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<p class="MsoPlainText">Just to add a little information to help with your decision.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">We have reconditioned exhaust gas scrubbers at the following prices:
<o:p></o:p></p>
<p class="MsoPlainText">(All reconditioned scrubbers carry a full 6 month warranty. Spare parts and start up assistance is offered as well.)<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Edwards GRCs<o:p></o:p></p>
<p class="MsoPlainText">- M150 (Single Cannister) $15,850.00<o:p></o:p></p>
<p class="MsoPlainText">- D150 (Dual Cannister) $17,850.00<o:p></o:p></p>
<p class="MsoPlainText">- Hot Bed Reactor chemically destroys toxic gases<o:p></o:p></p>
<p class="MsoPlainText">- Plasma Etching, PECVD & LPCVD processes<o:p></o:p></p>
<p class="MsoPlainText">- Gases such as CL2, BCl3, SiCl4, CHF3, SF6<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Delatech 859 CDOs $23,450.00<o:p></o:p></p>
<p class="MsoPlainText">- Thermal Oxidation Chamber with Secondary Wet Scrub Chamber<o:p></o:p></p>
<p class="MsoPlainText">- Advaned CVD processes - PECVD, LPCVD & MOCVD<o:p></o:p></p>
<p class="MsoPlainText">- Gases such as SiH4, PH3, GeH4, CH4, H2,B2H6, NH3<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">ATMI Vector ULtra 3000 $23,450.00<o:p></o:p></p>
<p class="MsoPlainText">- Dual Stage Aquious Scrubber<o:p></o:p></p>
<p class="MsoPlainText">- For water soluable effluent gases such as F2, Cl2, NH3, SiF4, HF<o:p></o:p></p>
<p class="MsoPlainText">- Etch, CVD & EPI processes<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">If you'd like to discuss this further, please let me know.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best Regards,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Tom Britton<o:p></o:p></p>
<p class="MsoNormal">Director of Sales<o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt">Critical Systems, Inc.<o:p></o:p></span></p>
<p class="MsoNormal">7000 W. Victory Road<o:p></o:p></p>
<p class="MsoNormal">Boise, ID 83709<o:p></o:p></p>
<p class="MsoNormal">Direct: 208.890.1417<o:p></o:p></p>
<p class="MsoNormal" style="margin-bottom:6.0pt">Office: 877.572.5515<o:p></o:p></p>
<p class="MsoNormal"><img width="290" height="39" id="Picture_x0020_1" src="cid:image001.png@01CDD167.21C333D0" alt="cid:image003.png@01CCFBA5.86785370"><o:p></o:p></p>
<p class="MsoPlainText" style="margin-top:6.0pt"><i><a href="http://www.criticalsystemsinc.com">www.criticalsystemsinc.com</a><o:p></o:p></i></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><a name="_MailEndCompose"><o:p> </o:p></a></p>
<p class="MsoPlainText">-----Original Message-----<br>
From: labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] On Behalf Of Michael Khbeis<br>
Sent: Saturday, December 1, 2012 6:32 AM<br>
To: Leonidas Ocola<br>
Cc: labnetwork@mtl.mit.edu<br>
Subject: Re: [labnetwork] question ...</p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Leonidas,<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">I would say it is dependent on the reactivity of the byproduct. For pyrophorics we "scrub" at the point of use with a gas reactor column. For acids we just collect at the main scrubber. If there was something that would be potentially
reactive with other byproducts, you may be better off with the local scrubber, but these are very expensive. You also need to consider the dilution factor in the exhaust stream. If you have a large volume of exhaust, say from numerous wet benches, this will
dilute the shared exhaust so consider the volume and rate of byproduct being produced compared to the total exhaust volume/flow.<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">Dr. Michael Khbeis<o:p></o:p></p>
<p class="MsoPlainText">Associate Director<o:p></o:p></p>
<p class="MsoPlainText">Microfabrication Facility (MFF)<o:p></o:p></p>
<p class="MsoPlainText">University of Washington<o:p></o:p></p>
<p class="MsoPlainText">Fluke Hall, Box 352143<o:p></o:p></p>
<p class="MsoPlainText">(O) 206.543.5101<o:p></o:p></p>
<p class="MsoPlainText">(C) 443.254.5192<o:p></o:p></p>
<p class="MsoPlainText"><a href="mailto:khbeis@uw.edu"><span style="color:windowtext;text-decoration:none">khbeis@uw.edu</span></a><o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">On Nov 30, 2012, at 9:29 AM, Leonidas Ocola wrote:<o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
<p class="MsoPlainText">> <o:p></o:p></p>
<p class="MsoPlainText">> Dear List,<o:p></o:p></p>
<p class="MsoPlainText">> <o:p></o:p></p>
<p class="MsoPlainText">> When does it make sense to just use a point of use scrubber for a
<o:p></o:p></p>
<p class="MsoPlainText">> particularly noxious tool or when to install a "capture it all"
<o:p></o:p></p>
<p class="MsoPlainText">> scrubber at the end of a facility exhaust?<o:p></o:p></p>
<p class="MsoPlainText">> <o:p></o:p></p>
<p class="MsoPlainText">> Just curious.<o:p></o:p></p>
<p class="MsoPlainText">> <o:p></o:p></p>
<p class="MsoPlainText">> Thanks<o:p></o:p></p>
<p class="MsoPlainText">> <o:p></o:p></p>
<p class="MsoPlainText">> Leo<o:p></o:p></p>
<p class="MsoPlainText">> <o:p></o:p></p>
<p class="MsoPlainText">> <o:p></o:p></p>
<p class="MsoPlainText">> --<o:p></o:p></p>
<p class="MsoPlainText">> Leonidas E Ocola, PhD<o:p></o:p></p>
<p class="MsoPlainText">> Center for Nanoscale Materials<o:p></o:p></p>
<p class="MsoPlainText">> Argonnne National Laboratory<o:p></o:p></p>
<p class="MsoPlainText">> Bldg 440, Rm A129<o:p></o:p></p>
<p class="MsoPlainText">> 9700 South Cass Avenue, Argonne, IL 60439<o:p></o:p></p>
<p class="MsoPlainText">> Ph: 630-252-6613<o:p></o:p></p>
<p class="MsoPlainText">> Fax: 630-252-5739<o:p></o:p></p>
<p class="MsoPlainText">> <o:p></o:p></p>
<p class="MsoPlainText">> <o:p></o:p></p>
<p class="MsoPlainText">> _______________________________________________<o:p></o:p></p>
<p class="MsoPlainText">> labnetwork mailing list<o:p></o:p></p>
<p class="MsoPlainText">> <a href="mailto:labnetwork@mtl.mit.edu"><span style="color:windowtext;text-decoration:none">labnetwork@mtl.mit.edu</span></a><o:p></o:p></p>
<p class="MsoPlainText">> <a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork">
<span style="color:windowtext;text-decoration:none">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</span></a><o:p></o:p></p>
<p class="MsoPlainText"><o:p> </o:p></p>
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