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We use Hogen for hydrogen generation at our cleanroom here near
Chicago.<br>
Being able to just use our 18 M-ohm DI water for hydrogen is nice.<br>
Beats having to replace H bottles in the middle of the winter.<br>
<br>
We have a unit that provides about 20 l/min at 200 psi that we <br>
connect to a manifold for distribution to our etch and other tools.<br>
<br>
The only case we needed a bottle of pure H2 was for diamond thin
film deposition.<br>
There, that extra 9 in purity is absolutely necessary.<br>
<br>
Leo<br>
<br>
On 7/18/2012 6:53 AM, Ferraguto, Thomas wrote:
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<p class="MsoNormal">Colleagues,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We’re in the process of designing our gas
cabinet and abatement layout for our fab.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I just met with the sales representative
from Proton and we’re looking at Hogen GC600 (99.9999%) purity
hydrogen delivery system (600cc a minute)<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I can’t find any holes in the argument for
Hydrogen generation for ~$12k, when a gas cabinet will cost me
~$20K<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Does anyone have any thoughts on this unit
or Hydrogen generation in general ? (primarily for PECVD)<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks…<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thomas S. Ferraguto<o:p></o:p></p>
<p class="MsoNormal">ETIC Clean Room Director<o:p></o:p></p>
<p class="MsoNormal">University of Massachusetts Lowell<o:p></o:p></p>
<p class="MsoNormal">600 Suffolk Street 456C<o:p></o:p></p>
<p class="MsoNormal">Lowell MA 01854-5120<o:p></o:p></p>
<p class="MsoNormal">978-934-1809 land<o:p></o:p></p>
<p class="MsoNormal">617-755-0910 mobile<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<pre class="moz-signature" cols="72">--
Leonidas E Ocola, PhD
Center for Nanoscale Materials
Argonnne National Laboratory
Bldg 440, Rm A129
9700 South Cass Avenue, Argonne, IL 60439
Ph: 630-252-6613
Fax: 630-252-5739</pre>
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