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<p class="MsoNormal"><span style="color:#1F497D">That will most likely contaminate your system. It is also tricky to sputter as the Zn and S may disassociate. I would think that the target would be a powder press target, if so you will need to be very careful
with heat generation. If the target gets hot it will crack and even spray particles over the machine.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">I would not allow ZnS in a general use machine, too much risk to other users.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Rick<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Draper Laboratory<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Group Leader Microfabrication Operations<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">555 Technology Square<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Cambridge Ma, 02139-3563<o:p></o:p></span></p>
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<p class="MsoNormal"><span style="color:#1F497D">www.draper.com<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">rmorrison@draper.com<o:p></o:p></span></p>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>raghavan<br>
<b>Sent:</b> Friday, May 10, 2013 1:53 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> [labnetwork] ZnS sputtering<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><span lang="EN-IN">Dear all<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN">We have a request from a tool user to sputter ZnS in our sputter tool. Our sputter tool is a share tool used by many users. I would like to know from experienced users if ZnS sputtering needs any extra precautions to
be taken? Does it contaminate the chamber? <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN">Thank you <o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN">Best wishes<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN">Raghavan<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN"><o:p> </o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN" style="color:gray">*************************************************</span><span lang="EN-IN" style="font-family:"Times New Roman","serif";color:gray"><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN" style="color:gray">Dr.Vijayaraghavan<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN" style="color:gray">Technology Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN" style="color:gray">National Nanofabrication Centre
<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN" style="color:gray">Centre for Nano Science and Engineering<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN" style="color:gray">Indian institute of Science ( IISc)<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN" style="color:gray">Bangalore - 560 012<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN" style="color:gray">India<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN" style="color:gray">Ph: 09663304316<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN" style="color:gray"><a href="http://sindhu.ece.iisc.ernet.in/nanofab/twikii/bin/view/Main/WebHome">http://sindhu.ece.iisc.ernet.in/nanofab/twikii/bin/view/Main/WebHome</a><o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN" style="color:gray">***************************************************<o:p></o:p></span></p>
<p class="MsoNormal"><span lang="EN-IN"><o:p> </o:p></span></p>
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