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Hello Lulian,<br><br>We used unlined stainless steel ductwork. Teflon coated is not required but, as Bill noted, is a nice feature. Our nitride LPCVD, which uses dichlorosilane, produces acidic and pyrophoric by products and we see no sign of corrosion so far. We also employ dry pumps for these processes to avoid the oily acidic buildup in the ducts. Good luck on your transition into your new facility...always exciting, but lots of work.<br><br>Vince<br><br>Vince Luciani<br>NanoFab Manager<br>NIST CNST<br>Gaithersburg, Md.<br><br><br><br>Sent with Good (www.good.com)<br><br>
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-----Original Message-----<br>
<b>From: </b>Iulian Codreanu [<a href="mailto:codreanu@seas.upenn.edu">codreanu@seas.upenn.edu</a>]<br>
<b>Sent: </b>Tuesday, January 31, 2012 04:16 PM Eastern Standard Time<br>
<b>To: </b>Fab Network<br>
<b>Subject: </b>[labnetwork] duct material for pyrophorics<br>
<br>
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<P><FONT SIZE=2>Good Afternoon Fab Network.<BR>
<BR>
Is it a good idea to have the inside of the exhaust ducts serving<BR>
pyrophoric gas equipment coated with teflon?<BR>
<BR>
Thank you very much for your help.<BR>
<BR>
Iulian<BR>
--<BR>
iulian Codreanu, Ph.D.<BR>
Director, Penn NanoFab<BR>
200 South 33rd Street<BR>
Room 376 GRW Bldg<BR>
Philadelphia, PA 19104-6314<BR>
P: 215-898-9308<BR>
F: 215-573-2068<BR>
www.seas.upenn.edu/~nanofab<BR>
<BR>
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