<div dir="ltr">we have previously used ferrorcene and O2 then reduced by H2 plasma for iron ALD.<div><br></div><div><a href="http://cambridgenanotech.com/papers/atomic%20layer%20deposition%20of%20transition%20metals.pdf">http://cambridgenanotech.com/papers/atomic%20layer%20deposition%20of%20transition%20metals.pdf</a><br>
</div></div><div class="gmail_extra"><br><br><div class="gmail_quote">On Tue, Jan 15, 2013 at 10:13 PM, Warren McKenzie <span dir="ltr"><<a href="mailto:warren.mckenzie.anff@gmail.com" target="_blank">warren.mckenzie.anff@gmail.com</a>></span> wrote:<br>
<blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex"><div bgcolor="white" lang="EN-AU" link="blue" vlink="purple"><div><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d">Dear Colleagues, <u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"><u></u> <u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d">Does anyone have any experience depositing pure iron in an atomic layer deposition system? Our supplier has been acquired and we are having trouble identifying precursors or recipes.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"><u></u> <u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d">Our system is a CambridgeNanotech Fiji200.<u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"><u></u> <u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d">Regards, <u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d">Warren<u></u><u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"><u></u> <u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"><u></u> <u></u></span></p><div style="border:none;border-top:solid windowtext 1.0pt;padding:1.0pt 0cm 0cm 0cm">
<p class="MsoNormal" style="border:none;padding:0cm"><b><span lang="EN-US" style="font-family:"Calibri","sans-serif";color:#1f497d">Dr Warren McKenzie   <u></u><u></u></span></b></p></div><p class="MsoNormal">
<span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#404040">BE PhD MCom<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#404040"><u></u> <u></u></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#404040">Business Development Manager - Australian National Fabrication Facility (ANFF).<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#404040"><u></u> <u></u></span></p><p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#404040">Level 3 Newton Building <u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#404040">The University of New South Wales<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#404040">Sydney NSW 2052<u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#404040">AUSTRALIA<u></u><u></u></span></p><p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#404040"><u></u> <u></u></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#404040">Ph: <a href="tel:%2B61%20400%20059%20509" value="+61400059509" target="_blank">+61 400 059 509</a><u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#404040">Web: </span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"><a href="http://www.anff.org.au/" target="_blank"><span lang="EN-US" style="font-size:10.0pt">www.anff.org.au</span></a></span><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#404040"><u></u><u></u></span></p>
<p class="MsoNormal"><span lang="EN-US" style="font-size:10.0pt;font-family:"Calibri","sans-serif";color:#404040">Email: </span><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"><a href="mailto:Warren.McKenzie@unsw.edu.au" target="_blank"><span lang="EN-US" style="font-size:10.0pt;color:#404040">Warren.McKenzie@anff.org.au</span></a></span><span lang="EN-US" style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"><u></u> <u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"><img border="0" width="201" height="278" alt="ANFF_logo_col_150_rgb"><u></u><u></u></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"><u></u> <u></u></span></p><p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif";color:#1f497d"><u></u> <u></u></span></p>
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