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Hi,<br>
<br>
Great! <br>
<br>
I understood that you can sustain a 1,000A/ min SiO2 etch with CFn+
ions from a Solid Teflon Source,<br>
triggered by O2 plasma. Correct?<br>
<br>
Very Interesting! Do you plan to make Patent application?<br>
<br>
I think that would be a very good example of the just as they said:
"Don't let a Crisis go to Waste!"<br>
<br>
Thanks, Bernard<br>
<br>
<br>
On 8/10/11 3:57 PM, Morrison, Richard H., Jr. wrote:
<blockquote
cite="mid:94CDEF5D18F0BB4A85B1D78EFBDD6FDA04819CCF@exchbk1.draper.com"
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<p class="MsoNormal">Hi Everyone,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I would like to thanks the many people that
responded to my initial email about the STS RIE tool etching
SiO2 during an O2 plasma.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">To sum up:<o:p></o:p></p>
<p class="MsoNormal">We replaced the vacuum pump to ensure no
oil back streaming (Ebara dry pump), no change in etch rate or
in the plasma emission.<o:p></o:p></p>
<p class="MsoNormal">We replaced the cover o-ring (old one had
Fomblin grease), no change in etch rate or in the plasma
emission.<o:p></o:p></p>
<p class="MsoNormal">Scrubbed the walls and ran long multi hour
O2 clean, no change in etch rate or in the plasma emission.<o:p></o:p></p>
<p class="MsoNormal">Removed the Teflon Shield Ring (installed
around the chuck), etch rate went to zero and F was gone from
the plasma emissions.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">So it appears that the O2 plasma is
liberating F from the Teflon ring which in turns etches the
SiO2. We are consulting STS to see if there is a fix. If there
is I will let you all know.<o:p></o:p></p>
<p class="MsoNormal"><br>
Thanks<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Rick<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Rick Morrison<o:p></o:p></p>
<p class="MsoNormal">Senior Member Technical Staff <o:p></o:p></p>
<p class="MsoNormal">Acting Group Leader Mems Fabrication<o:p></o:p></p>
<p class="MsoNormal">Draper Laboratory<o:p></o:p></p>
<p class="MsoNormal">555 Technology Square<o:p></o:p></p>
<p class="MsoNormal">Cambridge, MA 02139<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">617-258-3420<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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