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While I have no personal experience with the material, I'd guess
that there's the possibility of having separate Zn and S deposits,
and Zn will contaminate the chamber. Also, the Kurt Lesker chart
that I have recommends a dedicated vacuum system.<br>
<br>
Regards,<br>
<br>
Joe Palmer<br>
<br>
<div class="moz-cite-prefix">On 5/10/2013 1:53 AM, raghavan wrote:<br>
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<p class="MsoNormal">Dear all<o:p></o:p></p>
<p class="MsoNormal">We have a request from a tool user to
sputter ZnS in our sputter tool. Our sputter tool is a share
tool used by many users. I would like to know from experienced
users if ZnS sputtering needs any extra precautions to be
taken? Does it contaminate the chamber? <o:p></o:p></p>
<p class="MsoNormal">Thank you <o:p></o:p></p>
<p class="MsoNormal">Best wishes<o:p></o:p></p>
<p class="MsoNormal">Raghavan<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span style="color:gray">*************************************************</span><span
style="font-family:"Times New
Roman","serif";color:gray"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:gray">Dr.Vijayaraghavan<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:gray">Technology Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:gray">National
Nanofabrication Centre <o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:gray">Centre for Nano
Science and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:gray">Indian institute
of Science ( IISc)<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:gray">Bangalore - 560
012<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:gray">India<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:gray">Ph: 09663304316<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:gray"><a class="moz-txt-link-freetext" href="http://sindhu.ece.iisc.ernet.in/nanofab/twikii/bin/view/Main/WebHome">http://sindhu.ece.iisc.ernet.in/nanofab/twikii/bin/view/Main/WebHome</a><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:gray">***************************************************<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
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