<html><head><base href="x-msg://24/"></head><body style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space; ">Everyone<div><br></div><div>Here are our research associate's, Daniel Park's, conditions for processing Shipley 1813.</div><div><br></div><div>Mike Murphy<br><div><br><div>Begin forwarded message:</div><br class="Apple-interchange-newline"><blockquote type="cite"><div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px;"><span style="font-family:'Helvetica'; font-size:medium; color:rgba(0, 0, 0, 1.0);"><b>From: </b></span><span style="font-family:'Helvetica'; font-size:medium;">Daniel S Park <<a href="mailto:spark@lsu.edu">spark@lsu.edu</a>><br></span></div><div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px;"><span style="font-family:'Helvetica'; font-size:medium; color:rgba(0, 0, 0, 1.0);"><b>Subject: </b></span><span style="font-family:'Helvetica'; font-size:medium;"><b>RE: [labnetwork] hotplate parameters for Shipley 1813</b><br></span></div><div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px;"><span style="font-family:'Helvetica'; font-size:medium; color:rgba(0, 0, 0, 1.0);"><b>Date: </b></span><span style="font-family:'Helvetica'; font-size:medium;">August 31, 2012 10:13:44 AM CDT<br></span></div><div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px;"><span style="font-family:'Helvetica'; font-size:medium; color:rgba(0, 0, 0, 1.0);"><b>To: </b></span><span style="font-family:'Helvetica'; font-size:medium;">Michael Murphy <<a href="mailto:murphy@me.lsu.edu">murphy@me.lsu.edu</a>><br></span></div><br><span class="Apple-style-span" style="border-collapse: separate; font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-align: -webkit-auto; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-border-horizontal-spacing: 0px; -webkit-border-vertical-spacing: 0px; -webkit-text-decorations-in-effect: none; -webkit-text-size-adjust: auto; -webkit-text-stroke-width: 0px; font-size: medium; "><div fpstyle="1" ocsi="0" style="word-wrap: break-word; "><div style="direction: ltr; font-family: Tahoma; color: rgb(0, 0, 0); font-size: 10pt; ">Dr. Murphy.<div><br></div><div>Here is the data w/ 4 inch Si wafer.</div><div><br></div><div>Dehydration: 150oC for 10min (or 200oC for 5 min)</div><div>Spin-coat S1813 at 3,000 rpm for 60 sec</div><div>Softbake at 115oC for 60 sec</div><div>Exposure at 30~50 mJ/cm^2 (UV wavelength at 365 nm)</div><div>Develop in 1:4 dilution of AZ400K for 20~30 sec</div><div>Hard bake: 115oC for 60 sec</div><div><br></div><div>All soft contact for HP use</div><div>Use 6 inch Si wafer (not Al foil) to keep hotplate clean and place 4 inch Si wafer on 6 inch Si wafer during baking</div><div><br></div><div>Best,</div><div>Daniel<br><div><br><div style="font-family: Tahoma; font-size: 13px; "><p>----------------------------------------------------------------------------------------------------------------</p><p>Daniel Park, Ph. D., Research Associate</p><p>Mechanical Engineering</p><p>Louisiana State Univeristy</p><p>Phone: 225-578-4412</p></div></div><div style="font-family: 'Times New Roman'; color: rgb(0, 0, 0); font-size: 16px; "><hr tabindex="-1"><div id="divRpF436218" style="direction: ltr; "><font face="Tahoma" size="2" color="#000000"><b>From:</b><span class="Apple-converted-space"> </span>Michael Murphy [<a href="mailto:murphy@me.lsu.edu">murphy@me.lsu.edu</a>]<br><b>Sent:</b><span class="Apple-converted-space"> </span>Thursday, August 30, 2012 12:59 PM<br><b>To:</b><span class="Apple-converted-space"> </span>Daniel S Park<br><b>Subject:</b><span class="Apple-converted-space"> </span>Fwd: [labnetwork] hotplate parameters for Shipley 1813<br></font><br></div><div></div><div>Daniel<div><br></div><div>Do we have some?</div><div><br></div><div>Mike</div><div><br><div><br><div>Begin forwarded message:</div><br class="Apple-interchange-newline"><blockquote type="cite"><div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px; "><span style="font-family: Helvetica; font-size: medium; "><b>From:<span class="Apple-converted-space"> </span></b></span><span style="font-family: Helvetica; font-size: medium; ">"Walsh,Kevin M." <<a href="mailto:kevin.walsh@louisville.edu" target="_blank">kevin.walsh@louisville.edu</a>><br></span></div><div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px; "><span style="font-family: Helvetica; font-size: medium; "><b>Subject:<span class="Apple-converted-space"> </span></b></span><span style="font-family: Helvetica; font-size: medium; "><b>[labnetwork] hotplate parameters for Shipley 1813</b><br></span></div><div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px; "><span style="font-family: Helvetica; font-size: medium; "><b>Date:<span class="Apple-converted-space"> </span></b></span><span style="font-family: Helvetica; font-size: medium; ">August 28, 2012 5:21:09 PM CDT<br></span></div><div style="margin-top: 0px; margin-right: 0px; margin-bottom: 0px; margin-left: 0px; "><span style="font-family: Helvetica; font-size: medium; "><b>To:<span class="Apple-converted-space"> </span></b></span><span style="font-family: Helvetica; font-size: medium; ">"<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>" <<a href="mailto:labnetwork@mtl.mit.edu" target="_blank">labnetwork@mtl.mit.edu</a>><br></span></div><br><span class="Apple-style-span" style="border-collapse: separate; font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; font-size: medium; "><div lang="EN-US"><div class="WordSection1"><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; ">Processing Experts!</div><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; "> </div><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; ">What hotplate processing parameters do you recommend for Shipley 1813. We have Brewer Science hotplates capable of hard contact (vacuum), proximity contact (nitrogen cushion), or soft contact (gravity).</div><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; "> </div><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; ">Dehydration Bake - temp, time, soft/hard/proximity contact?</div><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; ">Soft Bake - temp, time, soft/hard/proximity contact?</div><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; ">Hard Bake - temp, time, soft/hard/proximity contact?</div><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; "> </div><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; ">If soft contact, do you use alum foil to keep your hotplate surfaces clean?</div><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; "> </div><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; ">Thanks in advance,<br>Kevin</div><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; "> </div><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; "><span style="font-size: 10pt; font-family: Tahoma, sans-serif; ">Dr. Kevin M. Walsh<br>Samuel T. Fife Professor of Electrical and Computer Engineering<br>Founding Director of the UofL Micro/Nanotechnology Center<br>University of Louisville<br>BRB Building, Room 234<br>2210 S. Brook St<br>Louisville, KY 40292<br>(502) 852-0826 office<br>(502) 852-8128 fax<br><a href="mailto:walsh@louisville.edu" target="_blank" style="color: blue; text-decoration: underline; "><span style="color: blue; ">walsh@louisville.edu</span></a><span class="Apple-converted-space"> </span>or<span class="Apple-converted-space"> </span><a href="mailto:walsh@ieee.org" target="_blank" style="color: blue; text-decoration: underline; "><span style="color: blue; ">walsh@ieee.org</span></a><span class="Apple-converted-space"> </span><br><a href="http://www.louisville.edu/micronano" target="_blank" style="color: blue; text-decoration: underline; "><span style="color: blue; ">www.louisville.edu /micronano</span></a></span></div><div style="margin-top: 0in; margin-right: 0in; margin-left: 0in; margin-bottom: 0.0001pt; font-size: 11pt; font-family: Calibri, sans-serif; "> </div></div>_______________________________________________<br>labnetwork mailing list<br><a href="mailto:labnetwork@mtl.mit.edu" target="_blank" style="color: blue; text-decoration: underline; ">labnetwork@mtl.mit.edu</a><br><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork" target="_blank" style="color: blue; text-decoration: underline; ">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><br></div></span></blockquote></div><br><div><span class="Apple-style-span" style="border-collapse: separate; font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; font-size: medium; "><span class="Apple-style-span" style="border-collapse: separate; font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; font-size: medium; "><div style="word-wrap: break-word; "><span class="Apple-style-span" style="border-collapse: separate; font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; font-size: medium; "><div style="word-wrap: break-word; "><span class="Apple-style-span" style="border-collapse: separate; font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; font-size: medium; "><div style="word-wrap: break-word; "><span class="Apple-style-span" style="border-collapse: separate; font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; font-size: medium; "><div style="word-wrap: break-word; "><span class="Apple-style-span" style="border-collapse: separate; font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; font-size: medium; "><div style="word-wrap: break-word; ">*************************************************************************************************************</div><div style="word-wrap: break-word; ">Michael C. Murphy<span class="Apple-tab-span" style="white-space: pre; ">
</span>Phone: (225) 578-5921<br>Roy O. Martin Lumber Company<span class="Apple-tab-span" style="white-space: pre; ">
</span>Fax:<span class="Apple-tab-span" style="white-space: pre; "> </span>(225) 578-5924<br>Professor of Mechanical Engineering<span class="Apple-tab-span" style="white-space: pre; ">
</span>E-mail:<span class="Apple-tab-span" style="white-space: pre; "> </span><a href="mailto:murphy@me.lsu.edu" target="_blank">murphy@me.lsu.edu</a><br>Dept. of Mechanical Engineering<br>Louisiana State University<br>2508 Patrick F. Taylor Hall<br>Baton Rouge, LA 70803</div><div style="word-wrap: break-word; ">**************************************************************************************************************</div></span></div></span></div></span></div></span></div></span></span></div><br></div></div></div></div></div></div></span><br class="Apple-interchange-newline"></blockquote></div><br><div apple-content-edited="true">
<span class="Apple-style-span" style="border-collapse: separate; color: rgb(0, 0, 0); font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-align: -webkit-auto; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-border-horizontal-spacing: 0px; -webkit-border-vertical-spacing: 0px; -webkit-text-decorations-in-effect: none; -webkit-text-size-adjust: auto; -webkit-text-stroke-width: 0px; font-size: medium; "><span class="Apple-style-span" style="border-collapse: separate; color: rgb(0, 0, 0); font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-align: -webkit-auto; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-border-horizontal-spacing: 0px; -webkit-border-vertical-spacing: 0px; -webkit-text-decorations-in-effect: none; -webkit-text-size-adjust: auto; -webkit-text-stroke-width: 0px; font-size: medium; "><div style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space; "><span class="Apple-style-span" style="border-collapse: separate; color: rgb(0, 0, 0); font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-align: -webkit-auto; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-border-horizontal-spacing: 0px; -webkit-border-vertical-spacing: 0px; -webkit-text-decorations-in-effect: none; -webkit-text-size-adjust: auto; -webkit-text-stroke-width: 0px; font-size: medium; "><div style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space; "><span class="Apple-style-span" style="border-collapse: separate; color: rgb(0, 0, 0); font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-align: -webkit-auto; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-border-horizontal-spacing: 0px; -webkit-border-vertical-spacing: 0px; -webkit-text-decorations-in-effect: none; -webkit-text-size-adjust: auto; -webkit-text-stroke-width: 0px; font-size: medium; "><div style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space; "><span class="Apple-style-span" style="border-collapse: separate; color: rgb(0, 0, 0); font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-align: -webkit-auto; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-border-horizontal-spacing: 0px; -webkit-border-vertical-spacing: 0px; -webkit-text-decorations-in-effect: none; -webkit-text-size-adjust: auto; -webkit-text-stroke-width: 0px; font-size: medium; "><div style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space; "><span class="Apple-style-span" style="border-collapse: separate; color: rgb(0, 0, 0); font-family: Arial; font-style: normal; font-variant: normal; font-weight: normal; letter-spacing: normal; line-height: normal; orphans: 2; text-align: -webkit-auto; text-indent: 0px; text-transform: none; white-space: normal; widows: 2; word-spacing: 0px; -webkit-border-horizontal-spacing: 0px; -webkit-border-vertical-spacing: 0px; -webkit-text-decorations-in-effect: none; -webkit-text-size-adjust: auto; -webkit-text-stroke-width: 0px; font-size: medium; "><div style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space; ">*************************************************************************************************************</div><div style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space; ">Michael C. Murphy<span class="Apple-tab-span" style="white-space: pre; "> </span>Phone: (225) 578-5921<br>Roy O. Martin Lumber Company<span class="Apple-tab-span" style="white-space: pre; "> </span>Fax:<span class="Apple-tab-span" style="white-space: pre; "> </span>(225) 578-5924<br>Professor of Mechanical Engineering<span class="Apple-tab-span" style="white-space: pre; "> </span>E-mail:<span class="Apple-tab-span" style="white-space: pre; "> </span><a href="mailto:murphy@me.lsu.edu">murphy@me.lsu.edu</a><br>Dept. of Mechanical Engineering<br>Louisiana State University<br>2508 Patrick F. Taylor Hall<br>Baton Rouge, LA 70803</div><div style="word-wrap: break-word; -webkit-nbsp-mode: space; -webkit-line-break: after-white-space; ">**************************************************************************************************************</div></span></div></span></div></span></div></span></div></span></span>
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