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<p class=MsoNormal>Hello all,<o:p></o:p></p>
<p class=MsoNormal><o:p> </o:p></p>
<p class=MsoNormal>We are contemplating the possibility of etching NbTiN in our
ICP RIE chlorine etch system (Oxford Plasmalab 100 with ICP380 source). Initial
feedback regarding potential chamber contamination issues are encouraging but
we would appreciate any input from people whom may have had experience etching
this material in the past. Many thanks in advance.<o:p></o:p></p>
<p class=MsoNormal><o:p> </o:p></p>
<p class=MsoNormal>Regards,<o:p></o:p></p>
<p class=MsoNormal>Vito Logiudice<o:p></o:p></p>
<p class=MsoNormal><o:p> </o:p></p>
<p class=MsoNormal>Vito Logiudice P.Eng.<o:p></o:p></p>
<p class=MsoNormal>Director of Operations<o:p></o:p></p>
<p class=MsoNormal>QNC & RAC Fabrication Facilities<o:p></o:p></p>
<p class=MsoNormal><o:p> </o:p></p>
<p class=MsoNormal>University of Waterloo<o:p></o:p></p>
<p class=MsoNormal>200 University Avenue West<o:p></o:p></p>
<p class=MsoNormal>Waterloo, ON <o:p></o:p></p>
<p class=MsoNormal>Canada N2L 3G1<o:p></o:p></p>
<p class=MsoNormal>Tel: 1-519-888-4567 ext. 38703<o:p></o:p></p>
<p class=MsoNormal>Fax: 1-519-888-7610<o:p></o:p></p>
<p class=MsoNormal>Cel: 1-519-500-2538<o:p></o:p></p>
<p class=MsoNormal>Email: vlogiudi@uwaterloo.ca<o:p></o:p></p>
<p class=MsoNormal><o:p> </o:p></p>
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