<div dir="ltr"><div>Julia,</div><div> </div><div>we have two cylinders of 100% Silane supporting our lab(s). We try to get our bottle change-out cadence for all of our HPM's to about 12 months, which means that for some of the HPM materials we're using, we're short-filling the cylinder. All of our DISS compatible, HPM gas cylinder cabinets are fully automatic and have preprogrammed procedures for Prepurge, Cylinder Changeout, and Postpurge, cycles (all of these were set up by the cabinet vendor). In addition our HPM gas cylinders are set up with a 0.010" orifice right in the DISS connector. We also have an extensive array of gas detection in each of our gas cabinets, as well as through-out the fab areas.</div>
<div> </div><div>Typically, when we do a cylinder changeout of any "hydride" material, we'll use the buddy system, and depending on the gas, we'll be in supplied air as a precaution, with independent point-of-use gas detection sniffing at the DISS connections as we open them up.</div>
<div> </div><div>All of our HPM cylinders get an in-board Helium leak check when the new cylinder is installed.</div><div> </div><div>We've only had a problem one time, many, many, many years ago, with an older automatic cabinet. There was a programming issue in the valve sequence, and it vented the high pressure side of the regulator up the stack, where the Silane detonated, while a cylinder prepurge was being performed. No one was hurt, but there was a lot of wide-eyed individuals around after that happened.</div>
<div class="gmail_extra"><br clear="all"><div><div>Dennis Schweiger</div><div>Facilities Manager</div><div>University of Michigan</div><div>Lurie Nanofabrication Facility</div><div>1301 Beal Ave.</div><div>Ann Arbor, Michigan 48109</div>
<div> </div><div>734.647.2055 Ofc</div><div> </div><div>"People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong?</div>
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<br><br><div class="gmail_quote">On Mon, Jun 10, 2013 at 4:08 PM, Aebersold,Julia W. <span dir="ltr"><<a href="mailto:julia.aebersold@louisville.edu" target="_blank">julia.aebersold@louisville.edu</a>></span> wrote:<br>
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<p class="MsoNormal">We are hooking up a new polysilicon tube and are working with 100% Silane. I am seeking information on protocol and standard operating procedures (SOP’s) on how other groups and institutions perform this the process of changing their Silane
bottle and leak checks. We have our gas cabinet information, but due to the dangerous nature of this gas more I would like to gather information from other folks that have worked with this gas extensively.<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">A written response to my e-mail is fine, but links to sites with official protocol and SOP’s would be preferred.<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
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<p class="MsoNormal">Cheers!<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal">Julia Aebersold, Ph.D. <u></u><u></u></p>
<p class="MsoNormal">MNTC Cleanroom Manager<u></u><u></u></p>
<p class="MsoNormal">Shumaker Research Building, Room 233<u></u><u></u></p>
<p class="MsoNormal">2210 South Brook Street<u></u><u></u></p>
<p class="MsoNormal">University of Louisville<u></u><u></u></p>
<p class="MsoNormal">Louisville, KY 40292<u></u><u></u></p>
<p class="MsoNormal"><u></u> <u></u></p>
<p class="MsoNormal"><a href="tel:502-852-1572" target="_blank" value="+15028521572">502-852-1572</a><u></u><u></u></p>
<p class="MsoNormal"><a href="http://louisville.edu/micronano/" target="_blank">http://louisville.edu/micronano/</a><b><span style="color:navy;font-family:"Arial","sans-serif";font-size:10pt"><u></u><u></u></span></b></p>
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<p class="MsoNormal"><u></u> <u></u></p>
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