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</o:shapelayout></xml><![endif]--></head><body lang=EN-US link=blue vlink=purple><div class=WordSection1><p class=MsoNormal><span style='color:#1F497D'>Rick,<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>We’ve seen this problem with platinum in our e-gun evaporator. As a result, we no longer use IPA or other flammables on tool specific chamber cleans.<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>The chamber interiors are wiped down dry. Education of our users and restricting higher-risk chamber cleaning to staff members has further reduced the threat. <o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>Our solvent waste is segregated from other lab waste by depositing in metal solvent cans with self-closing lids. That’s not to say a solvent-wetted wipe from someone else’s work<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>wouldn’t ignite when exposed to metal-laden wipes improperly added to the metal can. The potential risk is minimized, however, by creating different waste streams and avoiding <o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>the solvent cleaning whenever possible.<o:p></o:p></span></p><div><p class=MsoNormal><span style='font-size:16.0pt;font-family:"Times New Roman","serif";color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='font-size:16.0pt;font-family:"Times New Roman","serif";color:#1F497D'>Scott P. Blondell</span><span style='font-size:16.0pt;font-family:"Times New Roman","serif";color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Times New Roman","serif";color:#1F497D'>Facilities Manager<o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Times New Roman","serif";color:#1F497D'>Rochester Institute of Technology</span><span style='font-family:"Times New Roman","serif";color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><a href="http://www.smfl.rit.edu/" target="_blank">Semiconductor & Microsystems Fabrication Laboratory</a></span><span style='color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Times New Roman","serif";color:#1F497D'>82 Lomb Memorial Dr. </span><span style='font-family:"Times New Roman","serif";color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Times New Roman","serif";color:#1F497D'>Bldg. 17-2519</span><span style='font-family:"Times New Roman","serif";color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='font-family:"Times New Roman","serif";color:#1F497D'>Rochester, NY 14623<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>585 738-4073 c</span><span style='color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>585 475-2171 o<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'>585 475-5041 f<o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><a href="mailto:spb1699@rit.edu">spb1699@rit.edu</a></span><span style='color:#1F497D'><o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><a href="http://www.smfl.rit.edu">www.smfl.rit.edu</a><o:p></o:p></span></p><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><table class=MsoNormalTable border=0 cellpadding=0><tr><td style='padding:.75pt .75pt .75pt .75pt'><p class=MsoNormal><span style='color:navy'><img border=0 width=90 height=60 id="Picture_x0020_1" src="cid:image001.jpg@01CE4B03.18281C30" alt="http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg"></span><span style='font-size:10.0pt;font-family:"Arial","sans-serif";color:navy'><o:p></o:p></span></p></td><td style='padding:.75pt .75pt .75pt .75pt'></td></tr></table><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p></div><p class=MsoNormal><span style='color:#1F497D'><o:p> </o:p></span></p><div><div style='border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in'><p class=MsoNormal><b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'>From:</span></b><span style='font-size:10.0pt;font-family:"Tahoma","sans-serif"'> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu] <b>On Behalf Of </b>Morrison, Richard H., Jr.<br><b>Sent:</b> Monday, May 06, 2013 9:50 AM<br><b>To:</b> labnetwork@mtl.mit.edu<br><b>Subject:</b> [labnetwork] Titanium hazard<o:p></o:p></span></p></div></div><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Hi Everyone,<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Last week one of the staff was wiping off some evaporator parts that were covered with Titanium metal. He was using texwipes soaked with IPA. He tossed the texwipes in the trash then accidentally dropped some wipes saturated with IPA on top of them and a fire started. It self extinguished after 1 minute but it melted the bottom of a plastic trash can.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Have any of you had that happen or something similar? Needless to say this is very alarming and I need to understand what could have caused this and develop a corrective action plan.<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Rick<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal>Draper Laboratory<o:p></o:p></p><p class=MsoNormal>Group Leader Microfabrication Operations<o:p></o:p></p><p class=MsoNormal>555 Technology Square<o:p></o:p></p><p class=MsoNormal>Cambridge Ma, 02139-3563<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p><p class=MsoNormal><a href="http://www.draper.com">www.draper.com</a><o:p></o:p></p><p class=MsoNormal><a href="mailto:rmorrison@draper.com">rmorrison@draper.com</a><o:p></o:p></p><p class=MsoNormal>W 617-258-3420<o:p></o:p></p><p class=MsoNormal>C 508-930-3461<o:p></o:p></p><p class=MsoNormal><o:p> </o:p></p></div></body></html>