<html xmlns:v="urn:schemas-microsoft-com:vml" xmlns:o="urn:schemas-microsoft-com:office:office" xmlns:w="urn:schemas-microsoft-com:office:word" xmlns:m="http://schemas.microsoft.com/office/2004/12/omml" xmlns="http://www.w3.org/TR/REC-html40">
<head>
<meta http-equiv="Content-Type" content="text/html; charset=us-ascii">
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<style><!--
/* Font Definitions */
@font-face
{font-family:Calibri;
panose-1:2 15 5 2 2 2 4 3 2 4;}
/* Style Definitions */
p.MsoNormal, li.MsoNormal, div.MsoNormal
{margin:0in;
margin-bottom:.0001pt;
font-size:11.0pt;
font-family:"Calibri","sans-serif";}
a:link, span.MsoHyperlink
{mso-style-priority:99;
color:blue;
text-decoration:underline;}
a:visited, span.MsoHyperlinkFollowed
{mso-style-priority:99;
color:purple;
text-decoration:underline;}
span.EmailStyle17
{mso-style-type:personal-compose;
font-family:"Calibri","sans-serif";
color:windowtext;}
.MsoChpDefault
{mso-style-type:export-only;
font-family:"Calibri","sans-serif";}
@page WordSection1
{size:8.5in 11.0in;
margin:1.0in 1.0in 1.0in 1.0in;}
div.WordSection1
{page:WordSection1;}
--></style><!--[if gte mso 9]><xml>
<o:shapedefaults v:ext="edit" spidmax="1026" />
</xml><![endif]--><!--[if gte mso 9]><xml>
<o:shapelayout v:ext="edit">
<o:idmap v:ext="edit" data="1" />
</o:shapelayout></xml><![endif]-->
</head>
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<p class="MsoNormal">Colleagues,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We are currently in the midst of our tool fit up for our 4200 square foot clean room.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">At UML we pay for engineer stamped tool packages for every tool we are installing in our clean room (i.e. Schematic drawings, floor plan, electrical, plumbing, etc.)<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I would greatly appreciate it you could take a few minutes and answer the questions below , (This is in response to the question posed by Capital Planning, as to what other Universities require?)<o:p></o:p></p>
<p class="MsoNormal"><o:p></o:p></p>
<p class="MsoNormal"><i>Note: I’m referring to process equipment (aligners, deposition equipment, e-beam lithography equipment, wet stations etc., that require high power, specialized piping and exhaust).<o:p></o:p></i></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Just bold or hi-lite the text in your answer. I am also open to any comments or suggestions !
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><b><span style="color:black">Tool Fit Up Survey<o:p></o:p></span></b></p>
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<p class="MsoNormal">Enter Your Organization<span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Are stamped engineering drawings for tool installs ?<o:p></o:p></span></p>
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<p class="MsoNormal">YES<span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal">NO<span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">What documentation is required for tool installs</span>?<span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Mfg Cut Sheets<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Marked up drawings<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Local Permits<o:p></o:p></span></p>
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<p class="MsoNormal">Other<span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Are you required to follow prevailing wage guidelines (Union)<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">YES<o:p></o:p></span></p>
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<p class="MsoNormal">NO<span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Who Coo</span>r<span style="color:black">dinates Tool Installations:<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Clean room Staff<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Facilities<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Outside Contractor<o:p></o:p></span></p>
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<p class="MsoNormal">Other<span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Who Performs the installation<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Clean room Staff<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Facilities<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Outside Contractor<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black">Combination<o:p></o:p></span></p>
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<p class="MsoNormal">Comments<span style="color:black"><o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:black"><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Best Regards<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">P.S. I will happily share my findings on request.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thomas S. Ferraguto<o:p></o:p></p>
<p class="MsoNormal">ETIC Nanofabrication Laboratory Director<o:p></o:p></p>
<p class="MsoNormal">University of Massachusetts Lowell<o:p></o:p></p>
<p class="MsoNormal">1 University Avenue<o:p></o:p></p>
<p class="MsoNormal">Lowell MA 01854-5120<o:p></o:p></p>
<p class="MsoNormal">978-934-1809 land<o:p></o:p></p>
<p class="MsoNormal">617-755-0910 mobile<o:p></o:p></p>
<p class="MsoNormal">978-934-1014 fax<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
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