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<div style="word-wrap:break-word">Hello Rick,
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<div>At the CNF we run a heated valve and fore line from the quartz tube up to an MKS/HPS water cooled trap. The trap condenses out the ammonium chloride byproduct from the process and is easily cleaned with water on a periodic maintenance interval. We also
use HPS jacketed heaters self regulated at 150 C. This set up works great and we get minimal deposit between the trap and dry pump. We use an Ebara dry pump running at a 125 C case temp and heat the pump outlet line up to an Edwards Gas Reactor Column before
it hits the pump exhaust main.</div>
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<div>The majority of the work here is silicon rich/low stress nitride - which uses higher dichlorosilane flows. </div>
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<div>Unreacted dichlorosilane is a bigger concern than the hydrogen byproduct. Scrubbing the pump outlet is important and we have learned from "real world experience" that even at very low dilutions (<1% SICl2H2) you can get a flammable/explosive deposits built
up in the pump exhaust over time. I have attached a paper that describes this deposit build up associated with dichlorosilane based processes. Since installing the scrubber we have not had any issues with deposits building up.</div>
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<div>I am not sure of what effect the platinum would have with the process gas.</div>
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<div>Phil</div>
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<div>Phil Infante<br>
Cornell NanoScale Facility<br>
Cornell University<br>
250 Duffield Hall<br>
Ithaca, NY 14853<br>
607-254-4926<br>
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<div>On Apr 11, 2012, at 8:08 AM, Morrison, Richard H., Jr. wrote:</div>
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Hi Everyone,</div>
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I am restarting a Silicon Nitride LPCVD process and I have a few questions. The process will use a EBARA dry pump therefore should I use a trap on the vacuum pump inlet to catch any particulate generated?</div>
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Any issue with excess hydrogen from the process going into the dry pump, do I need a burn box on the vacuum pump exhaust?</div>
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2<sup>nd</sup><span class="x_Apple-converted-space"> </span>question has anybody tried to run the LPCVD process on a wafer with a platinum metal pattern on the surface? I was wondering if there maybe some adverse effect because of the catalytic nature of Platinum.</div>
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Thanks</div>
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Rick</div>
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Rick Morrison</div>
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Senior Member Technical Staff</div>
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Group Leader Microfabrication Operations</div>
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Draper Laboratory</div>
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555 Technology Square</div>
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Cambridge, MA 02139</div>
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W 617-258-3420</div>
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C 508-930-3461</div>
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