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<div class="moz-cite-prefix">Dear All,<br>
<br>
Information for manipulation of 2% Silane bottle will also be
appreciated!. We are a research group and is the first time we
will work with silane. We are installing a PECVD, and we are
deciding between 100% silane and 2% silane/N2. We will probably
select low concentration as it is less dangerous.<br>
Any recomendation / link / book will be very appreciated!<br>
<br>
Many thanks, Laura<br>
<br>
<pre class="moz-signature" cols="72">_____________________________________________
Ing. Laura Malatto
Jefe de Laboratorio
Procesos Microelectrónicos
INTI-Micro y Nanoelectrónica del Bicentenario (CMNB)
PTM - Ed. 42
Buenos Aires - Argentina
TEL:(+5411) 4724 6430
FAX:(+5411) 4754 5194
_____________________________________________
0800 444 4004 | <a class="moz-txt-link-abbreviated" href="http://www.inti.gob.ar">www.inti.gob.ar</a></pre>
El 10/06/2013 05:08 p.m., Aebersold,Julia W. escribió:<br>
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<p class="MsoNormal">We are hooking up a new polysilicon tube
and are working with 100% Silane. I am seeking information on
protocol and standard operating procedures (SOP’s) on how
other groups and institutions perform this the process of
changing their Silane bottle and leak checks. We have our gas
cabinet information, but due to the dangerous nature of this
gas more I would like to gather information from other folks
that have worked with this gas extensively.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">A written response to my e-mail is fine,
but links to sites with official protocol and SOP’s would be
preferred.<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal">Cheers!<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Julia Aebersold, Ph.D. <o:p></o:p></p>
<p class="MsoNormal">MNTC Cleanroom Manager<o:p></o:p></p>
<p class="MsoNormal">Shumaker Research Building, Room 233<o:p></o:p></p>
<p class="MsoNormal">2210 South Brook Street<o:p></o:p></p>
<p class="MsoNormal">University of Louisville<o:p></o:p></p>
<p class="MsoNormal">Louisville, KY 40292<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">502-852-1572<o:p></o:p></p>
<p class="MsoNormal"><a class="moz-txt-link-freetext" href="http://louisville.edu/micronano/">http://louisville.edu/micronano/</a><b><span
style="font-size:10.0pt;font-family:"Arial","sans-serif";color:navy"><o:p></o:p></span></b></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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