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<div>Hi all,</div>
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<div>Since we do not have access to an ion mill, one of our users is interested in attempting to develop an etch recipe for YBCO on our ICP RIE (Oxford ICP380). The system is currently used to etch a variety of materials including InAs, GaAs, Nb and Al.</div>
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<div>I was wondering if anyone has experience etching such films on this type of system. We're specifically concerned about the potential for chamber contamination and adversely affecting our existing etch recipes.</div>
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<div>Thanks very much for any insights.</div>
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<div>Regards,</div>
<div>Vito</div>
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Vito Logiudice M.A.Sc., P.Eng.<o:p></o:p></p>
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Director of Operations, Quantum NanoFab<o:p></o:p></p>
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University of Waterloo<o:p></o:p></p>
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200 University Avenue West<o:p></o:p></p>
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Waterloo, ON Canada N2L 3G1<o:p></o:p></p>
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Tel: 1-519-888-4567 ext. 38703<o:p></o:p></p>
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Email: <a href="mailto:vlogiudi@uwaterloo.ca" style="color: blue; text-decoration: underline; ">vlogiudi@uwaterloo.ca</a></p>
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Website: <a href="https://qncfab.uwaterloo.ca">https://qncfab.uwaterloo.ca</a>/</p>
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