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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal><span style='color:#1F497D'>I would highly advise against this practice, it is extremely risky. Dangerous gases could condense in the cryo and be released during regen even if the pop off valve is flanged and exhausted. Why not use the turbo to keep it under vacuum? <o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Steve Paolini<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Harvard University Center for Nanoscale Systems<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Errol V. Porter<br><b>Sent:</b> Thursday, December 06, 2012 11:31 AM<br><b>To:</b> labnetwork@mtl.mit.edu<br><b>Subject:</b> [labnetwork] Cryopump configuration on a CVD tool<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Greetings members,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>I wanted to see if there are any members currently using a cryopump on a CVD tool utilizing any of the following gases; germane, hydrogen, methane, silane, diborane or phosphine. Note the main pump being used during processing is a turbopump with the cryopump being used to keep the tool under vacuum while the tool is not being operated. If there are any users using a similar configuration, how was the pump installed specifically to deal with the effluent that is released during a normal regeneration cycle.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Regards,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Errol Porter<o:p></o:p></p><p class=MsoNormal>University of Arkansas / HiDEC<o:p></o:p></p><p class=MsoNormal>700 W. Research Center Blvd<o:p></o:p></p><p class=MsoNormal>Fayetteville, AR 72701<o:p></o:p></p><p class=MsoNormal>Tel. 479 575-2519<o:p></o:p></p><p class=MsoNormal>Fax 479 575-2719<o:p></o:p></p><p class=MsoNormal>email:<span style='color:#1F497D'> <a href="mailto:evporte@uark.edu">evporte@uark.edu</a><o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><a href="http://www.hidec.uark.edu">http://www.hidec.uark.edu</a><o:p></o:p></span></p><p class=MsoNormal><o:p> </o:p></p></div></body></html>