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<div class="WordSection1">
<p class="MsoNormal"><a name="_MailEndCompose"><span style="color:#1F497D">Hello Iulian,<o:p></o:p></span></a></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">You are correct regarding the helium leak check portion of the procedure.
</span><span style="color:#1F497D">The Helium leak check wasn’t included in our write-up because that is a standard procedure with all cylinder changes. Most gas cabinet controllers, like our Air Products controllers, will prompt for an outboard leak check
on cylinder connection after a sequence of events post Cylinder Change. At this time a leak checker capable of detecting Helium, if they are using a mixed gas, should be used. I should have been more clear that this was additional to standard cylinder change
procedures. Sorry if this caused any confusion.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Any other questions or comments, feel free to respond<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Best regards,</span><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<p class="MsoNormal"><span style="color:#1F497D">Tom Britton<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Director of Sales<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Georgia","serif";color:#1F497D">Critical Systems, Inc.<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">7000 W. Victory Road</span><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Boise, ID 83709<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Direct: 208-890-1417<o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D">Shop: 877-572-5515<o:p></o:p></span></p>
<p class="MsoNormal"><a href="http://www.criticalsystemsinc.com/">www.criticalsystemsinc.com</a><span style="color:#1F497D"><o:p></o:p></span></p>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<p class="MsoNormal"><i><span style="color:#1F497D"> "World Leader in UHP Reconditioned
<o:p></o:p></span></i></p>
<p class="MsoNormal"><i><span style="color:#1F497D"> Gas Delivery & Abatement Technologies"<o:p></o:p></span></i></p>
</div>
<p class="MsoNormal"><span style="color:#1F497D"><o:p> </o:p></span></p>
<div>
<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext"> Iulian Codreanu [mailto:codreanu@udel.edu]
<br>
<b>Sent:</b> Tuesday, June 11, 2013 2:31 PM<br>
<b>To:</b> Tom Britton<br>
<b>Cc:</b> Fab Network<br>
<b>Subject:</b> Re: [labnetwork] 100% Silane Bottle Changing<o:p></o:p></span></p>
</div>
</div>
<p class="MsoNormal"><o:p> </o:p></p>
<div>
<p class="MsoNormal">There may be a slightly safer way for leak checking the pigtail to cylinder valve connection. This is done by filling the pigtail with a He containing gas as part of the Post Purge (this can be included in the Post Purge sequence by the
gas cabinet manufacturer) and using a hand held He leak checker. I use He or a H2/N2 mixture for the purge gas; this is more expensive than N2 but worth it. With Silane and other high pressure nasty gases I do both a low pressure leak check and a high pressure
leak check.<br>
<br>
<br>
<br>
<o:p></o:p></p>
<pre>iulian Codreanu, Ph.D.<o:p></o:p></pre>
<pre>Director of Operations, UD Nanofab<o:p></o:p></pre>
<pre>149 Evans Hall<o:p></o:p></pre>
<pre>Newark, DE 19716<o:p></o:p></pre>
<pre>302-831-2784<o:p></o:p></pre>
<p class="MsoNormal">On 6/11/2013 1:27 PM, Tom Britton wrote:<o:p></o:p></p>
</div>
<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<p class="MsoNormal"><span style="color:#1F497D">Hello Laura,</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Here is what we offer from Critical Systems. These practices come from a production environment, but should be well suited for use at your facility.
</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal" align="center" style="text-align:center"><b>SiH4 Cylinder Change</b><o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><b>Scope:</b> This covers the basic steps of changing a SiH4 Cylinder, recommended Personal Protective Equipment (PPE), best known methods used in the industry and is not intended as a Procedure.
<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><b>Cylinder Change Sequence</b>: <o:p></o:p></p>
<ol style="margin-top:0in" start="1" type="1">
<li class="MsoNormal" style="mso-list:l0 level1 lfo1">Cylinder Valve Shutoff Test<o:p></o:p></li><li class="MsoNormal" style="mso-list:l0 level1 lfo1">Pre Purge<o:p></o:p></li><li class="MsoNormal" style="mso-list:l0 level1 lfo1">Cylinder Change<o:p></o:p></li><li class="MsoNormal" style="mso-list:l0 level1 lfo1">Post Purge<o:p></o:p></li><li class="MsoNormal" style="mso-list:l0 level1 lfo1">Gas Introduction<o:p></o:p></li></ol>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><b>1. Cylinder Valve Shutoff Test:</b><o:p></o:p></p>
<ol style="margin-top:0in" start="1" type="1">
<li class="MsoNormal" style="mso-list:l1 level1 lfo2">Close Cylinder Valve: <o:p>
</o:p></li></ol>
<ol style="margin-top:0in" start="1" type="1">
<ul style="margin-top:0in" type="disc">
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Remove quick disconnect from cylinder valve. Quick disconnect connects to top of cylinder valve. SiH4 cylinder should be equipped with an Air operated cylinder valve (Normally Closed)<o:p></o:p></li><li class="MsoNormal" style="mso-list:l1 level2 lfo2">Rotate knurled handle on valve approximately 90 degrees (verify direction of rotation with arrow and label located either on the side of the cylinder valve or the top of the cylinder valve.)<o:p></o:p></li></ul>
</ol>
<p class="MsoNormal" style="margin-left:.75in"> <o:p></o:p></p>
<p class="MsoNormal"><b>2. Pre Purge</b><o:p></o:p></p>
<ol style="margin-top:0in" start="1" type="1">
<ul style="margin-top:0in" type="disc">
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Auto purge should be set up to perform 60 cycles of pressure at a minimum of 80 psi and vacuum -12<o:p></o:p></li></ul>
</ol>
<p class="MsoNormal" style="margin-left:.75in"> <o:p></o:p></p>
<p class="MsoNormal"><b>3. Cylinder change</b>: Recommended equipment and Personal Protective Equipment<o:p></o:p></p>
<ol style="margin-top:0in" start="1" type="1">
<ul style="margin-top:0in" type="disc">
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Recommended Personal Protective Equipment<o:p></o:p></li></ul>
</ol>
<p class="MsoNormal" style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4 lfo2">
<![if !supportLists]><span style="font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]>Nomex hood; should cover head, face (over nose and mouth) and neck area<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4 lfo2">
<![if !supportLists]><span style="font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]>Nomex Smock<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4 lfo2">
<![if !supportLists]><span style="font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]>Safety Glasses<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4 lfo2">
<![if !supportLists]><span style="font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]>Face Shield<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4 lfo2">
<![if !supportLists]><span style="font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]>Gloves (gauntlet style leather)<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4 lfo2">
<![if !supportLists]><span style="font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]>Handheld leak checker specific to SIH4 (ppm level detection)<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<ol style="margin-top:0in" start="1" type="1">
<ul style="margin-top:0in" type="disc">
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Buddy System: Always use two people to change cylinder.<o:p></o:p></li></ul>
</ol>
<p class="MsoNormal" style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4 lfo2">
<![if !supportLists]><span style="font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]>Disconnect pigtail from cylinder valve through window with door closed and latched,<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4 lfo2">
<![if !supportLists]><span style="font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]>One person uses leak checker to verify cylinder valve one person to disconnect cylinder.<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4 lfo2">
<![if !supportLists]><span style="font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]>Place cap on cylinder valve prior removing from cabinet<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4 lfo2">
<![if !supportLists]><span style="font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]>Place cylinder cap on cylinder prior to removing from cabinet.<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:2.0in;text-indent:-.25in;mso-list:l1 level4 lfo2">
<![if !supportLists]><span style="font-family:Symbol"><span style="mso-list:Ignore">·<span style="font:7.0pt "Times New Roman"">
</span></span></span><![endif]>Always use new DISS Gasket when installing new cylinder<o:p></o:p></p>
<p class="MsoNormal" style="margin-left:1.75in"> <o:p></o:p></p>
<p class="MsoNormal"><b>4. Post Purge </b><o:p></o:p></p>
<ol style="margin-top:0in" start="1" type="1">
<ul style="margin-top:0in" type="disc">
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Auto purge should be set up for a minimum of 60 purge cycles to remove all atmosphere or moisture introduced during cylinder change.<o:p></o:p></li></ul>
</ol>
<p class="MsoNormal" style="margin-left:.75in"> <o:p></o:p></p>
<p class="MsoNormal"><b>5. Gas Introduction</b><o:p></o:p></p>
<ol style="margin-top:0in" start="1" type="1">
<ul style="margin-top:0in" type="disc">
<li class="MsoNormal" style="mso-list:l1 level2 lfo2">Rotate cylinder valve or knurled handle as per directions on either the side of the cylinder valve or the top of the cylinder valve.<o:p></o:p></li><li class="MsoNormal" style="mso-list:l1 level2 lfo2">Attach quick disconnect fitting or airline.<o:p></o:p></li><li class="MsoNormal" style="mso-list:l1 level2 lfo2">When cylinder pressure is indicated on PT-1 use handheld leak checker on pigtail connection to cylinder valve verify no leaks.<o:p></o:p></li></ul>
</ol>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">If you have any questions, please let me know.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<div>
<p class="MsoNormal"><span style="color:#1F497D">Tom Britton</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Director of Sales</span><o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:14.0pt;font-family:"Georgia","serif";color:#1F497D">Critical Systems, Inc.</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">7000 W. Victory Road</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Boise, ID 83709</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Direct: 208-890-1417</span><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D">Shop: 877-572-5515</span><o:p></o:p></p>
<p class="MsoNormal"><a href="http://www.criticalsystemsinc.com/">www.criticalsystemsinc.com</a><o:p></o:p></p>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<p class="MsoNormal"><i><span style="color:#1F497D"> "World Leader in UHP Reconditioned
</span></i><o:p></o:p></p>
<p class="MsoNormal"><i><span style="color:#1F497D"> Gas Delivery & Abatement Technologies"</span></i><o:p></o:p></p>
</div>
<p class="MsoNormal"><span style="color:#1F497D"> </span><o:p></o:p></p>
<div>
<div style="border:none;border-top:solid #B5C4DF 1.0pt;padding:3.0pt 0in 0in 0in">
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif";color:windowtext">
<a href="mailto:labnetwork-bounces@mtl.mit.edu">labnetwork-bounces@mtl.mit.edu</a> [<a href="mailto:labnetwork-bounces@mtl.mit.edu">mailto:labnetwork-bounces@mtl.mit.edu</a>]
<b>On Behalf Of </b>Laura Malatto<br>
<b>Sent:</b> Tuesday, June 11, 2013 6:16 AM<br>
<b>To:</b> <a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><br>
<b>Subject:</b> Re: [labnetwork] 100% Silane Bottle Changing</span><o:p></o:p></p>
</div>
</div>
<p class="MsoNormal"> <o:p></o:p></p>
<div>
<p class="MsoNormal">Dear All,<br>
<br>
Information for manipulation of 2% Silane bottle will also be appreciated!. We are a research group and is the first time we will work with silane. We are installing a PECVD, and we are deciding between 100% silane and 2% silane/N2. We will probably select
low concentration as it is less dangerous.<br>
Any recomendation / link / book will be very appreciated!<br>
<br>
Many thanks, Laura<br>
<br>
<br>
<br>
<o:p></o:p></p>
<pre>_____________________________________________<o:p></o:p></pre>
<pre>Ing. Laura Malatto<o:p></o:p></pre>
<pre>Jefe de Laboratorio<o:p></o:p></pre>
<pre>Procesos Microelectrónicos<o:p></o:p></pre>
<pre>INTI-Micro y Nanoelectrónica del Bicentenario (CMNB)<o:p></o:p></pre>
<pre>PTM - Ed. 42<o:p></o:p></pre>
<pre>Buenos Aires - Argentina<o:p></o:p></pre>
<pre><a href="TEL:%28+5411%29">TEL:(+5411)</a> 4724 6430<o:p></o:p></pre>
<pre>FAX:(+5411) 4754 5194<o:p></o:p></pre>
<pre>_____________________________________________<o:p></o:p></pre>
<pre>0800 444 4004 | <a href="http://www.inti.gob.ar">www.inti.gob.ar</a><o:p></o:p></pre>
<p class="MsoNormal">El 10/06/2013 05:08 p.m., Aebersold,Julia W. escribió:<o:p></o:p></p>
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<blockquote style="margin-top:5.0pt;margin-bottom:5.0pt">
<p class="MsoNormal">We are hooking up a new polysilicon tube and are working with 100% Silane. I am seeking information on protocol and standard operating procedures (SOP’s) on how other groups and institutions perform this the process of changing their Silane
bottle and leak checks. We have our gas cabinet information, but due to the dangerous nature of this gas more I would like to gather information from other folks that have worked with this gas extensively.<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">A written response to my e-mail is fine, but links to sites with official protocol and SOP’s would be preferred.<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
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<p class="MsoNormal">Cheers!<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">Julia Aebersold, Ph.D. <o:p></o:p></p>
<p class="MsoNormal">MNTC Cleanroom Manager<o:p></o:p></p>
<p class="MsoNormal">Shumaker Research Building, Room 233<o:p></o:p></p>
<p class="MsoNormal">2210 South Brook Street<o:p></o:p></p>
<p class="MsoNormal">University of Louisville<o:p></o:p></p>
<p class="MsoNormal">Louisville, KY 40292<o:p></o:p></p>
<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal">502-852-1572<o:p></o:p></p>
<p class="MsoNormal"><a href="http://louisville.edu/micronano/">http://louisville.edu/micronano/</a><o:p></o:p></p>
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<p class="MsoNormal"> <o:p></o:p></p>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman , serif","serif""><br>
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</span><o:p></o:p></p>
<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre>
</blockquote>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman , serif","serif""> </span><o:p></o:p></p>
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<pre>_______________________________________________<o:p></o:p></pre>
<pre>labnetwork mailing list<o:p></o:p></pre>
<pre><a href="mailto:labnetwork@mtl.mit.edu">labnetwork@mtl.mit.edu</a><o:p></o:p></pre>
<pre><a href="https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork">https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork</a><o:p></o:p></pre>
</blockquote>
<p class="MsoNormal"><span style="font-size:12.0pt;font-family:"Times New Roman","serif""><o:p> </o:p></span></p>
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