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<p class="MsoNormal"><span style="color:#1F497D">Thank you all for the excellent discussion.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">To Denis Grimards point about TGMS points, we’re either going to move the Hydrogen generator to the interstitial space above the point of use (shortest distance possible) or a wall mount near the non-toxic gas
distribution panel. The TGMS is not yet completed , so we’ll design “ tank like” shut offs at the generator (orbitally welded connections). This also moves a non-rated piece of equipment out of the HPM room (the unit is UL rated, not NEC Class 1 Division 2).
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">To Bills point about H2 in cabinets, it’s a good question whether its required by the state or just “best practice”. AGI specified as being in a gas cabinet in our design, every facility in Massachusetts I have
worked (3 private) has had it in gas cabinets. NFPA 55 says that the exhaust cannot be recirculated for Hazardous Gases.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Thomas S. Ferraguto<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">ETIC Clean Room Director<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">University of Massachusetts Lowell<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">600 Suffolk Street 456C<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Lowell MA 01854-5120<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">978-934-1809 land<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">617-755-0910 mobile<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext"> Rizik [mailto:rizik@intengr.com]
<br>
<b>Sent:</b> Wednesday, July 18, 2012 9:01 PM<br>
<b>To:</b> 'Bill Flounders'; Ferraguto, Thomas<br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> RE: [labnetwork] Hydrogen Generation<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Excellent suggestion. To add to Bill’s recommendation, usually, when we install flammable gas cylinders with regulator or gas panel without an exhausted enclosure, we expose mechanical connections to the open
space. If this is the lab/fab strategy, then we recommend installing LEL/flammable gas sensor in the vicinity with horn/strobe and manual pull station. Usually the AHJ will require monitoring in this situation.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">Rizik Michael, PE<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Principal<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Integrated Engineering Services<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Office: +408 261 3500, Ext. 201<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Cell: +408 718 0927<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Bill Flounders<br>
<b>Sent:</b> Wednesday, July 18, 2012 1:31 PM<br>
<b>To:</b> Ferraguto, Thomas<br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Hydrogen Generation<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt">Thomas,<br>
While I have had excellent experience with Proton Systems <br>
and recommend an H2 generator to minimize bottle changes,<br>
I know of no requirement to keep H2 in a gas cabinet.<br>
Your local authority may impose a different requirement.<br>
<br>
On site hydrogen generation with a PEM strategy rather than<br>
a potassium hydroxide system - in a facility that already has<br>
excess high quality DI water and excess electrical capacity<br>
(as our labs usually do) makes sense. It takes some time to <br>
recover the investment - if it is not being compared to a gas cabinet.<br>
<br>
I ask that the discussion address which labs keep H2<br>
in a gas cabinet and why. There are arguments against keeping H2<br>
in a gas cabinet rather than having it open to lab air where the air<br>
changes per hour are significant and offer their own safety.<br>
<br>
Bill Flounders<br>
UCBerkeley<o:p></o:p></p>
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<p class="MsoNormal">Ferraguto, Thomas wrote:<o:p></o:p></p>
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<p class="MsoNormal">Colleagues,<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">We’re in the process of designing our gas cabinet and abatement layout for our fab.<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">I just met with the sales representative from Proton and we’re looking at Hogen GC600 (99.9999%) purity hydrogen delivery system (600cc a minute)<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">I can’t find any holes in the argument for Hydrogen generation for ~$12k, when a gas cabinet will cost me ~$20K<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Does anyone have any thoughts on this unit or Hydrogen generation in general ? (primarily for PECVD)<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Thanks…<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Thomas S. Ferraguto<o:p></o:p></p>
<p class="MsoNormal">ETIC Clean Room Director<o:p></o:p></p>
<p class="MsoNormal">University of Massachusetts Lowell<o:p></o:p></p>
<p class="MsoNormal">600 Suffolk Street 456C<o:p></o:p></p>
<p class="MsoNormal">Lowell MA 01854-5120<o:p></o:p></p>
<p class="MsoNormal">978-934-1809 land<o:p></o:p></p>
<p class="MsoNormal">617-755-0910 mobile<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:12.0pt;font-family:"Times New Roman","serif""><br>
<br>
<o:p></o:p></span></p>
<pre>_______________________________________________<o:p></o:p></pre>
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</blockquote>
<p class="MsoNormal" style="margin-bottom:12.0pt"><span style="font-size:12.0pt;font-family:"Times New Roman","serif""><o:p> </o:p></span></p>
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