<div dir="ltr"><div>Iulian,</div><div> </div><div>here at UofMichigan, we're not sampling in any of the breathing air spaces directly for the clean room. Any time we've tried that, the results were inconclusive, and ineffective. We just move too much air around. We are sampling in some of the more "static" spaces, subfab, hallways in front of, and behind, the clean room. Typically all of our gas detection is done in the exhausted enclosures. That's where the breakable connections are, and we're constantly pulling fab air into them. One of the things we are doing is looking for gases in cabinets that wouldn't have that gas there, in effect sampling the fab air coming into the enclosures. For example, in an Ammonia cabinet, we might be looking for BCl3, HBr, Cl2, DCS, and hydrides, in addition to the amines for Ammonia.</div>
</div><div class="gmail_extra"><br clear="all"><div><div>Dennis</div><div> </div><div>734.647.2055 Ofc</div><div> </div><div>"People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened." Within which group do you belong?</div>
</div>
<br><br><div class="gmail_quote">On Wed, Jun 19, 2013 at 4:43 PM, Iulian Codreanu <span dir="ltr"><<a href="mailto:codreanu@udel.edu" target="_blank">codreanu@udel.edu</a>></span> wrote:<br><blockquote class="gmail_quote" style="margin:0 0 0 .8ex;border-left:1px #ccc solid;padding-left:1ex">
Hi Dennis.<br>
<br>
Since I have to purchase the tools I cannot give definite answers on the first two questions.<br>
<br>
1) I hope that all of them will be loadlocked but I have to allow for the possibility that some of them will not be.<br>
<br>
2) The chamber could be on either side.<br>
<br>
3) Low side wall (12" opening above floor) return.<br>
<br>
Thank you for your help.<br>
<br>
Iulian<br>
<br>
iulian Codreanu, Ph.D.<br>
Director of Operations, UD Nanofab<br>
149 Evans Hall<br>
Newark, DE 19716<br>
<a href="tel:302-831-2784" target="_blank" value="+13028312784">302-831-2784</a><br>
<br>
On 6/19/2013 4:10 PM, Dennis Schweiger wrote:<br>
<blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;padding-left:1ex;border-left-color:rgb(204,204,204);border-left-width:1px;border-left-style:solid">
Iulian,<br>
<br>
1) Are your tools load locked?<br>
<br>
2) Which side of the wall is the process chamber on?<br>
<br>
3) Is your cleanroom raised floor, or low side wall, return?<br>
<br>
Thanks,<br>
<br>
Dennis<br>
<a href="tel:586.531.3030" target="_blank" value="+15865313030">586.531.3030</a> Cell<br>
<br>
On Jun 19, 2013, at 4:05 PM, Iulian Codreanu <<a href="mailto:codreanu@udel.edu" target="_blank">codreanu@udel.edu</a>> wrote:<br>
<br>
<blockquote class="gmail_quote" style="margin:0px 0px 0px 0.8ex;padding-left:1ex;border-left-color:rgb(204,204,204);border-left-width:1px;border-left-style:solid">
Dear Colleagues,<br>
<br>
I am trying to figure out how the handle the detection of hazardous gases in the ambient when part of the tool is in the chase and part in the bay. The connection between the tool and the line(s) carrying the gas(es) would be in the chase so it would make sense to monitor that area. What are your thoughts on providing detectors on the bay side of the wall as well?<br>
<br>
Thank you very much for your help.<br>
<br>
Iulian<span class="HOEnZb"><font color="#888888"><br>
<br>
--<br>
iulian Codreanu, Ph.D.<br>
Director of Operations, UD Nanofab<br>
149 Evans Hall<br>
Newark, DE 19716<br>
<a href="tel:302-831-2784" target="_blank" value="+13028312784">302-831-2784</a><br>
<br>
<br>
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