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<div class="moz-cite-prefix">Dear Colleagues,<br>
<br>
Thank you very much for your feedback.<br>
<br>
As some of you have pointed out, it would be helpful to be more
specific about the N2 grades I mentioned.<br>
<br>
I have what I call utility N2 already installed and I am designing
the high purity system:<br>
- Utility N2 runs in CFOS Cu piping and is shared with the rest of
the building; at best I can expect 99.999% entering that piping
system from the bulk N2 system.<br>
- High purity N2 (99.9999%) will be generated using purifiers (I
am debating central purification vs. distributed [per chase
purifiers]) and will run in electropolished, orbitally welded 316L
stainless steel downstream of the purifiers. The purifies will be
fed from the same bulk N2 system but the pipe run (CFOS Cu) will
be dedicated to the cleanroom.<br>
<br>
The bulk N2 system I have is not stainless steel and it does NOT
have filters after the vaporizers.<br>
<br>
My thinking is similar to Dennis Schweiger's, i.e. anything that
touches the product should be high purity.<br>
<br>
Iulian<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director of Operations, UD Nanofab
149 Evans Hall
Newark, DE 19716
302-831-2784</pre>
On 1/12/2013 1:29 PM, Lynn Rathbun wrote:<br>
</div>
<blockquote
cite="mid:6.2.5.6.2.20130112132805.0b178d90@cnf.cornell.edu"
type="cite"> <font size="3">Well, first you would have to define
what grades you mean by utility nitrogen and high purity
nitrogen.<br>
<br>
<x-sigsep></x-sigsep></font>
<p><font size="3">
**************************************************************<br>
Dr. Lynn Rathbun <x-tab> </x-tab><a
class="moz-txt-link-abbreviated"
href="mailto:Rathbun@cnf.cornell.edu">Rathbun@cnf.cornell.edu</a><br>
NNIN Deputy Director<x-tab> </x-tab><x-tab> </x-tab><x-tab>
</x-tab>(607)-254-4872<br>
CNF Laboratory Manager <br>
Duffield Hall
(607)-255-8601 Fax<br>
Cornell University
(607)-592-1549 Work Cell<br>
Ithaca, New York 14853<x-tab> </x-tab>
(607)-342-1880 Personal Cell<br>
<br>
<br>
<br>
<br>
</font> <br>
</p>
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