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/* Font Definitions */
@font-face
{font-family:"Cambria Math";
panose-1:2 4 5 3 5 4 6 3 2 4;}
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
@font-face
{font-family:Tahoma;
panose-1:2 11 6 4 3 5 4 4 2 4;}
@font-face
{font-family:Consolas;
panose-1:2 11 6 9 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";
color:black;}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
pre
{mso-style-priority:99;
mso-style-link:"HTML Preformatted Char";
margin:0in;
margin-bottom:.0001pt;
font-size:10.0pt;
font-family:"Courier New";
color:black;}
span.EmailStyle17
{mso-style-type:personal;
font-family:"Calibri","sans-serif";
color:windowtext;}
span.HTMLPreformattedChar
{mso-style-name:"HTML Preformatted Char";
mso-style-priority:99;
mso-style-link:"HTML Preformatted";
font-family:Consolas;
color:black;}
span.EmailStyle20
{mso-style-type:personal-reply;
font-family:"Calibri","sans-serif";
color:#1F497D;}
.MsoChpDefault
{mso-style-type:export-only;
font-size:10.0pt;}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]--></head><body bgcolor=white lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal><span style='color:#1F497D'>Excellent suggestion. To add to Bill’s recommendation, usually, when we install flammable gas cylinders with regulator or gas panel without an exhausted enclosure, we expose mechanical connections to the open space. If this is the lab/fab strategy, then we recommend installing LEL/flammable gas sensor in the vicinity with horn/strobe and manual pull station. Usually the AHJ will require monitoring in this situation.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><p class=MsoNormal><span style='color:#1F497D'>Rizik Michael, PE<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Principal<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Integrated Engineering Services<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Office: +408 261 3500, Ext. 201<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Cell: +408 718 0927<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p></div><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext'> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Bill Flounders<br><b>Sent:</b> Wednesday, July 18, 2012 1:31 PM<br><b>To:</b> Ferraguto, Thomas<br><b>Cc:</b> labnetwork@mtl.mit.edu<br><b>Subject:</b> Re: [labnetwork] Hydrogen Generation<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal style='margin-bottom:12.0pt'>Thomas,<br>While I have had excellent experience with Proton Systems <br>and recommend an H2 generator to minimize bottle changes,<br>I know of no requirement to keep H2 in a gas cabinet.<br>Your local authority may impose a different requirement.<br><br>On site hydrogen generation with a PEM strategy rather than<br>a potassium hydroxide system - in a facility that already has<br>excess high quality DI water and excess electrical capacity<br>(as our labs usually do) makes sense. It takes some time to <br>recover the investment - if it is not being compared to a gas cabinet.<br><br>I ask that the discussion address which labs keep H2<br>in a gas cabinet and why. There are arguments against keeping H2<br>in a gas cabinet rather than having it open to lab air where the air<br>changes per hour are significant and offer their own safety.<br><br>Bill Flounders<br>UCBerkeley<br><br><o:p></o:p></p><div><p class=MsoNormal>Ferraguto, Thomas wrote:<o:p></o:p></p></div><blockquote style='margin-top:5.0pt;margin-bottom:5.0pt'><p class=MsoNormal>Colleagues,<o:p></o:p></p><p class=MsoNormal> <o:p></o:p></p><p class=MsoNormal>We’re in the process of designing our gas cabinet and abatement layout for our fab.<o:p></o:p></p><p class=MsoNormal> <o:p></o:p></p><p class=MsoNormal>I just met with the sales representative from Proton and we’re looking at Hogen GC600 (99.9999%) purity hydrogen delivery system (600cc a minute)<o:p></o:p></p><p class=MsoNormal> <o:p></o:p></p><p class=MsoNormal>I can’t find any holes in the argument for Hydrogen generation for ~$12k, when a gas cabinet will cost me ~$20K<o:p></o:p></p><p class=MsoNormal> <o:p></o:p></p><p class=MsoNormal>Does anyone have any thoughts on this unit or Hydrogen generation in general ? (primarily for PECVD)<o:p></o:p></p><p class=MsoNormal> <o:p></o:p></p><p class=MsoNormal>Thanks…<o:p></o:p></p><p class=MsoNormal> <o:p></o:p></p><p class=MsoNormal> <o:p></o:p></p><p class=MsoNormal>Thomas S. Ferraguto<o:p></o:p></p><p class=MsoNormal>ETIC Clean Room Director<o:p></o:p></p><p class=MsoNormal>University of Massachusetts Lowell<o:p></o:p></p><p class=MsoNormal>600 Suffolk Street 456C<o:p></o:p></p><p class=MsoNormal>Lowell MA 01854-5120<o:p></o:p></p><p class=MsoNormal>978-934-1809 land<o:p></o:p></p><p class=MsoNormal>617-755-0910 mobile<o:p></o:p></p><p class=MsoNormal> <o:p></o:p></p><p class=MsoNormal><span style='font-size:12.0pt;font-family:"Times New Roman","serif"'><br><br><br><o:p></o:p></span></p><pre>_______________________________________________<o:p></o:p></pre><pre>labnetwork mailing list<o:p></o:p></pre><pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre><pre><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre></blockquote><p class=MsoNormal style='margin-bottom:12.0pt'><span style='font-size:12.0pt;font-family:"Times New Roman","serif"'><o:p> </o:p></span></p></div></body></html>