<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40"><head><meta http-equiv=Content-Type content="text/html; charset=us-ascii"><meta name=Generator content="Microsoft Word 12 (filtered medium)"><style><!--
/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
span.EmailStyle17
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:windowtext;}
span.EmailStyle18
{mso-style-type:personal-reply;
font-family:"Calibri","sans-serif";
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]--></head><body lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal><span style='color:#1F497D'>Hi Tom,<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>It was nice meeting you during the UGIM event. I am still at my promise to visit with you in Mass. When using H2 generators, please make sure that distribution piping form the generator to the tool is all welded. Mechanical connections should be in exhausted enclosures and equipped with LEL sensors interlocked with the generator. <o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Good luck.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><p class=MsoNormal><span style='color:#1F497D'>Rizik Michael, PE<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Principal<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Integrated Engineering Services<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Office: +408 261 3500, Ext. 201<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Cell: +408 718 0927<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p></div><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Ferraguto, Thomas<br><b>Sent:</b> Wednesday, July 18, 2012 4:54 AM<br><b>To:</b> labnetwork@mtl.mit.edu<br><b>Subject:</b> [labnetwork] Hydrogen Generation<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Colleagues,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>We’re in the process of designing our gas cabinet and abatement layout for our fab.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>I just met with the sales representative from Proton and we’re looking at Hogen GC600 (99.9999%) purity hydrogen delivery system (600cc a minute)<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>I can’t find any holes in the argument for Hydrogen generation for ~$12k, when a gas cabinet will cost me ~$20K<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Does anyone have any thoughts on this unit or Hydrogen generation in general ? (primarily for PECVD)<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Thanks…<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Thomas S. Ferraguto<o:p></o:p></p><p class=MsoNormal>ETIC Clean Room Director<o:p></o:p></p><p class=MsoNormal>University of Massachusetts Lowell<o:p></o:p></p><p class=MsoNormal>600 Suffolk Street 456C<o:p></o:p></p><p class=MsoNormal>Lowell MA 01854-5120<o:p></o:p></p><p class=MsoNormal>978-934-1809 land<o:p></o:p></p><p class=MsoNormal>617-755-0910 mobile<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p></div></body></html>