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<font size=3>Karl<br><br>
You can find a database of the tools available at the NNIN sites on the
NNIN web
site.<a href="http://www.nnin.org/research-support/tools-database" eudora="autourl">
http://www.nnin.org/research-support/tools-database<br>
</a></font>You can also find a spreadsheet of processes and tools
available at this process blog entry.<br>
<a href="http://www.nnin.org/research-support/process-blog/nnin-ald-processes-and-nnin-ald-workshop" eudora="autourl">
http://www.nnin.org/research-support/process-blog/nnin-ald-processes-and-nnin-ald-workshop<br>
<br>
</a>At Cornell, we are quite happy with our Oxford FlexAl but it is a big
system.<br><br>
<br>
<blockquote type=cite class=cite cite=""><font size=3>Hello
Labnetwork,<br>
<br>
We are currently searching for an ALD system that has the flexibility to
meet the needs of multiple users, but is on the lower end of
pricing. I realize that these attributes are typically not well
aligned, however we have limited internal funding support. I have
been exploring ALD systems offered by a number of vendors. There
are a few systems that appear to be good candidates – some are upgradable
to offer enhanced capabilities, while others are not. We are
targeting a system that can accommodate up to 6-inch substrates, and is
in the < $200K price range. Initial films of interest are Al2O3,
HfO2 and ZnO. however we expect interest in other
applications. <br>
<br>
I have been searching websites, and I have found several of these systems
placed in university labs. I would like to ask these universities
for their opinion of the system they have, and some of the details that
went into their decision on the system they have over the other systems
in the market. If there is a survey available for these systems,
perhaps prepared for a proposal, this would be especially
useful. <br>
<br>
Thanks for the help!<br>
<br>
<br>
Dr. Karl D. Hirschman, Micron Professor<br>
Electrical and Microelectronic Engineering Department<br>
Director, Semiconductor & Microsystems Fabrication Laboratory<br>
Rochester Institute of Technology<br>
82 Lomb Memorial Drive<br>
Rochester, NY 14623-5604<br>
PH: 585-475-5130<br>
FAX: 585-475-5041<br>
<a href="mailto:kdhemc@rit.edu">kdhemc@rit.edu</a><br>
<a href="http://smfl.microe.rit.edu/" eudora="autourl">
http://smfl.microe.rit.edu</a><br>
<br>
<br>
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