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<p class="MsoNormal"><span style="color:#1F497D">Hi,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">We just purchased a tool called Gemstar-8 from Arradiance in Sudbury, Mass. Tel # is 800-659-2970. Handles one wafer at a time up to 200mm it is about the size of a large briefcase and it easily meet your cost
targets.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Draper Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Group Leader Microfabrication Operations<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Cambridge Ma, 02139-3563<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">www.draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">rmorrison@draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">W 617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">C 508-930-3461<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Karl Hirschman<br>
<b>Sent:</b> Saturday, March 02, 2013 12:25 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] ALD survey<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Hello Labnetwork,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">We are currently searching for an ALD system that has the flexibility to meet the needs of multiple users, but is on the lower end of pricing. I realize that these attributes are typically not well aligned, however we have limited internal
funding support. I have been exploring ALD systems offered by a number of vendors. There are a few systems that appear to be good candidates – some are upgradable to offer enhanced capabilities, while others are not. We are targeting a system that can accommodate
up to 6-inch substrates, and is in the < $200K price range. Initial films of interest are Al2O3, HfO2 and ZnO. however we expect interest in other applications. <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I have been searching websites, and I have found several of these systems placed in university labs. I would like to ask these universities for their opinion of the system they have, and some of the details that went into their decision
on the system they have over the other systems in the market. If there is a survey available for these systems, perhaps prepared for a proposal, this would be especially useful. <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Thanks for the help!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="DE" style="font-size:10.0pt;font-family:"Arial","sans-serif"">Dr. Karl D. Hirschman, Micron Professor</span><span lang="DE" style="font-size:12.0pt;font-family:"Times New Roman","serif""><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial","sans-serif"">Electrical and Microelectronic Engineering Department</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial","sans-serif"">Director, Semiconductor & Microsystems Fabrication Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial","sans-serif"">Rochester Institute of Technology<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial","sans-serif"">82 Lomb Memorial Drive<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial","sans-serif"">Rochester, NY 14623-5604<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial","sans-serif"">PH: 585-475-5130<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial","sans-serif"">FAX: 585-475-5041<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial","sans-serif""><a href="mailto:kdhemc@rit.edu">kdhemc@rit.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:10.0pt;font-family:"Arial","sans-serif""><a href="http://smfl.microe.rit.edu/">http://smfl.microe.rit.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman","serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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