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Leif:<br>
<br>
Like, Rick, we at Stanford University also have a collection of SVG
coat and develop tracks and have also used AZN and AIO for support.
A third company that we us for support of these tracks is Pico Track
(<a class="moz-txt-link-abbreviated" href="http://www.picotrack.com">www.picotrack.com</a>) that is also located in Silicon Valley.<br>
<br>
It is probably worth discussing which series of SVG system you are
considering. We have the older 8600 series in use in our lab (two
dual-track coat systems and one dual-track develop system) ... which
are still supported by the previously mentioned third-party
companies. My guess is that some universities and research labs
also have the somewhat newer (but still pretty old ....) 8800
series.<br>
<br>
As all of our experience is with the 8600 series, I'm not qualified
to comment on differences in reliability, performance, or
availability of support between the 8600 and 8800 series. I believe
that we have been generally pretty happy with the performance of the
8600 series ... although all track systems seem to have a fair
amount of cleaning and support involved that increases if you plan
to use high-viscosity resists for thick layers. Getting long life
out of pumps used for high-viscosity resists seem to be an ongoing
challenge (and expense ...).<br>
<br>
If there are more specific questions, I'm confident that I can get
our folks that support these tracks on a daily basis to provide more
detailed comments.<br>
<br>
Good luck,<br>
<br>
John<br>
<br>
<br>
On 8/23/2012 8:44 AM, Morrison, Richard H., Jr. wrote:
<blockquote
cite="mid:D3862732F46DEB4B93B4A7A80614D2880ECC7E@mbx2.draper.com"
type="cite">
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);">HI
Leif,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);">Here
at Draper we used refurbished SVG systems. Uptime is >90%
and COO is very low. We purchased 3 coat tracks and 3 develop
tracks for the following vendors:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);">AZN
Track Inc. (2 coat tracks and 2 dev tracks)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);">1081
Memorex Dr<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);">Santa
Clara, CA 95050<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);">Tel:
(408) 982-6102<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size: 9pt; font-family:
"Arial","sans-serif"; color: rgb(31, 73,
125);">AIO International Corporation (1 coat track and 1 dev
track)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size: 9pt; font-family:
"Arial","sans-serif"; color: rgb(31, 73,
125);">1938 Junction Avenue<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size: 9pt; font-family:
"Arial","sans-serif"; color: rgb(31, 73,
125);">San Jose, CA 95131<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size: 9pt; font-family:
"Arial","sans-serif"; color: rgb(31, 73,
125);">Ph: 408.586.7667<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size: 9pt; font-family:
"Arial","sans-serif"; color: rgb(31, 73,
125);"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size: 9pt; font-family:
"Arial","sans-serif"; color: rgb(31, 73,
125);">Both companies are good and responsive. Both have the
same pricing. We started with AIO with a person named Jim
Grambow, he left AIO and went to AZN so we followed him to
AZN.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size: 9pt; font-family:
"Arial","sans-serif"; color: rgb(31, 73,
125);"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size: 9pt; font-family:
"Arial","sans-serif"; color: rgb(31, 73,
125);">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size: 9pt; font-family:
"Arial","sans-serif"; color: rgb(31, 73,
125);"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);">Draper
Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);">Group
Leader Microfabrication Operations<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);">555
Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);">Cambridge
Ma, 02139-3563<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);"><a class="moz-txt-link-abbreviated" href="http://www.draper.com">www.draper.com</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);"><a class="moz-txt-link-abbreviated" href="mailto:rmorrison@draper.com">rmorrison@draper.com</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);">W
617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color: rgb(31, 73, 125);">C
508-930-3461</span></p>
</blockquote>
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