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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal>Lab Network Community,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Thank you in advance for your time and thoughts.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>We are undertaking a critical review of our Etch Process Chamber Wet or Manual Cleaning Procedures. For the purpose of this review we will ignore plasma cleaning and conditioning.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Could you please describe for me the techniques you use to clean your etch chambers. I am specifically interested in;<o:p></o:p></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo1'><![if !supportLists]><span style='mso-list:Ignore'>1.<span style='font:7.0pt "Times New Roman"'> </span></span><![endif]>Processes/Gasses being run in chamber?<o:p></o:p></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo1'><![if !supportLists]><span style='mso-list:Ignore'>2.<span style='font:7.0pt "Times New Roman"'> </span></span><![endif]>Type of contamination/ build up attempting to remove.<o:p></o:p></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo1'><![if !supportLists]><span style='mso-list:Ignore'>3.<span style='font:7.0pt "Times New Roman"'> </span></span><![endif]>Frequency of cleaning? Or What signals you it is time to clean. <o:p></o:p></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo1'><![if !supportLists]><span style='mso-list:Ignore'>4.<span style='font:7.0pt "Times New Roman"'> </span></span><![endif]>Inner chamber material being cleaned? (quartz, anodized aluminum, SS, etc.)<o:p></o:p></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo1'><![if !supportLists]><span style='mso-list:Ignore'>5.<span style='font:7.0pt "Times New Roman"'> </span></span><![endif]>What wetting agent is used? (water, solvent type or acid type)<o:p></o:p></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo1'><![if !supportLists]><span style='mso-list:Ignore'>6.<span style='font:7.0pt "Times New Roman"'> </span></span><![endif]>That is the wiping agent (brillow pad/ CR wipes)<o:p></o:p></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo1'><![if !supportLists]><span style='mso-list:Ignore'>7.<span style='font:7.0pt "Times New Roman"'> </span></span><![endif]>Is there a specific order/processes for your cleaning? (Acetone first, water second etc)<o:p></o:p></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo1'><![if !supportLists]><span style='mso-list:Ignore'>8.<span style='font:7.0pt "Times New Roman"'> </span></span><![endif]> Are there other suggestions or thoughts you would like to include in this review.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>I will compile a summary of the responses and share them with those who are interested.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Thank you,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><b><i><span style='font-size:12.0pt;font-family:"Times New Roman","serif"'>Geoffrey C. Gardner</span></i></b><span style='font-size:12.0pt;font-family:"Times New Roman","serif"'><o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Times New Roman","serif"'>Microfab Research Engineer</span></b><span style='font-size:12.0pt;font-family:"Times New Roman","serif"'><o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Times New Roman","serif"'>Purdue University, Birck Nanotechnology Center, </span></b><span style='font-size:12.0pt;font-family:"Times New Roman","serif"'><o:p></o:p></span></p><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Times New Roman","serif"'>1205 West State Street</span></b><b><span style='font-size:10.0pt;font-family:"Times New Roman","serif"'><br></span></b><b><span style='font-size:10.0pt;font-family:"Times New Roman","serif"'>West Lafayette, IN 47907</span></b><b><span style='font-size:10.0pt;font-family:"Times New Roman","serif"'><br></span></b><b><span style='font-size:10.0pt;font-family:"Times New Roman","serif"'>office: (765) 494-3458</span></b><o:p></o:p></p></div></body></html>