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<p>Hi all,</p>
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<p>We are currently reviewing our processes using TMAH, and I would be grateful for any feedback re. safety controls or substitute chemicals, particularly for Si etching involving 25% concentration TMAH.</p>
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<p>Many thanks,</p>
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<p>Linda</p>
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<div><font size="2" face="Tahoma">
<div><font size="2" face="tahoma"><strong>Dr Linda Macks</strong></font></div>
<div><font size="2" face="tahoma">Facility Manager, ANFF-NSW</font></div>
<div><font size="2" face="tahoma">Australian National Fabrication Facility</font></div>
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<div><font face="tahoma">School of Electrical Engineering & Telecommunications</font></div>
<div><font face="tahoma">University of New South Wales</font></div>
<div><font face="tahoma">UNSW Sydney NSW 2052</font></div>
<div><font face="tahoma">Australia</font></div>
<div><font face="tahoma"></font> </div>
<div><font face="tahoma">Phone: +61 (2) 9385 7845</font></div>
<div><font face="tahoma">Fax: +61(2) 9385 5114</font></div>
<div><font face="tahoma">Email: <a href="mailto:linda.macks@unsw.edu.au">linda.macks@unsw.edu.au</a></font></div>
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