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Hi,<br>
Attached is the Matlab script to convert the WYKO test output .opd
files into the x,y,z matrix data.<br>
WYKO provides it.<br>
Our students use it intensively, for a long time.<br>
===============<br>
I think that if you want to do software automation to analyze the
WYKO data on the fly it could be<br>
more complicated and slower, than collecting the whole data first,
store it into the WYKO database<br>
and pass the site files to the Matlab script, etc./ for that last
part you can develop something indeed.<br>
When you do the WYKO Automatic test on the whole wafer (or large
areas), I think you should enable<br>
the autofocus capability at each site, to account for the possible
wafer bow.<br>
<br>
Thanks, Bernard<br>
<br>
<br>
On 7/8/11 2:03 PM, Rungrot Kitsomboonloha wrote:
<blockquote cite="mid:4E17466A.3000005@eecs.berkeley.edu"
type="cite">
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Hi,<br>
<br>
I would like to joint the list-serv about Wyko support. My problem
is about development automatic analysis using matlab code based on
Wyko database. I saved wyko file in asc format and have problems
getting the right height. Please suggest a correction factor.<br>
<br>
Best Regards,<br>
Jack<br>
<br>
-------- Original Message --------
<table class="moz-email-headers-table" border="0" cellpadding="0"
cellspacing="0">
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<tr>
<th align="RIGHT" nowrap="nowrap" valign="BASELINE">Subject:
</th>
<td>wkyo</td>
</tr>
<tr>
<th align="RIGHT" nowrap="nowrap" valign="BASELINE">Date: </th>
<td>Fri, 08 Jul 2011 08:04:40 -0700</td>
</tr>
<tr>
<th align="RIGHT" nowrap="nowrap" valign="BASELINE">From: </th>
<td>Robert M. Hamilton <a moz-do-not-send="true"
class="moz-txt-link-rfc2396E"
href="mailto:bob@eecs.berkeley.edu"><bob@eecs.berkeley.edu></a></td>
</tr>
<tr>
<th align="RIGHT" nowrap="nowrap" valign="BASELINE">To: </th>
<td>Rungrot Kitsomboonloha <a moz-do-not-send="true"
class="moz-txt-link-rfc2396E"
href="mailto:rungrot@silicon.EECS.Berkeley.EDU"><rungrot@silicon.EECS.Berkeley.EDU></a></td>
</tr>
<tr>
<th align="RIGHT" nowrap="nowrap" valign="BASELINE">CC: </th>
<td>Bill Flounders <a moz-do-not-send="true"
class="moz-txt-link-rfc2396E"
href="mailto:bill@eecs.berkeley.edu"><bill@eecs.berkeley.edu></a>,
Evan Stateler <a moz-do-not-send="true"
class="moz-txt-link-rfc2396E"
href="mailto:evan@silicon.EECS.Berkeley.EDU"><evan@silicon.EECS.Berkeley.EDU></a></td>
</tr>
</tbody>
</table>
<br>
<br>
<pre>Jack,
You may want to join the following list-serv and write about
your problem to:
<a moz-do-not-send="true" class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>
I rec'd good feedback about another WYKO issue from this forum.
We also plan to have WYKO service done by this firm. We are
waiting for Evan to have the time to schedule and meet with
Tony Dao. He is swamped with are final tool move -
centura.Tony Dao
Direct Advanced Operations
818-288-7908
818-998-8162 Fax
<a moz-do-not-send="true" class="moz-txt-link-abbreviated" href="mailto:a.dao@directadvop-us.com">a.dao@directadvop-us.com</a>>
<a moz-do-not-send="true" class="moz-txt-link-abbreviated" href="http://www.directadvop-us.com">www.directadvop-us.com</a>
Bob H.
Robert M. Hamilton
Marvel NanoLab
University of CA at Berkeley
Rm 520 Sutardja Dai Hall
Berkeley, CA 94720-1754
<a moz-do-not-send="true" class="moz-txt-link-abbreviated" href="mailto:bob@eecs.berkeley.edu">bob@eecs.berkeley.edu</a>
(e-mail preferred)
510-809-8600
510-325-7557 (Emergencies)
On 7/7/2011 4:24 PM, Rungrot Kitsomboonloha wrote:
> Hi All,
>
> I am working developing a software to analysis WYKO data. I save wyko data into asc format using Wyko analysis software. The file give me two data sets, OPD and intensity in a format of x,y,z. I am able to extract x and y correctly. But the z values have some wired values. Does anyone have experience with Wyko data structure or know where I can find it? Any suggestions would be nice.
>
> Cheers,
> Jack
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