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<p class="MsoNormal"><a name="_MailEndCompose"><span style="color:#1F497D">Hi Laura,<o:p></o:p></span></a></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">I've asked our Operations Manager write a "Silane Cylinder Change Out Procedure" that we can send to you. Our Operations Manager, Troy Reese, was the Facilities Manager for ON Semiconductor before he came to
us recently, and will be transcribing the procedure he developed while at ON Semi.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">For any other questions you may have regarding gas delivery and abatement issues, I invite you, or anyone on the labnetwork to submit questions to our "Ask an Expert" section of the "Knowledge Center" on our
website. This is a Free service where the questions are presented to known industry experts (Facilities Managers, A&E Engineers, UHP Contractors, etc.), so you can trust the information you receive is sound.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Here is the link:<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><a href="http://www.criticalsystemsinc.com/knowledge-center.html">http://www.criticalsystemsinc.com/knowledge-center.html</a><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">I should have this procedure for you shortly.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Have a great day,<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="color:#1F497D">Tom Britton<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Director of Sales<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Georgia","serif";color:#1F497D">Critical Systems, Inc.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">7000 W. Victory Road</span><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Boise, ID 83709<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Direct: 208-890-1417<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Shop: 877-572-5515<o:p></o:p></span></p>
<p class="MsoNormal"><a href="http://www.criticalsystemsinc.com/">www.criticalsystemsinc.com</a><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><i><span style="color:#1F497D"> "World Leader in UHP Reconditioned
<o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span style="color:#1F497D"> Gas Delivery & Abatement Technologies"<o:p></o:p></span></i></p>
</div>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
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<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext"> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Laura Malatto<br>
<b>Sent:</b> Tuesday, June 11, 2013 6:16 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Subject:</b> Re: [labnetwork] 100% Silane Bottle Changing<o:p></o:p></span></p>
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<p class="MsoNormal"><o:p> </o:p></p>
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<p class="MsoNormal">Dear All,<br>
<br>
Information for manipulation of 2% Silane bottle will also be appreciated!. We are a research group and is the first time we will work with silane. We are installing a PECVD, and we are deciding between 100% silane and 2% silane/N2. We will probably select
low concentration as it is less dangerous.<br>
Any recomendation / link / book will be very appreciated!<br>
<br>
Many thanks, Laura<br>
<br>
<br>
<o:p></o:p></p>
<pre>_____________________________________________<o:p></o:p></pre>
<pre>Ing. Laura Malatto<o:p></o:p></pre>
<pre>Jefe de Laboratorio<o:p></o:p></pre>
<pre>Procesos Microelectrónicos<o:p></o:p></pre>
<pre>INTI-Micro y Nanoelectrónica del Bicentenario (CMNB)<o:p></o:p></pre>
<pre>PTM - Ed. 42<o:p></o:p></pre>
<pre>Buenos Aires - Argentina<o:p></o:p></pre>
<pre><a href="TEL:(+5411)">TEL:(+5411)</a> 4724 6430<o:p></o:p></pre>
<pre>FAX:(+5411) 4754 5194<o:p></o:p></pre>
<pre>_____________________________________________<o:p></o:p></pre>
<pre>0800 444 4004 | <a href="http://www.inti.gob.ar">www.inti.gob.ar</a><o:p></o:p></pre>
<p class="MsoNormal">El 10/06/2013 05:08 p.m., Aebersold,Julia W. escribió:<o:p></o:p></p>
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<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<p class="MsoNormal">We are hooking up a new polysilicon tube and are working with 100% Silane. I am seeking information on protocol and standard operating procedures (SOP’s) on how other groups and institutions perform this the process of changing their Silane
bottle and leak checks. We have our gas cabinet information, but due to the dangerous nature of this gas more I would like to gather information from other folks that have worked with this gas extensively.<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">A written response to my e-mail is fine, but links to sites with official protocol and SOP’s would be preferred.<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<div>
<p class="MsoNormal">Cheers!<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Julia Aebersold, Ph.D. <o:p></o:p></p>
<p class="MsoNormal">MNTC Cleanroom Manager<o:p></o:p></p>
<p class="MsoNormal">Shumaker Research Building, Room 233<o:p></o:p></p>
<p class="MsoNormal">2210 South Brook Street<o:p></o:p></p>
<p class="MsoNormal">University of Louisville<o:p></o:p></p>
<p class="MsoNormal">Louisville, KY 40292<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">502-852-1572<o:p></o:p></p>
<p class="MsoNormal"><a href="http://louisville.edu/micronano/">http://louisville.edu/micronano/</a><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman","serif""><br>
<br>
<br>
<o:p></o:p></span></p>
<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre>
</blockquote>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman","serif""><o:p> </o:p></span></p>
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