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<p class="MsoNormal"><span style="color:#1F497D">Last item and I'll sign off. <o:p>
</o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Code requires a way to shut down the gas system if your hazardous gas monitor trips indicating a leak. The GC4800 has the ability to receive this signal from the monitor, the GC600 doesn't. You can get around
this by running the signal from the gas monitor to a breaker which will kill power to the unit, but the switch isn't physically on the unit. You might want to check with your Safety group to see if this is acceptable.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Enjoy the day!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Tom<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> Tom Britton
<br>
<b>Sent:</b> Wednesday, July 18, 2012 9:00 AM<br>
<b>To:</b> 'Ferraguto, Thomas'; labnetwork@mtl.mit.edu<br>
<b>Subject:</b> RE: Hydrogen Generation - Data to consider<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Hi Thomas,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">I did some checking and they make a nice unit. Depending on what you actually need it to do, it might be just what the doctor ordered.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Summary of my "research":<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoListParagraph" style="margin-bottom:6.0pt;text-indent:-.25in;mso-list:l0 level1 lfo2">
<![if !supportLists]><span style="font-family:Symbol;color:#1F497D"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="color:#1F497D">There are 2 Lab units; a GC600 (600 cc/min) and a GC4800 (4.8LPM). They have a smaller unit, but it's designed for a specific application and not applicable here.<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-bottom:6.0pt;text-indent:-.25in;mso-list:l0 level1 lfo2">
<![if !supportLists]><span style="font-family:Symbol;color:#1F497D"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="color:#1F497D">The GC unit is designed primarily for gas chromatography service. The stainless tubing inside is passivated, not electropolished, and they use compression fittings. On the GC4800, you can get a VCR
bulkhead out, but there are still compression fittings inside.<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-bottom:6.0pt;text-indent:-.25in;mso-list:l0 level1 lfo2">
<![if !supportLists]><span style="font-family:Symbol;color:#1F497D"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="color:#1F497D">Purity looks good. The palladium purifier on the GC600 provides < 1 ppm H2O. The GC4800 uses a dryer to remove the moisture, but is still rated at <1 ppm. If your tool's moisture spec is tighter than
this, they or you can provide an external purifier. (we have these at low cost)<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-bottom:6.0pt;text-indent:-.25in;mso-list:l0 level1 lfo2">
<![if !supportLists]><span style="font-family:Symbol;color:#1F497D"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="color:#1F497D">These units are designed, as mentioned, for gas chromatography so they aren't designed to deliver continual stable flow if connected directly to an MFC, so you might see fluctuations in your MFC's output
depending on what type of MFC you're using (Some are more stable than others. Can discuss if desired). It was recommended to set the generator at 200 psi and place an inline regulator in front of the tool to eliminate the pulsing.<o:p></o:p></span></p>
<p class="MsoListParagraph" style="margin-bottom:6.0pt;text-indent:-.25in;mso-list:l0 level1 lfo2">
<![if !supportLists]><span style="font-family:Symbol;color:#1F497D"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="color:#1F497D">There are no bottles to change so you save on gas purchases and maintenance related to bottle changes. You also will never have to worry about running out of gas.<o:p></o:p></span></p>
<p class="MsoListParagraph" style="text-indent:-.25in;mso-list:l0 level1 lfo2"><![if !supportLists]><span style="font-family:Symbol;color:#1F497D"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]><span style="color:#1F497D">Price: The GC600 runs around $12K and the GC4800 runs between $50 and $60K.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Summary:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Good unit if it meets your applications. Low cost compared to a gas cabinet if your total flow is under 600 ccs. Uses compression fittings and passivated stainless tubing, which should be OK for research applications.
Personally don't like the compression fittings on any UHP process, but on a dry H2 line, you should be OK. Would recommend switching to VCR style fittings and hard plumbing the line to the tool. If your flow is going to exceed 600 ccs, you can run 2 of these
in parallel for 1.2 LPM and $24K, or get a gas cabinet for substantially less.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Hope this is of use.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Best Regards,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Tom Britton<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Sales Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Georgia","serif";color:#1F497D">Critical Systems, Inc.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">7000 W. Victory Road<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Boise, ID 83709<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Direct: 208-890-1417<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Shop: 877-572-5515<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:8.0pt;color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><i><span style="color:#1F497D"><img width="365" height="49" id="Picture_x0020_1" src="cid:image001.png@01CD64C4.CA842D40"><o:p></o:p></span></i></p>
<p class="MsoNormal"><span style="font-size:8.0pt;font-family:"Times New Roman","serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><i><span style="font-size:12.0pt;font-family:"Times New Roman","serif";color:#1F497D"><a href="http://www.criticalsystemsinc.com/">www.criticalsystemsinc.com</a><o:p></o:p></span></i></p>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman","serif";color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>
<a href="mailto:[mailto:labnetwork-bounces@mtl.mit.edu]">[mailto:labnetwork-bounces@mtl.mit.edu]</a>
<b>On Behalf Of </b>Ferraguto, Thomas<br>
<b>Sent:</b> Wednesday, July 18, 2012 5:54 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> [labnetwork] Hydrogen Generation<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Colleagues,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We’re in the process of designing our gas cabinet and abatement layout for our fab.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I just met with the sales representative from Proton and we’re looking at Hogen GC600 (99.9999%) purity hydrogen delivery system (600cc a minute)<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I can’t find any holes in the argument for Hydrogen generation for ~$12k, when a gas cabinet will cost me ~$20K<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does anyone have any thoughts on this unit or Hydrogen generation in general ? (primarily for PECVD)<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks…<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thomas S. Ferraguto<o:p></o:p></p>
<p class="MsoNormal">ETIC Clean Room Director<o:p></o:p></p>
<p class="MsoNormal">University of Massachusetts Lowell<o:p></o:p></p>
<p class="MsoNormal">600 Suffolk Street 456C<o:p></o:p></p>
<p class="MsoNormal">Lowell MA 01854-5120<o:p></o:p></p>
<p class="MsoNormal">978-934-1809 land<o:p></o:p></p>
<p class="MsoNormal">617-755-0910 mobile<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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