:10.0pt;
font-family:Arial;}
p.MsoToc4, li.MsoToc4, div.MsoToc4
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:30.0pt;
margin-bottom:.0001pt;
font-size:9.0pt;
font-family:Arial;
font-style:italic;}
p.MsoToc5, li.MsoToc5, div.MsoToc5
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:40.0pt;
margin-bottom:.0001pt;
font-size:9.0pt;
font-family:Arial;}
p.MsoToc6, li.MsoToc6, div.MsoToc6
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:50.0pt;
margin-bottom:.0001pt;
font-size:9.0pt;
font-family:Arial;}
p.MsoToc7, li.MsoToc7, div.MsoToc7
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:60.0pt;
margin-bottom:.0001pt;
font-size:9.0pt;
font-family:Arial;}
p.MsoToc8, li.MsoToc8, div.MsoToc8
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:70.0pt;
margin-bottom:.0001pt;
font-size:9.0pt;
font-family:Arial;}
p.MsoToc9, li.MsoToc9, div.MsoToc9
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:80.0pt;
margin-bottom:.0001pt;
font-size:9.0pt;
font-family:Arial;}
p.MsoHeader, li.MsoHeader, div.MsoHeader
{margin:0in;
margin-bottom:.0001pt;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoFooter, li.MsoFooter, div.MsoFooter
{margin:0in;
margin-bottom:.0001pt;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoCaption, li.MsoCaption, div.MsoCaption
{margin-top:6.0pt;
margin-right:0in;
margin-bottom:6.0pt;
margin-left:0in;
font-size:10.0pt;
font-family:"Times New Roman";
font-weight:bold;}
p.MsoListBullet, li.MsoListBullet, div.MsoListBullet
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:.25in;
margin-bottom:.0001pt;
text-indent:-.25in;
mso-list:l5 level1 lfo21;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoListNumber, li.MsoListNumber, div.MsoListNumber
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:.25in;
margin-bottom:.0001pt;
text-indent:-.25in;
mso-list:l4 level1 lfo13;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoListBullet2, li.MsoListBullet2, div.MsoListBullet2
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:32.15pt;
margin-bottom:.0001pt;
text-indent:-.25in;
mso-list:l3 level1 lfo23;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoListBullet3, li.MsoListBullet3, div.MsoListBullet3
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:46.3pt;
margin-bottom:.0001pt;
text-indent:-.25in;
mso-list:l2 level1 lfo25;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoListBullet4, li.MsoListBullet4, div.MsoListBullet4
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:60.45pt;
margin-bottom:.0001pt;
text-indent:-.25in;
mso-list:l1 level1 lfo27;
font-size:10.0pt;
font-family:"Times New Roman";}
p.MsoListBullet5, li.MsoListBullet5, div.MsoListBullet5
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:74.6pt;
margin-bottom:.0001pt;
text-indent:-.25in;
mso-list:l0 level1 lfo29;
font-size:10.0pt;
font-family:"Times New Roman";}
a:link, span.MsoHyperlink
{color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{color:purple;
text-decoration:underline;}
p
{mso-margin-top-alt:auto;
margin-right:0in;
mso-margin-bottom-alt:auto;
margin-left:0in;
font-size:10.0pt;
font-family:"Times New Roman";}
p.Heading0, li.Heading0, div.Heading0
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:.4in;
text-align:center;
text-indent:-.4in;
page-break-after:avoid;
font-size:14.0pt;
font-family:Arial;
text-transform:uppercase;
font-weight:bold;
text-decoration:underline;}
p.Kwnp, li.Kwnp, div.Kwnp
{margin:0in;
margin-bottom:.0001pt;
page-break-after:avoid;
font-size:10.0pt;
font-family:"Times New Roman";}
p.Rtab, li.Rtab, div.Rtab
{margin:0in;
margin-bottom:.0001pt;
font-size:10.0pt;
font-family:"Times New Roman";}
p.Continued1, li.Continued1, div.Continued1
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:0in;
page-break-after:avoid;
font-size:12.0pt;
font-family:Arial;
font-weight:bold;}
p.Continued2, li.Continued2, div.Continued2
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:0in;
page-break-after:avoid;
font-size:11.0pt;
font-family:Arial;
font-weight:bold;
font-style:italic;}
p.Continued3, li.Continued3, div.Continued3
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:0in;
page-break-after:avoid;
font-size:11.0pt;
font-family:Arial;}
p.Quote1B, li.Quote1B, div.Quote1B
{margin-top:0in;
margin-right:0in;
margin-bottom:0in;
margin-left:.25in;
margin-bottom:.0001pt;
text-indent:-.25in;
mso-list:l12 level1 lfo41;
font-size:9.0pt;
font-family:Verdana;
color:#333399;}
span.EmailStyle50
{mso-style-type:personal-compose;
font-family:"Times New Roman";
color:windowtext;
font-weight:normal;
font-style:normal;
text-decoration:none none;}
p.Continued4, li.Continued4, div.Continued4
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:0in;
page-break-after:avoid;
font-size:10.0pt;
font-family:Arial;
font-weight:bold;}
p.Equation, li.Equation, div.Equation
{margin:0in;
margin-bottom:.0001pt;
font-size:10.0pt;
font-family:Arial;}
p.Quote1, li.Quote1, div.Quote1
{margin:0in;
margin-bottom:.0001pt;
font-size:9.0pt;
font-family:Verdana;
color:#333399;}
p.Quote2, li.Quote2, div.Quote2
{margin:0in;
margin-bottom:.0001pt;
font-size:10.0pt;
font-family:Tahoma;
color:red;}
p.Quote3, li.Quote3, div.Quote3
{margin:0in;
margin-bottom:.0001pt;
font-size:10.0pt;
font-family:"Myriad Pro";
color:fuchsia;}
p.Continued5, li.Continued5, div.Continued5
{margin-top:12.0pt;
margin-right:0in;
margin-bottom:3.0pt;
margin-left:0in;
page-break-after:avoid;
font-size:10.0pt;
font-family:Arial;
text-decoration:underline;}
/* Page Definitions */
@page
{mso-endnote-separator:url("cid:header.htm\@01CA94FE.6215CB80") es;
mso-endnote-continuation-separator:url("cid:header.htm\@01CA94FE.6215CB80") ecs;}
@page Section1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.Section1
{page:Section1;}
/* List Definitions */
@list l0
{mso-list-id:-128;
mso-list-type:simple;
mso-list-template-ids:1523206422;}
@list l0:level1
{mso-level-number-format:bullet;
mso-level-style-link:"List Bullet 5";
mso-level-text:\F0B7;
mso-level-tab-stop:74.6pt;
mso-level-number-position:left;
margin-left:74.6pt;
text-indent:-.25in;
font-family:Symbol;}
@list l1
{mso-list-id:-127;
mso-list-type:simple;
mso-list-template-ids:1921912740;}
@list l1:level1
{mso-level-number-format:bullet;
mso-level-style-link:"List Bullet 4";
mso-level-text:\F0B7;
mso-level-tab-stop:60.45pt;
mso-level-number-position:left;
margin-left:60.45pt;
text-indent:-.25in;
font-family:Symbol;}
@list l2
{mso-list-id:-126;
mso-list-type:simple;
mso-list-template-ids:-191837982;}
@list l2:level1
{mso-level-number-format:bullet;
mso-level-style-link:"List Bullet 3";
mso-level-text:\F0B7;
mso-level-tab-stop:46.3pt;
mso-level-number-position:left;
margin-left:46.3pt;
text-indent:-.25in;
font-family:Symbol;}
@list l3
{mso-list-id:-125;
mso-list-type:simple;
mso-list-template-ids:-1023611344;}
@list l3:level1
{mso-level-number-format:bullet;
mso-level-style-link:"List Bullet 2";
mso-level-text:\F0B7;
mso-level-tab-stop:32.15pt;
mso-level-number-position:left;
margin-left:32.15pt;
text-indent:-.25in;
font-family:Symbol;}
@list l4
{mso-list-id:-120;
mso-list-type:simple;
mso-list-template-ids:407138110;}
@list l4:level1
{mso-level-style-link:"List Number";
mso-level-tab-stop:.25in;
mso-level-number-position:left;
margin-left:.25in;
text-indent:-.25in;}
@list l5
{mso-list-id:-119;
mso-list-type:simple;
mso-list-template-ids:-870054632;}
@list l5:level1
{mso-level-number-format:bullet;
mso-level-style-link:"List Bullet";
mso-level-text:\F0B7;
mso-level-tab-stop:.25in;
mso-level-number-position:left;
margin-left:.25in;
text-indent:-.25in;
font-family:Symbol;}
@list l6
{mso-list-id:95171769;
mso-list-template-ids:-777386506;}
@list l6:level1
{mso-level-tab-stop:.25in;
mso-level-number-position:left;
margin-left:.25in;
text-indent:-.25in;}
@list l6:level2
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:.75in;
mso-level-number-position:left;
margin-left:.75in;
text-indent:-.25in;}
@list l6:level3
{mso-level-number-format:roman-lower;
mso-level-tab-stop:1.5in;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l6:level4
{mso-level-tab-stop:2.0in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l6:level5
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:2.5in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l6:level6
{mso-level-number-format:roman-lower;
mso-level-tab-stop:3.0in;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l6:level7
{mso-level-tab-stop:3.5in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l6:level8
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:4.0in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l6:level9
{mso-level-number-format:roman-lower;
mso-level-tab-stop:4.5in;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l7
{mso-list-id:173109523;
mso-list-type:hybrid;
mso-list-template-ids:1964156186 1140082986 269025283 269025285 269025281 269025283 269025285 269025281 269025283 269025285;}
@list l7:level1
{mso-level-number-format:bullet;
mso-level-text:\F0B7;
mso-level-tab-stop:.25in;
mso-level-number-position:left;
margin-left:.25in;
text-indent:-.25in;
font-family:Symbol;}
@list l8
{mso-list-id:193731960;
mso-list-type:hybrid;
mso-list-template-ids:1558759782 -908146422 67698713 67698715 67698703 67698713 67698715 67698703 67698713 67698715;}
@list l8:level1
{mso-level-tab-stop:.25in;
mso-level-number-position:left;
margin-left:.25in;
text-indent:-.25in;}
@list l9
{mso-list-id:404690752;
mso-list-type:hybrid;
mso-list-template-ids:1471339562 -908146422 67698713 67698715 67698703 67698713 67698715 67698703 67698713 67698715;}
@list l9:level1
{mso-level-tab-stop:.25in;
mso-level-number-position:left;
margin-left:.25in;
text-indent:-.25in;}
@list l10
{mso-list-id:541945590;
mso-list-type:hybrid;
mso-list-template-ids:916764866 1908824444 67698713 67698715 67698703 67698713 67698715 67698703 67698713 67698715;}
@list l10:level1
{mso-level-tab-stop:.25in;
mso-level-number-position:left;
margin-left:.25in;
text-indent:-.25in;}
@list l11
{mso-list-id:818813599;
mso-list-template-ids:226670568;}
@list l11:level1
{mso-level-tab-stop:.25in;
mso-level-number-position:left;
margin-left:.25in;
text-indent:-.25in;}
@list l11:level2
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:.75in;
mso-level-number-position:left;
margin-left:.75in;
text-indent:-.25in;}
@list l11:level3
{mso-level-number-format:roman-lower;
mso-level-tab-stop:1.5in;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l11:level4
{mso-level-tab-stop:2.0in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l11:level5
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:2.5in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l11:level6
{mso-level-number-format:roman-lower;
mso-level-tab-stop:3.0in;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l11:level7
{mso-level-tab-stop:3.5in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l11:level8
{mso-level-number-format:alpha-lower;
mso-level-tab-stop:4.0in;
mso-level-number-position:left;
text-indent:-.25in;}
@list l11:level9
{mso-level-number-format:roman-lower;
mso-level-tab-stop:4.5in;
mso-level-number-position:right;
text-indent:-9.0pt;}
@list l12
{mso-list-id:1035622196;
mso-list-type:hybrid;
mso-list-template-ids:-1184729312 1801886368 269025283 269025285 269025281 269025283 269025285 269025281 269025283 269025285;}
@list l12:level1
{mso-level-number-format:bullet;
mso-level-style-link:"Quote 1B";
mso-level-text:\F0B7;
mso-level-tab-stop:.25in;
mso-level-number-position:left;
margin-left:.25in;
text-indent:-.25in;
font-family:Symbol;}
@list l13
{mso-list-id:1081875095;
mso-list-template-ids:-1399814256;}
@list l13:level1
{mso-level-style-link:"Heading 1";
mso-level-text:%1;
mso-level-tab-stop:.4in;
mso-level-number-position:left;
margin-left:.4in;
text-indent:-.4in;}
@list l13:level2
{mso-level-style-link:"Heading 2";
mso-level-text:"%1\.%2";
mso-level-tab-stop:.5in;
mso-level-number-position:left;
margin-left:.5in;
text-indent:-.5in;}
@list l13:level3
{mso-level-style-link:"Heading 3";
mso-level-text:"%1\.%2\.%3";
mso-level-tab-stop:.6in;
mso-level-number-position:left;
margin-left:.6in;
text-indent:-.6in;}
@list l13:level4
{mso-level-style-link:"Heading 4";
mso-level-text:"%1\.%2\.%3\.%4";
mso-level-tab-stop:.7in;
mso-level-number-position:left;
margin-left:.7in;
text-indent:-.7in;}
@list l13:level5
{mso-level-style-link:"Heading 5";
mso-level-text:"%1\.%2\.%3\.%4\.%5";
mso-level-tab-stop:.8in;
mso-level-number-position:left;
margin-left:.8in;
text-indent:-.8in;}
@list l13:level6
{mso-level-style-link:"Heading 6";
mso-level-text:"%1\.%2\.%3\.%4\.%5\.%6";
mso-level-tab-stop:1.0in;
mso-level-number-position:left;
margin-left:.8in;
text-indent:-.8in;}
@list l13:level7
{mso-level-style-link:"Heading 7";
mso-level-text:"%1\.%2\.%3\.%4\.%5\.%6\.%7";
mso-level-tab-stop:.9in;
mso-level-number-position:left;
margin-left:.9in;
text-indent:-.9in;}
@list l13:level8
{mso-level-style-link:"Heading 8";
mso-level-text:"%1\.%2\.%3\.%4\.%5\.%6\.%7\.%8";
mso-level-tab-stop:1.0in;
mso-level-number-position:left;
margin-left:1.0in;
text-indent:-1.0in;}
@list l13:level9
{mso-level-style-link:"Heading 9";
mso-level-text:"%1\.%2\.%3\.%4\.%5\.%6\.%7\.%8\.%9";
mso-level-tab-stop:1.1in;
mso-level-number-position:left;
margin-left:1.1in;
text-indent:-1.1in;}
@list l14
{mso-list-id:1459450249;
mso-list-template-ids:1978419898;}
@list l14:level1
{mso-level-text:%1;
mso-level-tab-stop:.3in;
mso-level-number-position:left;
margin-left:.3in;
text-indent:-.3in;}
@list l14:level2
{mso-level-text:"%1\.%2";
mso-level-tab-stop:.4in;
mso-level-number-position:left;
margin-left:.4in;
text-indent:-.4in;}
@list l14:level3
{mso-level-text:"%1\.%2\.%3";
mso-level-tab-stop:.5in;
mso-level-number-position:left;
margin-left:.5in;
text-indent:-.5in;}
@list l14:level4
{mso-level-text:"%1\.%2\.%3\.%4";
mso-level-tab-stop:.6in;
mso-level-number-position:left;
margin-left:.6in;
text-indent:-.6in;}
@list l14:level5
{mso-level-text:"%1\.%2\.%3\.%4\.%5";
mso-level-tab-stop:.7in;
mso-level-number-position:left;
margin-left:.7in;
text-indent:-.7in;}
@list l14:level6
{mso-level-text:"%1\.%2\.%3\.%4\.%5\.%6";
mso-level-tab-stop:.8in;
mso-level-number-position:left;
margin-left:.8in;
text-indent:-.8in;}
@list l14:level7
{mso-level-text:"%1\.%2\.%3\.%4\.%5\.%6\.%7";
mso-level-tab-stop:.9in;
mso-level-number-position:left;
margin-left:.9in;
text-indent:-.9in;}
@list l14:level8
{mso-level-text:"%1\.%2\.%3\.%4\.%5\.%6\.%7\.%8";
mso-level-tab-stop:1.0in;
mso-level-number-position:left;
margin-left:1.0in;
text-indent:-1.0in;}
@list l14:level9
{mso-level-text:"%1\.%2\.%3\.%4\.%5\.%6\.%7\.%8\.%9";
mso-level-tab-stop:1.1in;
mso-level-number-position:left;
margin-left:1.1in;
text-indent:-1.1in;}
@list l15
{mso-list-id:1820029168;
mso-list-template-ids:250634588;}
@list l15:level1
{mso-level-text:%1;
mso-level-tab-stop:.3in;
mso-level-number-position:left;
margin-left:.3in;
text-indent:-.3in;}
@list l15:level2
{mso-level-text:"%1\.%2";
mso-level-tab-stop:.4in;
mso-level-number-position:left;
margin-left:.4in;
text-indent:-.4in;}
@list l15:level3
{mso-level-text:"%1\.%2\.%3";
mso-level-tab-stop:.5in;
mso-level-number-position:left;
margin-left:.5in;
text-indent:-.5in;}
@list l15:level4
{mso-level-text:"%1\.%2\.%3\.%4";
mso-level-tab-stop:.6in;
mso-level-number-position:left;
margin-left:.6in;
text-indent:-.6in;}
@list l15:level5
{mso-level-text:"%1\.%2\.%3\.%4\.%5";
mso-level-tab-stop:.7in;
mso-level-number-position:left;
margin-left:.7in;
text-indent:-.7in;}
@list l15:level6
{mso-level-text:"%1\.%2\.%3\.%4\.%5\.%6";
mso-level-tab-stop:.8in;
mso-level-number-position:left;
margin-left:.8in;
text-indent:-.8in;}
@list l15:level7
{mso-level-text:"%1\.%2\.%3\.%4\.%5\.%6\.%7";
mso-level-tab-stop:.9in;
mso-level-number-position:left;
margin-left:.9in;
text-indent:-.9in;}
@list l15:level8
{mso-level-text:"%1\.%2\.%3\.%4\.%5\.%6\.%7\.%8";
mso-level-tab-stop:1.0in;
mso-level-number-position:left;
margin-left:1.0in;
text-indent:-1.0in;}
@list l15:level9
{mso-level-text:"%1\.%2\.%3\.%4\.%5\.%6\.%7\.%8\.%9";
mso-level-tab-stop:1.1in;
mso-level-number-position:left;
margin-left:1.1in;
text-indent:-1.1in;}
@list l16
{mso-list-id:1843276167;
mso-list-type:hybrid;
mso-list-template-ids:563144626 883078704 269025283 269025285 269025281 269025283 269025285 269025281 269025283 269025285;}
@list l16:level1
{mso-level-number-format:bullet;
mso-level-text:\F0B7;
mso-level-tab-stop:.25in;
mso-level-number-position:left;
margin-left:.25in;
text-indent:-.25in;
font-family:Symbol;}
ol
{margin-bottom:0in;}
ul
{margin-bottom:0in;}
-->
</style>
<!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="2050" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang=EN-CA link=blue vlink=purple>
<div class=Section1>
<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'>We have a sputtering & evaporation system with 2 RF & 2 DC
cathodes. To date, we have only sputtered metals but we are considering
sputtering oxides as well. I wonder whether others think this is a good idea or
not and what, if any, chamber cleaning and conditions procedures are used when
switching between oxides & metals. Specifically, the metals currently used
in the system are nickel, titanium, chromium, aluminum, & gold. The oxides
that we are considering are SiO<sub>2</sub>, TiO<sub>2</sub></span>, ZnO, Al<sub>2</sub>O<sub>3</sub>,
& ITO.<o:p></o:p></font></p>
<p class=MsoNormal><font size=2 face="Times New Roman"><o:p> </o:p></font></p>
<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'>I have heard that is not a good idea to sputter metals and oxides in
the same system but I don’t know the reasons for this. Also, I know that
some labs have metals only & oxides only sputtering systems, whereas others
have a sputtering system for both metals & oxides. My own experience is
with a system in which SiO<sub>2</sub>, niobium, aluminum, & molybdenum
were deposited. When metals were sputtered after SiO<sub>2</sub> sputtering,
there was a lot of arcing in the deposition chamber, which damaged the devices
being fabricated on silicon wafers. Consequently, after oxide sputtering, the
chamber was conditioned by oxygen glow discharge cleaning and a lengthy metal
deposition until the arcing ceased.<o:p></o:p></span></font></p>
<p class=MsoNormal><font size=2 face="Times New Roman"><o:p> </o:p></font></p>
<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'>Any advice would be greatly appreciated.<o:p></o:p></span></font></p>
<p class=MsoNormal><font size=2 face="Times New Roman"><o:p> </o:p></font></p>
<p class=MsoNormal><font size=2 face="Times New Roman"><o:p> </o:p></font></p>
<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'>Regards,<o:p></o:p></span></font></p>
<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'>Philip Kubik<o:p></o:p></span></font></p>
<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'><o:p> </o:p></span></font></p>
<p class=MsoNormal><font size=2 face=Arial><span style='font-size:10.0pt;
font-family:Arial'>_________________________</span></font><o:p></o:p></p>
<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'> <o:p></o:p></span></font></p>
<p class=MsoNormal><font size=2 face=Arial><span style='font-size:10.0pt;
font-family:Arial'>Philip Kubik, Ph.D.<br>
Cleanroom Engineer<br>
4D Labs, Simon Fraser University<br>
8888 University Dr.<br>
Burnaby, BC, Canada V5A 1S6<br>
Office phone: 778-782-8026</span></font><o:p></o:p></p>
<p class=MsoNormal><font size=2 face=Arial><span style='font-size:10.0pt;
font-family:Arial'>Email: </span></font><a href="mailto:Philip.Kubik@4DLabs.ca"><font
face=Arial><span style='font-family:Arial'>Kubik@4DLabs.ca</span></font></a><o:p></o:p></p>
<p class=MsoNormal><font size=2 face="Times New Roman"><span style='font-size:
10.0pt'> </span><o:p></o:p></font></p>
<p class=MsoNormal><font size=2 face="Times New Roman"><o:p> </o:p></font></p>
</div>
</body>
</html>