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<p class="MsoNormal"><span style="color:#1F497D">Hi,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Here at Draper we use very fine beads to bead blast the cylinder. Then a wipe down with 70% IPA/ 35% DI dry and install. After it is installed we perform a condition, which is just a series of etch/passivation
steps. We perform this every year during the annual PM.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Hope this helps.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Draper Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Group Leader Microfabrication Operations<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Cambridge Ma, 02139-3563<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">www.draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">rmorrison@draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">W 617-258-3420<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">C 508-930-3461<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Errol V. Porter<br>
<b>Sent:</b> Monday, May 06, 2013 3:00 PM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] ASE alumina chamber clean procedure<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Greetings,<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">I am cleaning an alumina cylinder from an STS (now STPS) advanced silicon etcher and looking for advice on the proper procedure to remove the interior coating. I remember the OEM indicating only a CO2 blast cleaning is needed. I have a
reputable vendor indicating a bead-blast, chemical clean, detail and bake is needed to properly condition the part. Has anyone else had to clean an STS ASE alumina chamber before and if so, what procedure/vendor did you use to properly clean the cylinder?<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Regards, <o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Errol Porter<o:p></o:p></p>
<p class="MsoNormal">University of Arkansas / HiDEC<o:p></o:p></p>
<p class="MsoNormal">700 W. Research Center Blvd<o:p></o:p></p>
<p class="MsoNormal">Fayetteville, AR 72701<o:p></o:p></p>
<p class="MsoNormal">Tel. (479) 575-2519<o:p></o:p></p>
<p class="MsoNormal">Mobile: (479) 236-0693<o:p></o:p></p>
<p class="MsoNormal">Fax (479) 575-2719<o:p></o:p></p>
<p class="MsoNormal">email:<span style="color:#1F497D"> <a href="mailto:evporte@uark.edu">
evporte@uark.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><a href="http://www.hidec.uark.edu/">http://www.hidec.uark.edu</a><o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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