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Low temperature (cryogenic to 300 C.) PECVD reactions involving silanes
and N2O, NH3 and CxHy compounds was an area of technical expertise I
practiced for many years in the IC industry. I'm not sure what
information you need, but I assure you these reactions can be carried
out at RT if needed....<br>
<pre class="moz-signature" cols="80">David A. Bunzow
User Facilities Program Manager
The Molecular Foundry
Materials Science Division
Lawrence Berkeley National Laboratory
1 Cyclotron Road MS 67-3207
Berkeley, CA 94720
Office: 510-486-4574
FAX: 510-486-7424
Cell: 701-541-2354
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On 1/28/2011 7:09 AM, Matthieu Nannini, Dr. wrote:
<blockquote cite="mid:B6952754-F016-4569-A8CC-EC9332DCEC3D@mcgill.ca"
type="cite">
<pre wrap="">Hi all,
The polymer the user wants to use is a heat decomposable material (QPAC 40<a class="moz-txt-link-rfc2396E" href="http://www.empowermaterials.com/products/qpac40/"><http://www.empowermaterials.com/products/qpac40/></a>)that starts to decompose into CO2 mainly (according to user) when temperature exceeds 240C.
I'm more concerned about the possible reaction between silane and N2O.
Matthieu
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