<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
<meta name="Generator" content="Microsoft Word 14 (filtered medium)">
<style><!--
/* Font Definitions */
@font-face
{font-family:Helvetica;
panose-1:2 11 6 4 2 2 2 2 2 4;}
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:12.0pt;
font-family:"Times New Roman","serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
span.apple-style-span
{mso-style-name:apple-style-span;}
span.EmailStyle18
{mso-style-type:personal-reply;
font-family:"Calibri","sans-serif";
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
<body lang="EN-US" link="blue" vlink="purple">
<div class="WordSection1">
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Michael,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">At the CNF, we do not allow IPA on KOH due to the fire hazard (flash point of IPA is about 11 – 13 deg C, well below even room temp). Instead of using IPA,
we offer Triton X-100, an anionic surfactant that can be added to many etching solutions. We pursued that after users started requesting many of the common etching solutions we used in surfactant variations. Trying to avoid every combination of surfactant
and regular solutions on the shelf, we looked for something that could be added to most solutions if desired. The challenge with most surfactants is getting the correct concentration, which is usually very low. For the Triton X-100, I found a publication that
pointed towards 100 ppm as the optimum concentration. So, we predilute the material down to a dilute solution in an eye dropper style dispenser, labeled to show the proper number of drops to add per liter of etching solution, and warning that more is not better
for surfactants.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">I don’t have definitive information on how well it does versus IPA, but for both BOE solutions and KOH, I have had positive verbal feedback from researchers.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Dan<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Daniel Woodie<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Safety Manager, College of Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Cornell University<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">344 Duffield Hall<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Ithaca, NY 14853-2700<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">(607)254-4891<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D">Off Hour Emergency # - (607)227-2993<o:p></o:p></span></p>
</div>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Michael Khbeis<br>
<b>Sent:</b> Friday, June 22, 2012 11:29 AM<br>
<b>To:</b> Fab Network<br>
<b>Cc:</b> Andrew R. Lingley<br>
<b>Subject:</b> [labnetwork] KOH/IPA Solution<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Good Morning, <o:p></o:p></p>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">We have just replaced all of our wet processing stations and are setting up a 6L recirculating bath of KOH w/ ~20% IPA as a surfactant. I am presuming that the IPA will readily evaporate and will not pose a regulatory issue with dumping
to waste water treatment. I was wondering if most of you still use IPA or have moved to other surfactants for Si preferential wet etch. If you still use IPA how do you handle the effluent?<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">I appreciate the fab knowledge support community that you all contribute to. <o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"><o:p> </o:p></p>
</div>
<div>
<p class="MsoNormal">Gratefully,<o:p></o:p></p>
</div>
<div>
<p class="MsoNormal"> <o:p></o:p></p>
<div>
<div>
<div>
<div>
<p class="MsoNormal"><span style="font-size:13.5pt;font-family:"Helvetica","sans-serif";color:black">Dr. Michael Khbeis<br>
Associate Director<br>
Microfabrication Facility (MFF)<br>
University of Washington<o:p></o:p></span></p>
</div>
<div>
<p class="MsoNormal" style="margin-bottom:13.5pt"><span style="font-size:13.5pt;font-family:"Helvetica","sans-serif";color:black">Fluke Hall, Box 352143<br>
(O) 206.543.5101<br>
(C) 443.254.5192<br>
<a href="mailto:khbeis@uw.edu">khbeis@uw.edu</a><br>
<br>
<o:p></o:p></span></p>
</div>
</div>
</div>
</div>
</div>
</div>
</body>
</html>