<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40"><head><meta http-equiv=Content-Type content="text/html; charset=us-ascii"><meta name=Generator content="Microsoft Word 12 (filtered medium)"><style><!--
/* Font Definitions */
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
p.MsoAcetate, li.MsoAcetate, div.MsoAcetate
{mso-style-priority:99;
mso-style-link:"Balloon Text Char";
margin:0in;
margin-bottom:.0001pt;
font-size:8.0pt;
font-family:"Tahoma","sans-serif";}
span.EmailStyle17
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:windowtext;}
span.EmailStyle18
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:#1F497D;}
span.EmailStyle19
{mso-style-type:personal-reply;
font-family:"Calibri","sans-serif";
color:#1F497D;}
span.BalloonTextChar
{mso-style-name:"Balloon Text Char";
mso-style-priority:99;
mso-style-link:"Balloon Text";
font-family:"Tahoma","sans-serif";}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]--></head><body lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal><span style='color:#1F497D'>Hello<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>I am in the process of replacing a Edwards GVSP 30 pump used to back a cryo on an evaporator, the needle bearings went bad and damaged the housing. Multiple pump suppliers have said that the Edwards GVSP are poorly designed pumps and the triscroll 600 would be a better choice. I have also been told that the Edwards is a bad copy of the Anest Iwata ISP 500.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'> The equipment manufacturer likes the triscroll 600 for the cost and ease of replacing the tip seals but does acknowledge that they do need replacing at least every year.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Can anyone weigh in on which, if any, of these scroll pumps would be a better choice or do they all have their own problems? <o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Thanks<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Dr. Phillip Himmer<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Manager<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Montana Microfabrication Facility<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Montana State University<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>ph: 406-994-7178<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Paolini, Steven<br><b>Sent:</b> Wednesday, June 06, 2012 10:03 AM<br><b>To:</b> Morrison, Richard H., Jr.; labnetwork@mtl.mit.edu<br><b>Subject:</b> Re: [labnetwork] Triscroll pump question<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><span style='color:#1F497D'>I have some experience with these. First of all, depending on use, you can expect 6 months to one year of service out of these which I find unacceptable. Second of all, the fluorinated hydrocarbon residue is a mixture of o-ring material and Teflon from the tip seals. After rebuilding a bunch of them, I saw the same stuff in every pump housing and it was a dark powdery substance. I can’t explain the inlet screen blowing outwards (upstream?) unless there was an event in your exhaust somewhere downstream.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Hope this helps,<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Steve Paolini <o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Harvard University Center For Nanoscale Systems.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> <a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>] <b>On Behalf Of </b>Morrison, Richard H., Jr.<br><b>Sent:</b> Wednesday, June 06, 2012 7:49 AM<br><b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><b>Subject:</b> [labnetwork] Triscroll pump question<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Hi All,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>We had a very interesting event happen 2 weeks ago on our Oxford tool. We have an Oxford PECVD/RIE tool. PECVD chamber on the left side for PECVD Nitride, Load in the center, RIE on the right hand side.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>The turbo on the load lock crashed and we discovered that the Varian Triscroll backing pump was off and the circuit breaker tripped.. We sent the pump out for repair and the inside of the pump was covered with black soot, it seems that the Pump had some sort of combustion event. The screen was blown outwards and it had a large hole in it. The only gas the load has in N2.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>When the pump self destructed it back-streamed gas into the load lock, we had the residue analyzed, and it was fluorinated hydrocarbon. We are completed stumped, has any of you had a TriScroll combust before.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Thanks in advance for any help.<o:p></o:p></p><p class=MsoNormal><br>Rick<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Rick Morrison<o:p></o:p></p><p class=MsoNormal>Senior Member Technical Staff <o:p></o:p></p><p class=MsoNormal>Group Leader Microfabrication Operations<o:p></o:p></p><p class=MsoNormal>Draper Laboratory<o:p></o:p></p><p class=MsoNormal>555 Technology Square<o:p></o:p></p><p class=MsoNormal>Cambridge, MA 02139<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>W 617-258-3420<o:p></o:p></p><p class=MsoNormal>C 508-930-3461<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p></div></body></html>