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<p class=MsoNormal><span style='font-size:12.0pt;font-family:"Arial","sans-serif";
color:#1F497D'>Thanks Tom,<o:p></o:p></span></p>
<p class=MsoNormal><span style='font-size:12.0pt;font-family:"Arial","sans-serif";
color:#1F497D'>This sounds like a good solution and glad to know this unit is
now UL Listed. The Hydrogen generator is quite heavy so please keep in mind the
point load on the structure above if/when trying to place it on the
interstitial catwalk which is hung from the ceiling. <o:p></o:p></span></p>
<p class=MsoNormal><span style='font-size:12.0pt;font-family:"Arial","sans-serif";
color:#1F497D'>You should be able to use orbital welding and even add the excess
flow sensor and flow restricting orifice to the generator if it is not already
included. <o:p></o:p></span></p>
<p class=MsoNormal><span style='font-size:12.0pt;font-family:"Arial","sans-serif";
color:#1F497D'><o:p> </o:p></span></p>
<div>
<p class=MsoNormal><span style='font-family:"Arial","sans-serif";color:#1F497D'>Abbie
Gregg</span><span style='color:#1F497D'><o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Arial","sans-serif";color:#1F497D'>President</span><span
style='color:#1F497D'><o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Arial","sans-serif";color:#1F497D'>Abbie
Gregg, Inc.</span><span style='color:#1F497D'><o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Arial","sans-serif";color:#1F497D'>1130
East University Drive, Suite 105</span><span style='color:#1F497D'><o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Arial","sans-serif";color:#1F497D'>Tempe,
Arizona 85281</span><span style='color:#1F497D'><o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Arial","sans-serif";color:#1F497D'>Phone
480 446-8000 x 107</span><span style='color:#1F497D'><o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Arial","sans-serif";color:#1F497D'>Cell
480-577-5083</span><span style='color:#1F497D'><o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Arial","sans-serif";color:#1F497D'>FAX
480-446-8001</span><span style='color:#1F497D'><o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Arial","sans-serif";color:#1F497D'>email
<a href="mailto:agregg@abbiegregg.com" title="mailto:agregg@abbiegregg.com">agregg@abbiegregg.com</a></span><span
style='color:#1F497D'><o:p></o:p></span></p>
<p class=MsoNormal><span style='font-family:"Arial","sans-serif";color:#1F497D'>website
<a href="http://www.abbiegregg.com" title="http://www.abbiegregg.com/">www.abbiegregg.com</a></span><span
style='font-size:12.0pt;font-family:"Times New Roman","serif";color:#1F497D'><o:p></o:p></span></p>
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<p class=MsoNormal><i><span style='font-size:9.0pt;font-family:"Arial","sans-serif";
color:navy'>CONFIDENTIALITY NOTICE: All information contained in or
attached to this email constitutes confidential information belonging to Abbie
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attachments immediately</span></i><span style='font-size:9.0pt;font-family:
"Arial","sans-serif";color:navy'>. <o:p></o:p></span></p>
<p class=MsoNormal><span style='font-size:12.0pt;font-family:"Arial","sans-serif";
color:blue'><o:p> </o:p></span></p>
</div>
<p class=MsoNormal><span style='font-size:12.0pt;font-family:"Arial","sans-serif";
color:#1F497D'><o:p> </o:p></span></p>
<div>
<div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'>
<p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif";
color:windowtext'>From:</span></b><span style='font-size:10.0pt;font-family:
"Tahoma","sans-serif";color:windowtext'> labnetwork-bounces@mtl.mit.edu
[mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Ferraguto, Thomas<br>
<b>Sent:</b> Thursday, July 19, 2012 5:17 AM<br>
<b>To:</b> Rizik; 'Bill Flounders'<br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Hydrogen Generation<o:p></o:p></span></p>
</div>
</div>
<p class=MsoNormal><o:p> </o:p></p>
<p class=MsoNormal><span style='color:#1F497D'>Thank you all for the excellent
discussion.<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'>To Denis Grimards point about
TGMS points, we’re either going to move the Hydrogen generator to the
interstitial space above the point of use (shortest distance possible) or
a wall mount near the non-toxic gas distribution panel. The TGMS is not yet
completed , so we’ll design “ tank like” shut offs at the generator (orbitally
welded connections). This also moves a non-rated piece of equipment out of the
HPM room (the unit is UL rated, not NEC Class 1 Division 2). <o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'>To Bills point about H2 in
cabinets, it’s a good question whether its required by the state or just “best
practice”. AGI specified as being in a gas cabinet in our design, every
facility in Massachusetts I have worked (3 private) has had it in gas cabinets.
NFPA 55 says that the exhaust cannot be recirculated for Hazardous Gases.<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'>Thomas S. Ferraguto<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'>ETIC Clean Room Director<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'>University of Massachusetts
Lowell<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'>600 Suffolk Street 456C<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'>Lowell MA 01854-5120<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'>978-934-1809 land<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'>617-755-0910 mobile<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p>
<div>
<div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'>
<p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif";
color:windowtext'>From:</span></b><span style='font-size:10.0pt;font-family:
"Tahoma","sans-serif";color:windowtext'> Rizik [mailto:rizik@intengr.com] <br>
<b>Sent:</b> Wednesday, July 18, 2012 9:01 PM<br>
<b>To:</b> 'Bill Flounders'; Ferraguto, Thomas<br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> RE: [labnetwork] Hydrogen Generation<o:p></o:p></span></p>
</div>
</div>
<p class=MsoNormal><o:p> </o:p></p>
<p class=MsoNormal><span style='color:#1F497D'>Excellent suggestion. To add to
Bill’s recommendation, usually, when we install flammable gas cylinders with
regulator or gas panel without an exhausted enclosure, we expose mechanical
connections to the open space. If this is the lab/fab strategy, then we
recommend installing LEL/flammable gas sensor in the vicinity with horn/strobe
and manual pull station. Usually the AHJ will require monitoring in this
situation.<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p>
<div>
<p class=MsoNormal><span style='color:#1F497D'>Rizik Michael, PE<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'>Principal<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'>Integrated Engineering Services<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'>Office: +408 261 3500, Ext. 201<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'>Cell:
+408 718 0927<o:p></o:p></span></p>
<p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p>
</div>
<p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p>
<div>
<div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'>
<p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif";
color:windowtext'>From:</span></b><span style='font-size:10.0pt;font-family:
"Tahoma","sans-serif";color:windowtext'> labnetwork-bounces@mtl.mit.edu
[mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Bill Flounders<br>
<b>Sent:</b> Wednesday, July 18, 2012 1:31 PM<br>
<b>To:</b> Ferraguto, Thomas<br>
<b>Cc:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] Hydrogen Generation<o:p></o:p></span></p>
</div>
</div>
<p class=MsoNormal><o:p> </o:p></p>
<p class=MsoNormal style='margin-bottom:12.0pt'>Thomas,<br>
While I have had excellent experience with Proton Systems <br>
and recommend an H2 generator to minimize bottle changes,<br>
I know of no requirement to keep H2 in a gas cabinet.<br>
Your local authority may impose a different requirement.<br>
<br>
On site hydrogen generation with a PEM strategy rather than<br>
a potassium hydroxide system - in a facility that already has<br>
excess high quality DI water and excess electrical capacity<br>
(as our labs usually do) makes sense. It takes some time to <br>
recover the investment - if it is not being compared to a gas cabinet.<br>
<br>
I ask that the discussion address which labs keep H2<br>
in a gas cabinet and why. There are arguments against keeping H2<br>
in a gas cabinet rather than having it open to lab air where the air<br>
changes per hour are significant and offer their own safety.<br>
<br>
Bill Flounders<br>
UCBerkeley<o:p></o:p></p>
<div>
<p class=MsoNormal>Ferraguto, Thomas wrote:<o:p></o:p></p>
</div>
<blockquote style='margin-top:5.0pt;margin-bottom:5.0pt'>
<p class=MsoNormal>Colleagues,<o:p></o:p></p>
<p class=MsoNormal> <o:p></o:p></p>
<p class=MsoNormal>We’re in the process of designing our gas cabinet and
abatement layout for our fab.<o:p></o:p></p>
<p class=MsoNormal> <o:p></o:p></p>
<p class=MsoNormal>I just met with the sales representative from Proton and
we’re looking at Hogen GC600 (99.9999%) purity hydrogen delivery system (600cc
a minute)<o:p></o:p></p>
<p class=MsoNormal> <o:p></o:p></p>
<p class=MsoNormal>I can’t find any holes in the argument for Hydrogen
generation for ~$12k, when a gas cabinet will cost me ~$20K<o:p></o:p></p>
<p class=MsoNormal> <o:p></o:p></p>
<p class=MsoNormal>Does anyone have any thoughts on this unit or Hydrogen
generation in general ? (primarily for PECVD)<o:p></o:p></p>
<p class=MsoNormal> <o:p></o:p></p>
<p class=MsoNormal>Thanks…<o:p></o:p></p>
<p class=MsoNormal> <o:p></o:p></p>
<p class=MsoNormal> <o:p></o:p></p>
<p class=MsoNormal>Thomas S. Ferraguto<o:p></o:p></p>
<p class=MsoNormal>ETIC Clean Room Director<o:p></o:p></p>
<p class=MsoNormal>University of Massachusetts Lowell<o:p></o:p></p>
<p class=MsoNormal>600 Suffolk Street 456C<o:p></o:p></p>
<p class=MsoNormal>Lowell MA 01854-5120<o:p></o:p></p>
<p class=MsoNormal>978-934-1809 land<o:p></o:p></p>
<p class=MsoNormal>617-755-0910 mobile<o:p></o:p></p>
<p class=MsoNormal> <o:p></o:p></p>
<p class=MsoNormal style='margin-bottom:12.0pt'><span style='font-size:12.0pt;
font-family:"Times New Roman","serif"'><o:p> </o:p></span></p>
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