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Julia Aebersold,<br>
<br>
UC Berkeley's experience with Leybold turbos has been excellent. We
have also had good experience with rebuilds for both Leybold and
Seiko-Sekei (now Edwards) turbos. We have used Highvac Corp,
<a class="moz-txt-link-abbreviated" href="http://www.highvacgroup.com">www.highvacgroup.com</a> for most rebuilds and pleased with their work
and the way they treat us. Over the years we've upgraded some older
Seiko-Sekei turbo controllers as older controllers seem impossible
to get rebuilt and Seiko's newer controllers are more flexible. <br>
<br>
Turbos do age and there is considerable electrical and mechanical
stress on the drive elements of these pumps. They do have a finite
lifetime. I would turn to a reputable turbo rebuilding service for
their advice about your specific unit. <br>
<br>
From a different standpoint, your decision may be influenced by your
gas throughput needs and achieving better etch performance at higher
gas throughput. <br>
<br>
Historically, UC's STS was originally equipped with a Pfeiffer turbo
w/Hollweg stage, i.e. a high throughput turbo with performance
enhanced by a high-pressure stage. This pump failed after
relatively short service life because of sulfur deposition in the
tight annulus of the high pressure stage. This issue was specific to
this process. It does point out the difficulties one may face with a
process that produces effluents change to a solid phase within the
pressure range of a pump. With help from STS we replaced this turbo
with a Pfeiffer that did not contain a high pressure stage and we
added an Edwards QMB250 blower to recover the lost throughput. <br>
<br>
Our newest STS systems are equipped with Oerlikon (Leybold) turbos
and these systems have been in operation for two years without any
vacuum pump issues.<br>
<br>
Bob Hamilton<br>
<br>
<br>
<pre class="moz-signature" cols="60">Robert M. Hamilton
Marvel NanoLab
University of CA at Berkeley
Rm 520 Sutardja Dai Hall
Berkeley, CA 94720-1754
<a class="moz-txt-link-abbreviated" href="mailto:bob@eecs.berkeley.edu">bob@eecs.berkeley.edu</a>
(e-mail preferred)
510-809-8600
510-325-7557 (mobile - emergencies)
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On 6/22/2012 9:08 AM, Aebersold,Julia Weyer wrote:
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<meta http-equiv="Content-Type" content="text/html;
charset=ISO-8859-1">
<meta name="Generator" content="Microsoft Word 14 (filtered
medium)">
<style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
span.EmailStyle17
{mso-style-type:personal-compose;
font-family:"Calibri","sans-serif";
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri","sans-serif";}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
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<p class="MsoNormal">We have experienced a failure of our turbo
pump for our STS DRIE system (sigh). Our turbo pump is fairly
old and was new in 2001, but has not been run constantly. I
have been talking with STS and they have suggested the upgrade
to the Leybold MAG1500, but has quite a significant cost. I
wanted to tap into our group to find out whom else has
encountered such a problem and if they were able to just
replace the MAG 900 with a refurb unit or if they bit the
bullet and did the upgrade. If you purchased a refurb unit
please also include the vendor you used.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I also found out that the heater tape to
keep the SF6 residue from condensing hasn’t functioned for a
majority of years of service. While this is being remedied I
wanted to also find out what PM items and schedules you
perform at your facility to keep such a catastrophic failure
from happening. I am also wondering if this is the normal life
expectancy of a turbo pump.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I welcome your comments.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Cheers!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Julia Aebersold, Ph.D. <o:p></o:p></p>
<p class="MsoNormal">MNTC Cleanroom Manager<o:p></o:p></p>
<p class="MsoNormal">Shumaker Research Building, Room 233<o:p></o:p></p>
<p class="MsoNormal">2210 South Brook Street<o:p></o:p></p>
<p class="MsoNormal">University of Louisville<o:p></o:p></p>
<p class="MsoNormal">Louisville, KY 40292<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">502-852-1572<o:p></o:p></p>
<p class="MsoNormal"><a class="moz-txt-link-freetext" href="http://louisville.edu/micronano/">http://louisville.edu/micronano/</a><o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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