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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal><span style='color:#1F497D'>Depending on the type of tools you have, the RF generators used I saw PCW water resistivity varying between – 50 k-ohm up to 1.5 Meg-Ohm. For example a tool like ANELVA requires between 1 and 1.5 Meg-Ohm. Some Several PCW systems that we are currently designing, our clients plan to fill the system with RO water then use soft water for makeup. Corrosion inhibitor and a biocide are also injected into the systems. <o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><p class=MsoNormal><span style='color:#1F497D'>Rizik Michael, PE<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Principal<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Integrated Engineering Services<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Office: +408 261 3500, Ext. 201<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Cell: +408 718 0927<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p></div><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Kuhn, Jeffrey G<br><b>Sent:</b> Friday, December 07, 2012 4:39 AM<br><b>To:</b> 'Lavallee, Guy P.'; 'labnetwork@mtl.mit.edu'<br><b>Subject:</b> Re: [labnetwork] Process Chilled Water Question<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><span style='color:#1F497D'>Guy,<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>At Birck, our PCW resistivity spec is 1.0 Meg-ohm +/- .05 Meg-ohm. <o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Regards,<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:12.0pt;color:#1F497D'>Jeff Kuhn<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Facility Engineer<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Birck Nanotechnology Center<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Purdue University<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>1205 W. State St.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>West Lafayette, IN 47907<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Ph: (765) 496-8329<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Fax: (765) 496-2018<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal style='margin-left:.5in'><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> <a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>] <b>On Behalf Of </b>Lavallee, Guy P.<br><b>Sent:</b> Thursday, December 06, 2012 3:04 PM<br><b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br><b>Subject:</b> [labnetwork] Process Chilled Water Question<o:p></o:p></span></p></div></div><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:12.0pt;font-family:"Bookman Old Style","serif"'>Dear List,<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:12.0pt;font-family:"Bookman Old Style","serif"'> I wanted to get some feedback from other sites on what level of conductivity / resistivity they are running their Process Chilled Water (PCW) loop. Any feedback would be greatly appreciated.<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:12.0pt;font-family:"Bookman Old Style","serif"'><o:p> </o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:12.0pt;font-family:"Bookman Old Style","serif"'>Thanks,<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:12.0pt;font-family:"Bookman Old Style","serif"'>Guy<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-size:12.0pt;font-family:"Bookman Old Style","serif"'><o:p> </o:p></span></p><p class=MsoNormal style='margin-left:.5in'><b><i><u><span style='font-size:12.0pt;font-family:"Bookman Old Style","serif";color:#1F497D'>Penn State University’s Nanofabrication Laboratory<o:p></o:p></span></u></i></b></p><p class=MsoNormal style='margin-left:.5in'><span style='font-family:"Bookman Old Style","serif";color:#1F497D'>Lead Facilities and Etch Engineer<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-family:"Bookman Old Style","serif";color:#1F497D'>Materials Research Institute<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-family:"Bookman Old Style","serif";color:#1F497D'>N-105 Millennium Science Complex (MSC Bldg)<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-family:"Bookman Old Style","serif";color:#1F497D'>University Park, PA 16802<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-family:"Bookman Old Style","serif";color:#1F497D'>Email: <a href="mailto:gpl107@psu.edu">gpl107@psu.edu</a><o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-family:"Bookman Old Style","serif";color:#1F497D'>Phone: 814-865-9339<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><span style='font-family:"Bookman Old Style","serif";color:#1F497D'>Cell: 814-777-0719<o:p></o:p></span></p><p class=MsoNormal style='margin-left:.5in'><o:p> </o:p></p></div></body></html>