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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Hi Jeff,<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Excellent analysis. Our company’s (IES) standard scrubbed exhaust system design is to provide not only caustic injection controlled by a pH probe & Controller but a Conductivity meter to monitor water conductivity which opens a purge solenoid valve to allow releasing about 5 gpm of scrubber water, which will be replenished when the float valve drops below the high limit or in the case of a controlled makeup water, when the LIT senses a drop in water level, then a 2” control valve would open to replenish the discharged water fast enough to prevent a vortex from forming and cavitating the pumps. In addition, in a lot of cases we introduce a biocide injection system to keep bacteria in check. In the old days when I used to work as a Semiconductor Facility Engineer, we used to shock each scrubber with a gallon or two of bleach. I agree with you that NOT ADDING FRESH water period will increase the cycles of concentration and therefore TDS concentration. <o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>We recommend the following:<o:p></o:p></span></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo3'><![if !supportLists]><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><span style='mso-list:Ignore'>1.<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span dir=LTR></span><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'> Add an automatic purge system using a conductivity monitor and controller<o:p></o:p></span></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo3'><![if !supportLists]><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><span style='mso-list:Ignore'>2.<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span dir=LTR></span><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Add a continuous SOFT water makeup of about 1 to 2 gpm.<o:p></o:p></span></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo3'><![if !supportLists]><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><span style='mso-list:Ignore'>3.<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span dir=LTR></span><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Add an automatic biocide injection system<o:p></o:p></span></p><p class=MsoListParagraph style='text-indent:-.25in;mso-list:l0 level1 lfo3'><![if !supportLists]><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><span style='mso-list:Ignore'>4.<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span dir=LTR></span><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Provide semiannual basin cleaning using a wet vac / Pool vacuum cleaner<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Then, enjoy a nice running scrubber.<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.25in'><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Take care,<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><div><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Rizik Michael, PE<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Principal<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Integrated Engineering Services<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Office: +408 261 3500, Ext. 201<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Cell: +408 718 0927<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p></div><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> Kuhn, Jeffrey G [mailto:kuhn1@purdue.edu] <br><b>Sent:</b> Monday, November 26, 2012 1:32 PM<br><b>To:</b> 'Rizik'; 'Robert Pollina'; labnetwork@mtl.mit.edu<br><b>Subject:</b> RE: [labnetwork] Requesting expertise/ experience with Scrubber by-products in Fab.<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Robert,<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>We have a large Harrington scrubber here at Birck, but it operates in a somewhat different way than what you describe. The “scrubbing agent” in our case is circulated water – not NaOH. Caustic is used only as needed to maintain the pH within the desired range. Ideally, you would want your circulating water to have an approximately neutral pH and not add caustic until it drops below at least 7.0. What I believe you are referring to when you mention the “lower tank” is actually the sump itself. Perhaps your design is different??? Just for reference, our scrubber is rated for 42,000 cfm and our circulation rate is about 400 GPM.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>We perform monthly bacteria testing using dip slides and, when needed, add a measured amount of isothazilinone-based biocide to kill the bacteria. This is only needed once or twice per year, usually in the summer months. We have never had to shut down for removal of the types of biological material you mention. Our fouling issues were always related to lime scale due to hard water make-up, but that issue has been mitigated by the introduction of softened make-up water.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>In my opinion, you should never need to deal with removal of biological material if your scrubber is operating correctly. I totally agree with Rizik in his response below as to the need for answers to his questions. I would also add that you need to control both your conductivity via periodic blow-down, and should minimize your cycles of concentration (depending on the make-up water parameters) to around 2-3 cycles. You should not let the pH get too high. Around pH = 9.5 is the upper limit I’d like to see. It is not so much the pH of the water that does the scrubbing, but rather the water itself. The addition of caustic is simply to keep the pH within certain limits so it can be discharged to your POTW (or WWT system if you have it), and to protect internal components from corrosion.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Regards,<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-family:"Calibri","sans-serif";color:#1F497D'>Jeff Kuhn<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Facility Engineer<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Birck Nanotechnology Center<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Purdue University<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>1205 W. State St.<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>West Lafayette, IN 47907<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Ph: (765) 496-8329<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Fax: (765) 496-2018<o:p></o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal style='margin-left:.5in'><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> <a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>] <b>On Behalf Of </b>Rizik<br><b>Sent:</b> Sunday, November 25, 2012 9:44 AM<br><b>To:</b> 'Robert Pollina'; <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><b>Subject:</b> Re: [labnetwork] Requesting expertise/ experience with Scrubber by-products in Fab.<o:p></o:p></span></p></div></div><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Please try to answer the following questions before we provide our recommendation:<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoListParagraph style='margin-left:1.0in;text-indent:-.25in;mso-list:l1 level1 lfo2'><![if !supportLists]><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><span style='mso-list:Ignore'>1.<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span dir=LTR></span><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Daily removal of 5-gallons of concentrated solution - Do you mean caustic solution? If yes, what is the concentration?<o:p></o:p></span></p><p class=MsoListParagraph style='margin-left:1.0in;text-indent:-.25in;mso-list:l1 level1 lfo2'><![if !supportLists]><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><span style='mso-list:Ignore'>2.<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span dir=LTR></span><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Is NaOH injection to the recirculating water stream being controlled by a pH Controller to maintained a predetermined pH level?<o:p></o:p></span></p><p class=MsoListParagraph style='margin-left:1.0in;text-indent:-.25in;mso-list:l1 level1 lfo2'><![if !supportLists]><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><span style='mso-list:Ignore'>3.<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span dir=LTR></span><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>What are you trying to scrub?<o:p></o:p></span></p><p class=MsoListParagraph style='margin-left:1.0in;text-indent:-.25in;mso-list:l1 level1 lfo2'><![if !supportLists]><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><span style='mso-list:Ignore'>4.<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span dir=LTR></span><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>What is the makeup water flow rate?<o:p></o:p></span></p><p class=MsoListParagraph style='margin-left:1.0in;text-indent:-.25in;mso-list:l1 level1 lfo2'><![if !supportLists]><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><span style='mso-list:Ignore'>5.<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span dir=LTR></span><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Doe you control Total Dissolved Solids in the recirculating water? If yes, is it controlled by a TDS sensor & controller?<o:p></o:p></span></p><p class=MsoListParagraph style='margin-left:1.0in;text-indent:-.25in;mso-list:l1 level1 lfo2'><![if !supportLists]><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><span style='mso-list:Ignore'>6.<span style='font:7.0pt "Times New Roman"'> </span></span></span><![endif]><span dir=LTR></span><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Does the recirc water go through a periodic purge cycle or does it continue to circulate and water is replenished only when water level in the basin drops?<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Rizik Michael, PE<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Principal<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Integrated Engineering Services<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Office: +408 261 3500, Ext. 201<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'>Cell: +408 718 0927<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1F497D'><o:p> </o:p></span></p><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal style='margin-left:.5in'><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> <a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>] <b>On Behalf Of </b>Robert Pollina<br><b>Sent:</b> Wednesday, November 21, 2012 5:32 AM<br><b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><b>Subject:</b> [labnetwork] Requesting expertise/ experience with Scrubber by-products in Fab.<o:p></o:p></span></p></div><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p><p class=MsoNormal style='margin-left:.5in'>Good morning,<o:p></o:p></p><div><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'> I maintain the exhaust Scrubbers serving our wet-benches and fumehoods here at the Nanofabrication Lab at the University of Michigan.<o:p></o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'>Exhaust air passes through our Harrington Scrubber where Sodium Hydroxide solution is sprayed over a "whiffle-ball-like" material, and a favorable PH is reached before the air is vented to atmosphere. The NaOH solution is collected in a lower tank and recirculated to the spray heads. PH sensors and Conductivity sensors call for more NaOH and city supplied fresh water as needed.<o:p></o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'> Problem: Large amounts of Fusarium , Negative rod and Rototurula bacterias and fungi are created in the tank and must be removed to keep the Scrubber operating properly. This by-product is removed almost daily, often exceeding five gallons of concentrated solution.<o:p></o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'> I'm hoping someone has experience with this same equipment and unwanted Fusarium growth.<o:p></o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'>How do we better control production of this by-product? What are the proper safety procedures for maintenance staff?<o:p></o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'>Are there other issues I am not aware of concerning this equipment, its operation, maintenance and safety? <o:p></o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'> Any assistance in this matter would be greatly appreciated.<o:p></o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'>Robert Pollina<o:p></o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'>University of Michigan<o:p></o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'>Electrical Engineering and Computer Science<o:p></o:p></p></div><div><p class=MsoNormal style='margin-left:.5in'>Nanofabrication lab<o:p></o:p></p></div></div></body></html>