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Hey there,<br>
<br>
At Harvard CNS, we have fire-suppression on our metal (solvent +
photoresist) benches (single big CO2 bottle on each), and no fire
suppression on poly (acid/base/developer) benches.<br>
<br>
Quartz heated tanks usually means RCA clean or Piranha etch, i.e.
acids, so less fire risk. At least here, no suppression would be
required. Local codes may vary, of course...<br>
<br>
<br>
Mac Hathaway<br>
Harvard CNS<br>
<br>
<br>
<br>
Li, Jianchao wrote:
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<p class="MsoNormal">Hi guys,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We bought some used polypro wet benches which
have heated quartz tanks. I am wondering whether it ‘s a must to have
CO2 fire suppression system for them.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Or sprinkler system from the cleanroom will be
enough. <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">J.C.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormalCxSpMiddle" style="line-height: 12pt;"><span
style="font-size: 12pt; font-family: "Lucida Calligraphy";">Jianchao
(J.C.) Li </span><span
style="font-size: 9pt; font-family: "Times New Roman","serif";">Ph.D.</span><span
style="font-size: 12pt; font-family: "Lucida Calligraphy";"><o:p></o:p></span></p>
<p class="MsoNormalCxSpMiddle" style="line-height: 12pt;"><span
style="font-size: 12pt; font-family: "Times New Roman","serif";">Nanofabrication
Facilities Manager<o:p></o:p></span></p>
<p class="MsoNormalCxSpMiddle" style="line-height: 12pt;"><span
style="font-size: 12pt; font-family: "Times New Roman","serif";">UNT
Discovery Park<o:p></o:p></span></p>
<p class="MsoNormalCxSpMiddle" style="line-height: 12pt;"><span
style="font-size: 12pt; font-family: "Times New Roman","serif";">3940
North Elm, Suite A-101<o:p></o:p></span></p>
<p class="MsoNormalCxSpMiddle" style="line-height: 12pt;"><span
style="font-size: 12pt; font-family: "Times New Roman","serif";">Denton,
TX 76203-5017<o:p></o:p></span></p>
<p class="MsoNormalCxSpMiddle" style="line-height: 12pt;"><span
style="font-size: 12pt; font-family: "Times New Roman","serif";">voice:
<a moz-do-not-send="true" href="tel:%28940%29%20369-5318"
target="_blank"><span style="color: windowtext;">(940) 369-5318</span></a><o:p></o:p></span></p>
<p class="MsoNormalCxSpMiddle" style="line-height: 12pt;"><span
style="font-size: 12pt; font-family: "Times New Roman","serif";">e-mail:
<u><a moz-do-not-send="true" href="mailto:jianchao.li@unt.edu"
target="_blank"><span style="color: windowtext;">jianchao.li@unt.edu</span></a></u></span><span
style="font-size: 8pt; font-family: "Times New Roman","serif";"><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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