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Thomas,<br>
While I have had excellent experience with Proton Systems <br>
and recommend an H2 generator to minimize bottle changes,<br>
I know of no requirement to keep H2 in a gas cabinet.<br>
Your local authority may impose a different requirement.<br>
<br>
On site hydrogen generation with a PEM strategy rather than<br>
a potassium hydroxide system - in a facility that already has<br>
excess high quality DI water and excess electrical capacity<br>
(as our labs usually do) makes sense. It takes some time to <br>
recover the investment - if it is not being compared to a gas
cabinet.<br>
<br>
I ask that the discussion address which labs keep H2<br>
in a gas cabinet and why. There are arguments against keeping H2<br>
in a gas cabinet rather than having it open to lab air where the air<br>
changes per hour are significant and offer their own safety.<br>
<br>
Bill Flounders<br>
UCBerkeley<br>
<br>
<br>
<div class="moz-cite-prefix">Ferraguto, Thomas wrote:<br>
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cite="mid:CB9E1B649F685E4EB81E9F73732DFE5D222AB5BC@PORSCHE.fs.uml.edu"
type="cite">
<meta http-equiv="Content-Type" content="text/html;
charset=ISO-8859-1">
<meta name="Generator" content="Microsoft Word 14 (filtered
medium)">
<style><!--
/* Font Definitions */
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
span.EmailStyle17
{mso-style-type:personal-compose;
font-family:"Calibri","sans-serif";
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri","sans-serif";}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
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<p class="MsoNormal">Colleagues,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We’re in the process of designing our gas
cabinet and abatement layout for our fab.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I just met with the sales representative
from Proton and we’re looking at Hogen GC600 (99.9999%) purity
hydrogen delivery system (600cc a minute)<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I can’t find any holes in the argument for
Hydrogen generation for ~$12k, when a gas cabinet will cost me
~$20K<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does anyone have any thoughts on this unit
or Hydrogen generation in general ? (primarily for PECVD)<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks…<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thomas S. Ferraguto<o:p></o:p></p>
<p class="MsoNormal">ETIC Clean Room Director<o:p></o:p></p>
<p class="MsoNormal">University of Massachusetts Lowell<o:p></o:p></p>
<p class="MsoNormal">600 Suffolk Street 456C<o:p></o:p></p>
<p class="MsoNormal">Lowell MA 01854-5120<o:p></o:p></p>
<p class="MsoNormal">978-934-1809 land<o:p></o:p></p>
<p class="MsoNormal">617-755-0910 mobile<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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