<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40"><head><meta http-equiv=Content-Type content="text/html; charset=us-ascii"><meta name=Generator content="Microsoft Word 14 (filtered medium)"><!--[if !mso]><style>v\:* {behavior:url(#default#VML);}
o\:* {behavior:url(#default#VML);}
w\:* {behavior:url(#default#VML);}
.shape {behavior:url(#default#VML);}
</style><![endif]--><style><!--
/* Font Definitions */
@font-face
{font-family:Wingdings;
panose-1:5 0 0 0 0 0 0 0 0 0;}
@font-face
{font-family:Wingdings;
panose-1:5 0 0 0 0 0 0 0 0 0;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.MsoAcetate, li.MsoAcetate, div.MsoAcetate
{mso-style-priority:99;
mso-style-link:"Balloon Text Char";
margin:0in;
margin-bottom:.0001pt;
font-size:8.0pt;
font-family:"Tahoma","sans-serif";}
span.EmailStyle17
{mso-style-type:personal-compose;
font-family:"Calibri","sans-serif";
color:windowtext;}
span.BalloonTextChar
{mso-style-name:"Balloon Text Char";
mso-style-priority:99;
mso-style-link:"Balloon Text";
font-family:"Tahoma","sans-serif";}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri","sans-serif";}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
/* List Definitions */
@list l0
{mso-list-id:224804800;
mso-list-template-ids:-138097670;}
@list l0:level1
{mso-level-number-format:bullet;
mso-level-text:\F0B7;
mso-level-tab-stop:.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Symbol;}
@list l0:level2
{mso-level-number-format:bullet;
mso-level-text:o;
mso-level-tab-stop:1.0in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:"Courier New";
mso-bidi-font-family:"Times New Roman";}
@list l0:level3
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:1.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l0:level4
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:2.0in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l0:level5
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:2.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l0:level6
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:3.0in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l0:level7
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:3.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l0:level8
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:4.0in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l0:level9
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:4.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l1
{mso-list-id:306250192;
mso-list-template-ids:1872953164;}
@list l1:level1
{mso-level-number-format:bullet;
mso-level-text:\F0B7;
mso-level-tab-stop:.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Symbol;}
@list l1:level2
{mso-level-number-format:bullet;
mso-level-text:o;
mso-level-tab-stop:1.0in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:"Courier New";
mso-bidi-font-family:"Times New Roman";}
@list l1:level3
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:1.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l1:level4
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:2.0in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l1:level5
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:2.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l1:level6
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:3.0in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l1:level7
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:3.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l1:level8
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:4.0in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l1:level9
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:4.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l2
{mso-list-id:449209530;
mso-list-template-ids:564553434;}
@list l2:level1
{mso-level-number-format:bullet;
mso-level-text:\F0B7;
mso-level-tab-stop:.25in;
mso-level-number-position:left;
margin-left:.25in;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Symbol;}
@list l2:level2
{mso-level-number-format:bullet;
mso-level-text:o;
mso-level-tab-stop:.75in;
mso-level-number-position:left;
margin-left:.75in;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:"Courier New";
mso-bidi-font-family:"Times New Roman";}
@list l2:level3
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:1.25in;
mso-level-number-position:left;
margin-left:1.25in;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l2:level4
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:1.75in;
mso-level-number-position:left;
margin-left:1.75in;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l2:level5
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:2.25in;
mso-level-number-position:left;
margin-left:2.25in;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l2:level6
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:2.75in;
mso-level-number-position:left;
margin-left:2.75in;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l2:level7
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:3.25in;
mso-level-number-position:left;
margin-left:3.25in;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l2:level8
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:3.75in;
mso-level-number-position:left;
margin-left:3.75in;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l2:level9
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:4.25in;
mso-level-number-position:left;
margin-left:4.25in;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l3
{mso-list-id:1687826047;
mso-list-template-ids:334422818;}
@list l3:level1
{mso-level-number-format:bullet;
mso-level-text:\F0B7;
mso-level-tab-stop:.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Symbol;}
@list l3:level2
{mso-level-number-format:bullet;
mso-level-text:o;
mso-level-tab-stop:1.0in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:"Courier New";
mso-bidi-font-family:"Times New Roman";}
@list l3:level3
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:1.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l3:level4
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:2.0in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l3:level5
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:2.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l3:level6
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:3.0in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l3:level7
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:3.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l3:level8
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:4.0in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
@list l3:level9
{mso-level-number-format:bullet;
mso-level-text:\F0A7;
mso-level-tab-stop:4.5in;
mso-level-number-position:left;
text-indent:-.25in;
mso-ansi-font-size:10.0pt;
font-family:Wingdings;}
ol
{margin-bottom:0in;}
ul
{margin-bottom:0in;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]--></head><body lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal>The University of Wisconsin-Madison, College of engineering has a JEOL JBX-5DII tools that have been de-commissioned. We would accept any reasonable offer for purchase of the systems. We can wrap and palletize if you pay shipping and pickup. Any purchase will go through UW SWAP <o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><span style='font-size:12.0pt'>Neither system has a working computer: the Primary system(originally from Intel/JEOL) was working when shut down in 2009. In 2010 the VAX failed during a restart. As far as we know the rest of the system can be operated. A similar system is available (originally Univ. of Michigan) for parts.<o:p></o:p></span></p><p class=MsoNormal>See specifications below;<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto'><img width=310 height=203 id="Picture_x0020_1" src="cid:image005.jpg@01CC617B.B1829AE0"><o:p></o:p></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>JEOL JBX-5D2-U E-Beam Lithography System Specifications<o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>19 year old Electron Beam Lithographer<o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>50 KeV Electron Beam <o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>LaB 6 Current Source<o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>2 MHz Pattern Generator<o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>Variable field size<o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>Low and high resolution modes<o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>10mm working distance for high res mode<o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>No height map<o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>Current Range - 10 pA to 10 mA<o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>Beam Size ~ 10 nm for small current. <o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>125 mm (5”) Stage Travel with l/120 Interferometer <o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>Best Resolution - 50 nm nested lines in 200 nm resist (Hank Smith et al.),<br>70 nm nested lines in 150 nm resist (JPL).<br>75 nm nested lines in 350 nm UV3<o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'>Down to 30 nmin 150nmresist, problemswith repeatability.<o:p></o:p></span></p><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;margin-left:.25in;text-indent:-.25in;line-height:115%;mso-list:l2 level1 lfo1'><![if !supportLists]><span style='font-size:10.0pt;line-height:115%;font-family:Symbol'><span style='mso-list:Ignore'>·<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span style='font-size:10.0pt;line-height:115%;font-family:"Times New Roman","serif"'>Pattern code fully accessible - custom modification<o:p></o:p></span></p><ul type=disc><li class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:115%;mso-list:l0 level1 lfo2'><b><span style='font-size:10.0pt;line-height:115%;font-family:"Times New Roman","serif"'>Substrates</span></b><span style='font-size:10.0pt;line-height:115%;font-family:"Times New Roman","serif"'><o:p></o:p></span></li><li class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:115%;mso-list:l0 level1 lfo2'><span style='font-size:10.0pt;line-height:115%;font-family:"Times New Roman","serif"'>3-5” Si wafers<o:p></o:p></span></li><li class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:115%;mso-list:l0 level1 lfo2'><span style='font-size:10.0pt;line-height:115%;font-family:"Times New Roman","serif"'>SiN membranes<o:p></o:p></span></li><li class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:115%;mso-list:l0 level1 lfo2'><span style='font-size:10.0pt;line-height:115%;font-family:"Times New Roman","serif"'>4-5” Quartz Masks<o:p></o:p></span></li></ul><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Times New Roman","serif"'>Field Sizes:</span></b><span style='font-size:10.0pt;font-family:"Times New Roman","serif"'><o:p></o:p></span></p><ul type=disc><li class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:115%;mso-list:l3 level1 lfo3'><span style='font-size:10.0pt;line-height:115%;font-family:"Times New Roman","serif"'>Low Resolution Mode 100 mm working distance: - 800 microns<o:p></o:p></span></li><li class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:115%;mso-list:l3 level1 lfo3'><span style='font-size:10.0pt;line-height:115%;font-family:"Times New Roman","serif"'>High Resolution Mode 10 mm working distance: - 80 microns and smaller (small area only) <o:p></o:p></span></li></ul><p class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto'><b><span style='font-size:10.0pt;font-family:"Times New Roman","serif"'>Resist dose requirements:</span></b><span style='font-size:10.0pt;font-family:"Times New Roman","serif"'><o:p></o:p></span></p><ul type=disc><li class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:115%;mso-list:l1 level1 lfo4'><span style='font-size:10.0pt;line-height:115%;font-family:"Times New Roman","serif"'>UVseries ~30mC/cm 2<o:p></o:p></span></li><li class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:115%;mso-list:l1 level1 lfo4'><span style='font-size:10.0pt;line-height:115%;font-family:"Times New Roman","serif"'>Apex E ~ 12 mC/cm 2<o:p></o:p></span></li><li class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:115%;mso-list:l1 level1 lfo4'><span style='font-size:10.0pt;line-height:115%;font-family:"Times New Roman","serif"'>Sal-605 ~ 12 mC/cm 2<o:p></o:p></span></li><li class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:115%;mso-list:l1 level1 lfo4'><span style='font-size:10.0pt;line-height:115%;font-family:"Times New Roman","serif"'>PMMA ~ 600 mC/cm 2</span><o:p></o:p></li><li class=MsoNormal style='mso-margin-top-alt:auto;mso-margin-bottom-alt:auto;line-height:115%;mso-list:l1 level1 lfo4'><span style='font-size:10.0pt;line-height:115%;font-family:"Times New Roman","serif"'><img width=30 height=30 id="_x0000_i1026" src="cid:image006.png@01CC617B.B1829AE0" alt="Description: Description: http://www.nanotech.wisc.edu/images/clear.gif"></span><span style='font-size:12.0pt;line-height:115%;font-family:"Times New Roman","serif"'> <img width=30 height=30 id="Picture_x0020_2" src="cid:image006.png@01CC617B.B1829AE0" alt="Description: Description: http://www.nanotech.wisc.edu/images/clear.gif">last updated: May 15, 2010</span><o:p></o:p></li></ul><p class=MsoNormal>SEND INQUIRIES ON HOW TO PURCHASE OR MAKE AN OFFER TO:<o:p></o:p></p><p class=MsoNormal>Jon J McCarthy, Ph.D. <o:p></o:p></p><p class=MsoNormal>Director, Shared Instrument Facilities<o:p></o:p></p><p class=MsoNormal>Co-Director Advance Materials Industrial Consortium<o:p></o:p></p><p class=MsoNormal>UW College of Engineering<o:p></o:p></p><p class=MsoNormal>Phone: 608-263-1073<o:p></o:p></p><p class=MsoNormal>Cell:608-345-6134<o:p></o:p></p><p class=MsoNormal><a href="mailto:jjmccarthy@wisc.edu">jjmccarthy@wisc.edu</a><o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p></div></body></html>