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<div class="moz-cite-prefix">There may be a slightly safer way for
leak checking the pigtail to cylinder valve connection. This is
done by filling the pigtail with a He containing gas as part of
the Post Purge (this can be included in the Post Purge sequence by
the gas cabinet manufacturer) and using a hand held He leak
checker. I use He or a H2/N2 mixture for the purge gas; this is
more expensive than N2 but worth it. With Silane and other high
pressure nasty gases I do both a low pressure leak check and a
high pressure leak check.<br>
<br>
<br>
<pre class="moz-signature" cols="72">iulian Codreanu, Ph.D.
Director of Operations, UD Nanofab
149 Evans Hall
Newark, DE 19716
302-831-2784</pre>
On 6/11/2013 1:27 PM, Tom Britton wrote:<br>
</div>
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<div class="WordSection1">
<p class="MsoNormal"><a moz-do-not-send="true"
name="_MailEndCompose"><span style="color:#1F497D">Hello
Laura,<o:p></o:p></span></a></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Here is what we
offer from Critical Systems. These practices come from a
production environment, but should be well suited for use at
your facility.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal" style="text-align:center" align="center"><b>SiH4
Cylinder Change<o:p></o:p></b></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b>Scope:</b> This covers the basic steps
of changing a SiH4 Cylinder, recommended Personal Protective
Equipment (PPE), best known methods used in the industry and
is not intended as a Procedure.
<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b>Cylinder Change Sequence</b>: <o:p></o:p></p>
<ol style="margin-top:0in" start="1" type="1">
<li class="MsoNormal" style="mso-list:l0 level1 lfo1">Cylinder
Valve Shutoff Test<o:p></o:p></li>
<li class="MsoNormal" style="mso-list:l0 level1 lfo1">Pre
Purge<o:p></o:p></li>
<li class="MsoNormal" style="mso-list:l0 level1 lfo1">Cylinder
Change<o:p></o:p></li>
<li class="MsoNormal" style="mso-list:l0 level1 lfo1">Post
Purge<o:p></o:p></li>
<li class="MsoNormal" style="mso-list:l0 level1 lfo1">Gas
Introduction<o:p></o:p></li>
</ol>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal"><b>1. Cylinder Valve Shutoff Test:<o:p></o:p></b></p>
<ol style="margin-top:0in" start="1" type="1">
<li class="MsoNormal" style="mso-list:l1 level1 lfo2">Close
Cylinder Valve:<o:p></o:p>
<ul style="margin-top:0in" type="disc">
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Remove
quick disconnect from cylinder valve. Quick disconnect
connects to top of cylinder valve. SiH4 cylinder should
be equipped with an Air operated cylinder valve
(Normally Closed)<o:p></o:p></li>
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Rotate
knurled handle on valve approximately 90 degrees (verify
direction of rotation with arrow and label located
either on the side of the cylinder valve or the top of
the cylinder valve.)<o:p></o:p></li>
</ul>
</li>
</ol>
<p class="MsoNormal" style="margin-left:.75in"><o:p> </o:p></p>
<p class="MsoNormal"><b>2. Pre Purge<o:p></o:p></b></p>
<ol style="margin-top:0in" start="1" type="1">
<ul style="margin-top:0in" type="disc">
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Auto
purge should be set up to perform 60 cycles of pressure at
a minimum of 80 psi and vacuum -12<o:p></o:p></li>
</ul>
</ol>
<p class="MsoNormal" style="margin-left:.75in"><o:p> </o:p></p>
<p class="MsoNormal"><b>3. Cylinder change</b>: Recommended
equipment and Personal Protective Equipment<o:p></o:p></p>
<ol style="margin-top:0in" start="1" type="1">
<ul style="margin-top:0in" type="disc">
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Recommended
Personal Protective Equipment<o:p></o:p></li>
</ul>
</ol>
<p class="MsoNormal"
style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4
lfo2">
<!--[if !supportLists]--><span style="font-family:Symbol"><span
style="mso-list:Ignore">·<span style="font:7.0pt
"Times New Roman"">
</span></span></span><!--[endif]-->Nomex hood; should
cover head, face (over nose and mouth) and neck area<o:p></o:p></p>
<p class="MsoNormal"
style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4
lfo2">
<!--[if !supportLists]--><span style="font-family:Symbol"><span
style="mso-list:Ignore">·<span style="font:7.0pt
"Times New Roman"">
</span></span></span><!--[endif]-->Nomex Smock<o:p></o:p></p>
<p class="MsoNormal"
style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4
lfo2">
<!--[if !supportLists]--><span style="font-family:Symbol"><span
style="mso-list:Ignore">·<span style="font:7.0pt
"Times New Roman"">
</span></span></span><!--[endif]-->Safety Glasses<o:p></o:p></p>
<p class="MsoNormal"
style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4
lfo2">
<!--[if !supportLists]--><span style="font-family:Symbol"><span
style="mso-list:Ignore">·<span style="font:7.0pt
"Times New Roman"">
</span></span></span><!--[endif]-->Face Shield<o:p></o:p></p>
<p class="MsoNormal"
style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4
lfo2">
<!--[if !supportLists]--><span style="font-family:Symbol"><span
style="mso-list:Ignore">·<span style="font:7.0pt
"Times New Roman"">
</span></span></span><!--[endif]-->Gloves (gauntlet style
leather)<o:p></o:p></p>
<p class="MsoNormal"
style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4
lfo2">
<!--[if !supportLists]--><span style="font-family:Symbol"><span
style="mso-list:Ignore">·<span style="font:7.0pt
"Times New Roman"">
</span></span></span><!--[endif]-->Handheld leak checker
specific to SIH4 (ppm level detection)<o:p></o:p></p>
<p class="MsoNormal"><o:p> </o:p></p>
<ol style="margin-top:0in" start="1" type="1">
<ul style="margin-top:0in" type="disc">
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Buddy
System: Always use two people to change cylinder.<o:p></o:p></li>
</ul>
</ol>
<p class="MsoNormal"
style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4
lfo2">
<!--[if !supportLists]--><span style="font-family:Symbol"><span
style="mso-list:Ignore">·<span style="font:7.0pt
"Times New Roman"">
</span></span></span><!--[endif]-->Disconnect pigtail from
cylinder valve through window with door closed and latched,<o:p></o:p></p>
<p class="MsoNormal"
style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4
lfo2">
<!--[if !supportLists]--><span style="font-family:Symbol"><span
style="mso-list:Ignore">·<span style="font:7.0pt
"Times New Roman"">
</span></span></span><!--[endif]-->One person uses leak
checker to verify cylinder valve one person to disconnect
cylinder.<o:p></o:p></p>
<p class="MsoNormal"
style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4
lfo2">
<!--[if !supportLists]--><span style="font-family:Symbol"><span
style="mso-list:Ignore">·<span style="font:7.0pt
"Times New Roman"">
</span></span></span><!--[endif]-->Place cap on cylinder
valve prior removing from cabinet<o:p></o:p></p>
<p class="MsoNormal"
style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4
lfo2">
<!--[if !supportLists]--><span style="font-family:Symbol"><span
style="mso-list:Ignore">·<span style="font:7.0pt
"Times New Roman"">
</span></span></span><!--[endif]-->Place cylinder cap on
cylinder prior to removing from cabinet.<o:p></o:p></p>
<p class="MsoNormal"
style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4
lfo2">
<!--[if !supportLists]--><span style="font-family:Symbol"><span
style="mso-list:Ignore">·<span style="font:7.0pt
"Times New Roman"">
</span></span></span><!--[endif]-->Always use new DISS
Gasket when installing new cylinder<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:1.75in"><o:p> </o:p></p>
<p class="MsoNormal"><b>4. Post Purge <o:p></o:p></b></p>
<ol style="margin-top:0in" start="1" type="1">
<ul style="margin-top:0in" type="disc">
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Auto
purge should be set up for a minimum of 60 purge cycles to
remove all atmosphere or moisture introduced during
cylinder change.<o:p></o:p></li>
</ul>
</ol>
<p class="MsoNormal" style="margin-left:.75in"><o:p> </o:p></p>
<p class="MsoNormal"><b>5. Gas Introduction<o:p></o:p></b></p>
<ol style="margin-top:0in" start="1" type="1">
<ul style="margin-top:0in" type="disc">
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Rotate
cylinder valve or knurled handle as per directions on
either the side of the cylinder valve or the top of the
cylinder valve.<o:p></o:p></li>
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Attach
quick disconnect fitting or airline.<o:p></o:p></li>
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">When
cylinder pressure is indicated on PT-1 use handheld leak
checker on pigtail connection to cylinder valve verify no
leaks.<o:p></o:p></li>
</ul>
</ol>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">If you have any
questions, please let me know.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="color:#1F497D">Tom Britton<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Director of
Sales<o:p></o:p></span></p>
<p class="MsoNormal"><span
style="font-size:14.0pt;font-family:"Georgia","serif";color:#1F497D">Critical
Systems, Inc.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">7000 W.
Victory Road</span><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Boise, ID
83709<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Direct:
208-890-1417<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Shop:
877-572-5515<o:p></o:p></span></p>
<p class="MsoNormal"><a moz-do-not-send="true"
href="http://www.criticalsystemsinc.com/">www.criticalsystemsinc.com</a><span
style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><i><span style="color:#1F497D"> "World
Leader in UHP Reconditioned
<o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span style="color:#1F497D"> Gas
Delivery & Abatement Technologies"<o:p></o:p></span></i></p>
</div>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #B5C4DF
1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span
style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext">From:</span></b><span
style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext">
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a>
[<a class="moz-txt-link-freetext" href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Laura Malatto<br>
<b>Sent:</b> Tuesday, June 11, 2013 6:16 AM<br>
<b>To:</b> <a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] 100% Silane Bottle
Changing<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal">Dear All,<br>
<br>
Information for manipulation of 2% Silane bottle will also
be appreciated!. We are a research group and is the first
time we will work with silane. We are installing a PECVD,
and we are deciding between 100% silane and 2% silane/N2. We
will probably select low concentration as it is less
dangerous.<br>
Any recomendation / link / book will be very appreciated!<br>
<br>
Many thanks, Laura<br>
<br>
<br>
<o:p></o:p></p>
<pre>_____________________________________________<o:p></o:p></pre>
<pre>Ing. Laura Malatto<o:p></o:p></pre>
<pre>Jefe de Laboratorio<o:p></o:p></pre>
<pre>Procesos Microelectrónicos<o:p></o:p></pre>
<pre>INTI-Micro y Nanoelectrónica del Bicentenario (CMNB)<o:p></o:p></pre>
<pre>PTM - Ed. 42<o:p></o:p></pre>
<pre>Buenos Aires - Argentina<o:p></o:p></pre>
<pre><a moz-do-not-send="true" href="TEL:%28+5411%29">TEL:(+5411)</a> 4724 6430<o:p></o:p></pre>
<pre>FAX:(+5411) 4754 5194<o:p></o:p></pre>
<pre>_____________________________________________<o:p></o:p></pre>
<pre>0800 444 4004 | <a moz-do-not-send="true" href="http://www.inti.gob.ar">www.inti.gob.ar</a><o:p></o:p></pre>
<p class="MsoNormal">El 10/06/2013 05:08 p.m., Aebersold,Julia
W. escribió:<o:p></o:p></p>
</div>
<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<p class="MsoNormal">We are hooking up a new polysilicon tube
and are working with 100% Silane. I am seeking information
on protocol and standard operating procedures (SOP’s) on how
other groups and institutions perform this the process of
changing their Silane bottle and leak checks. We have our
gas cabinet information, but due to the dangerous nature of
this gas more I would like to gather information from other
folks that have worked with this gas extensively.<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">A written response to my e-mail is fine,
but links to sites with official protocol and SOP’s would be
preferred.<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<div>
<p class="MsoNormal">Cheers!<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Julia Aebersold, Ph.D. <o:p></o:p></p>
<p class="MsoNormal">MNTC Cleanroom Manager<o:p></o:p></p>
<p class="MsoNormal">Shumaker Research Building, Room 233<o:p></o:p></p>
<p class="MsoNormal">2210 South Brook Street<o:p></o:p></p>
<p class="MsoNormal">University of Louisville<o:p></o:p></p>
<p class="MsoNormal">Louisville, KY 40292<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">502-852-1572<o:p></o:p></p>
<p class="MsoNormal"><a moz-do-not-send="true"
href="http://louisville.edu/micronano/">http://louisville.edu/micronano/</a><o:p></o:p></p>
</div>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><span
style="font-size:12.0pt;font-family:"Times New
Roman","serif""><br>
<br>
<br>
<o:p></o:p></span></p>
<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a moz-do-not-send="true" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a moz-do-not-send="true" href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre>
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<pre wrap="">_______________________________________________
labnetwork mailing list
<a class="moz-txt-link-abbreviated" href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a>
<a class="moz-txt-link-freetext" href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a>
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