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Vincent,<br>
To date we have reserved lab network for policy and operational <br>
related questions. Process related questions are better directed to
"mems-talk".<br>
I welcome alternate opinion from the group on this protocol.<br>
<br>
However, since I am writing a reply, I offer the following:<br>
I would not advocate an automated liftoff tool in our diverse
environments.<br>
I would invest the money in better control of substrate temp during
evaporation<br>
e.g. a cooled chuck or ebeam upgrade rather than thermal evap etc.<br>
We have used an acetone filled hobby air brush to enhance lift off -
very cheap and very effective.<br>
Several groups have tried ultrasonic - many have experienced device
damage from this strategy.<br>
Sincerely,<br>
Bill Flounders<br>
UC Berkeley<br>
<br>
<br>
Luciani, Vincent wrote:
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<p class="MsoNormal"><span
style="font-size: 12pt; font-family: "Trebuchet MS","sans-serif";">Hello
Labnetwork,<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size: 12pt; font-family: "Trebuchet MS","sans-serif";"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-size: 12pt; font-family: "Trebuchet MS","sans-serif";">I
want to help our users with their lift-off processing. <o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size: 12pt; font-family: "Trebuchet MS","sans-serif";">I
am seeking your thoughts and comments on an automated lift-tool. There
are hot solvent spray systems and batch immersion systems that work
well in production environments where mask layout is optimized around a
process. As we all know, a user facility can bring extra challenges to
such tools since not all mask layouts are optimized for success on a
automatic lift-off tool. Many folks simply rely on extended time
solvent soaks. Has anyone had success with a particular brand solvent
spray tool in their lab or have you found success with a different
approach to the problem? <o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size: 12pt; font-family: "Trebuchet MS","sans-serif";"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-size: 12pt; font-family: "Trebuchet MS","sans-serif";"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-size: 12pt; font-family: "Trebuchet MS","sans-serif";">Thanks,<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size: 12pt; font-family: "Trebuchet MS","sans-serif";"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-family: "Microsoft Sans Serif","sans-serif";">Vincent K.
Luciani<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family: "Microsoft Sans Serif","sans-serif";">NanoFab
manager<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family: "Microsoft Sans Serif","sans-serif";"><a
moz-do-not-send="true" href="http://www.cnst.nist.gov/"><span
style="color: blue;">Center for Nanoscale Science and Technology</span></a><o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family: "Microsoft Sans Serif","sans-serif";">National
Institute of Standards and Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family: "Microsoft Sans Serif","sans-serif";">100 Bureau
Drive, MS 6201<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family: "Microsoft Sans Serif","sans-serif";">Gaithersburg,
MD 20899-6200 USA<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-family: "Microsoft Sans Serif","sans-serif";">+1-301-975-2886<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span
style="font-size: 12pt; font-family: "Trebuchet MS","sans-serif";"><o:p> </o:p></span></p>
<p class="MsoNormal"><span
style="font-size: 12pt; font-family: "Trebuchet MS","sans-serif";"><o:p> </o:p></span></p>
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