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<p class="MsoNormal">The odors in plasma systems that use sulfur
compounds are
well known and have been analyzed. Back-streaming from pumps
combined
with chamber processes can also result in odors. It is not
surprising that you smell
something in a sputtering system that uses selenium. The trace
chemicals
may be harmful and one should avoid breathing them. If you smell
it, then you have it.<span style=""> </span>Your local safety
officer should be able help you seek solutions. There are mature
protocols
in the industry for opening, operating, and cleaning reactive
systems such
as evaporator chambers, plasma chambers, implant sources, and even
ovens. You may find that the boxes used to store the deposited
substrates and vacuum system parts might develop the same odor
after a few days
of storage. <br>
<br>
Some possibilities are: (1) Improve protocol: Delay opening of the
chamber
after a deposition and go through repeated vent/pump cycles before
opening the
chamber. Require operators to wear appropriate personal
protection
equipment e.g., gloves, sleeve covers, masks etc. Avoid opening
the
chamber when the area is crowded with people. <br>
<br>
(2) Enhance installation for safety: Place the entire equipment in
a exhausted
enclosure, environmental chamber, a hood, or a glove box such
that there
is enough exhaust to carry the odor away and airflow is always
away (and not
towards) the operator. What to do with the exhaust will depend on
the
size of your operation and local policies/regulations. Prevent
back-streaming from the pumping station. Pump oils, even in trace
amounts, lead to serious problems when added to the chamber
chemistry. <br>
</p>
<p class="MsoNormal">(3) Selenium and many of its compounds are
considered toxic. At some point, the odor causing compound will
have to identified. In sulfur, fluorine, oxygen based plasma
systems, oxyfluorides are believed to cause the odors.<br>
</p>
<p class="MsoNormal"><br>
(4) You will have many particles. They will get worse as the
system is
used. Your results will be dominated by particle contamination if
you
keep making depositions without any cleaning. You may choose to
cover
surfaces that are in the direct line of deposition with a
disposable liner such
as a custom made shield or a clean Al foil. Protocols to change
the
shield often and to vacuum out the chamber after every deposition
run will have
to be developed. You have to use a vacuum cleaner with a
HEPA filter
designed for such a laboratory use and dispose bags
appropriately. A scraping
tool made by pinching flat and sharpening a stainless steel tube
to custom fit
the vacuum cleaner hose will help. You can make smaller vacuum
tools
from smaller tubes by using a Teflon plug (cork) to fit them into
the vacuum
hose. <br>
<br>
Good luck and please do send info about the closure of this<span
style=""> </span>issue to the microelectronics community. <br>
<br>
Pramod Karulkar</p>
<pre class="moz-signature" cols="72">Pramod C Karulkar
1470 Goshawk Lane
Fairbanks AK 99709
907 457 4123 </pre>
On 3/26/2011 8:27 AM, Mark M Crain wrote:
<blockquote cite="mid:4D8DDBBA.716B.0008.1@gwise.louisville.edu"
type="cite">
<pre wrap="">Hello Everyone,
We have just started some sputter deposition of copper indium
diselenide. This deposition has started some questioning both its
safety and contamination. I did the obvious before even purchasing the
target; reviewing the MSDS, speaking with target suppliers, and
"googling" the topic of CIS and CIGS deposition.
1) Earlier this week there were concerns regarding the smell coming
from the chamber after sputter deposition. I did have the opportunity to
smell this. Is this harmful? Would it be advisable to add some pump
and purge process to the venting sequence?
2) There are claims of particulate in the chamber. I have not seen
this yet but would be interested in comments regarding the use of a
target like this and its possible contamination to other deposition
processes. The sources have lids so this material should be landing on
the lids and not the targets. I can imagine that heated areas of the
chamber could off gas contamination.
Best Regards
Mark
Mark Crain
Cleanroom Manager
University of Louisville
SRB room 233
2210 South Brook Street
Louisville KY 40208
Phone 502/852-1572
Fax 502/852-8128
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</pre>
</blockquote>
<br>
<pre class="moz-signature" cols="72">--
</pre>
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