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<p class="MsoNormal"><span lang="EN-US">Dear Julia Aebersold<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">This is an Al/Si(1%) alloy recipe in use at Delft university, the Netherlands<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">PROCESS<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">TEMPERATURE<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">(in °C)<o:p></o:p></span></p>
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<td width="142" valign="top" style="width:3.0cm;border-top:solid gray 1.0pt;border-left:none;border-bottom:solid gray 1.0pt;border-right:solid silver 1.0pt;background:#E5E5E5;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span lang="EN-US">GASSES & FLOWS<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">(in liter/min)<o:p></o:p></span></p>
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<td width="95" valign="top" style="width:2.0cm;border-top:solid gray 1.0pt;border-left:none;border-bottom:solid gray 1.0pt;border-right:solid silver 1.0pt;background:#E5E5E5;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span lang="EN-US">TIME<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">(in minutes)<o:p></o:p></span></p>
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<td width="95" valign="top" style="width:2.0cm;border-top:none;border-left:solid gray 1.0pt;border-bottom:solid silver 1.0pt;border-right:solid silver 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span lang="EN-US">boat in<o:p></o:p></span></p>
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<td width="142" valign="top" style="width:3.0cm;border-top:none;border-left:none;border-bottom:solid silver 1.0pt;border-right:solid silver 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span lang="EN-US">400<o:p></o:p></span></p>
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<td width="142" valign="top" style="width:3.0cm;border-top:none;border-left:none;border-bottom:solid silver 1.0pt;border-right:solid silver 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal" align="center" style="text-align:center"><span lang="EN-US">nitrogen: 3.0<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">5<o:p></o:p></span></p>
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<td width="95" valign="top" style="width:2.0cm;border-top:none;border-left:solid gray 1.0pt;border-bottom:solid silver 1.0pt;border-right:solid silver 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span lang="EN-US">stabilize 1<o:p></o:p></span></p>
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<td width="142" valign="top" style="width:3.0cm;border-top:none;border-left:none;border-bottom:solid silver 1.0pt;border-right:solid silver 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span lang="EN-US">400<o:p></o:p></span></p>
</td>
<td width="142" valign="top" style="width:3.0cm;border-top:none;border-left:none;border-bottom:solid silver 1.0pt;border-right:solid silver 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal" align="center" style="text-align:center"><span lang="EN-US">nitrogen: 3.0<o:p></o:p></span></p>
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<td width="95" valign="top" style="width:2.0cm;border-top:none;border-left:none;border-bottom:solid silver 1.0pt;border-right:solid silver 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span lang="EN-US">5<o:p></o:p></span></p>
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<td width="95" valign="top" style="width:2.0cm;border-top:none;border-left:solid gray 1.0pt;border-bottom:solid silver 1.0pt;border-right:solid silver 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span lang="EN-US">stabilize2<o:p></o:p></span></p>
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<td width="142" valign="top" style="width:3.0cm;border-top:none;border-left:none;border-bottom:solid silver 1.0pt;border-right:solid silver 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span lang="EN-US">400<o:p></o:p></span></p>
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<td width="142" valign="top" style="width:3.0cm;border-top:none;border-left:none;border-bottom:solid silver 1.0pt;border-right:solid silver 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal" align="center" style="text-align:center"><span lang="EN-US">nitrogen: 3.0<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">10<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">alloying<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">400<o:p></o:p></span></p>
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<td width="142" valign="top" style="width:3.0cm;border-top:none;border-left:none;border-bottom:solid silver 1.0pt;border-right:solid silver 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal" align="center" style="text-align:center"><span lang="EN-US">nitrogen: 3.0<o:p></o:p></span></p>
<p class="MsoNormal" align="center" style="text-align:center"><span lang="EN-US">hydrogen: 0.3<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">20<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">purge<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">400<o:p></o:p></span></p>
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<td width="142" valign="top" style="width:3.0cm;border-top:none;border-left:none;border-bottom:solid silver 1.0pt;border-right:solid silver 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal" align="center" style="text-align:center"><span lang="EN-US">nitrogen: 3.0<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">5<o:p></o:p></span></p>
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<td width="95" valign="top" style="width:2.0cm;border-top:none;border-left:solid gray 1.0pt;border-bottom:solid gray 1.0pt;border-right:solid silver 1.0pt;padding:0cm 0cm 0cm 0cm">
<p class="MsoNormal"><span lang="EN-US">boat out<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">400<o:p></o:p></span></p>
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<p class="MsoNormal" align="center" style="text-align:center"><span lang="EN-US">nitrogen: 3.0<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-US">5<o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-GB"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-GB">We use Al(Si1%) to avoid junction spiking on shallow n+ p junctions. This recipe also improves the low current characteristics of bipolar npn transistors, see below (copy of lecture slides).
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-GB"><o:p> </o:p></span></p>
<p class="MsoNormal"><img width="563" height="378" id="Picture_x0020_1" src="cid:image001.png@01CDC272.0D7368E0"><span style="color:#1F497D"><img width="564" height="378" id="Picture_x0020_2" src="cid:image002.png@01CDC272.0D7368E0"></span><span lang="EN-GB" style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">Kind regars, Henk van Zeijl<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span lang="EN-GB" style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:#1F497D">Delft University of Technology / DIMES<br>
POBox 5053<br>
NL-2600 GB DELFT<br>
The Netherlands<br>
phone: ++31 15 2781092<br>
Mobile: ++31 6 24373305<br>
fax: ++31 15 2787369<br>
Email: h.w.vanzeijl@tudelft.nl</span><span lang="EN-GB" style="font-family:"Tahoma","sans-serif";color:#1F497D"><o:p></o:p></span></p>
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<p class="MsoNormal"><span lang="EN-GB" style="color:#1F497D"><o:p> </o:p></span></p>
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<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0cm 0cm 0cm">
<p class="MsoNormal"><b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span lang="EN-US" style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Aebersold,Julia W.<br>
<b>Sent:</b> 13 November 2012 21:12<br>
<b>To:</b> Lab Network (labnetwork@mtl.mit.edu)<br>
<b>Subject:</b> [labnetwork] Anneal temp for aluminum on silicon with forming gas<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-US">I wanted to gather some information of aluminum anneal on a silicon wafer performed by other cleanrooms. We are using 5% forming gas with an anneal temp of 400C for ½ hour with a 20C/min ramp up and ramp down However,
I have also seen higher temps up to 475C, but was concerned about the flammability of 100% hydrogen per its MSDS.<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Julia Aebersold, Ph.D. <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">MNTC Cleanroom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Shumaker Research Building, Room 233<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">2210 South Brook Street<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">University of Louisville<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">Louisville, KY 40292<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-US">502-852-1572<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><a href="http://louisville.edu/micronano/">http://louisville.edu/micronano/</a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-US"><o:p> </o:p></span></p>
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