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<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">This doesn’t sound quite right or you are getting a non-uniform deposition. We use a Toho laser stress measurement system for measuring thin film stress from our Oxford
PECVD (same system as yours).<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Cheers!<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Julia Aebersold, Ph.D.
<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">MNTC Cleanroom Manager<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Shumaker Research Building, Room 233<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">2210 South Brook Street<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">University of Louisville<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">Louisville, KY 40292<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">502-852-1572<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif"">http://louisville.edu/micronano/<o:p></o:p></span></p>
<p class="MsoNormal"><span style="font-size:11.0pt;font-family:"Calibri","sans-serif""><o:p> </o:p></span></p>
<p class="MsoNormal"><b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif"">From:</span></b><span style="font-size:10.0pt;font-family:"Tahoma","sans-serif""> labnetwork-bounces@mtl.mit.edu [mailto:labnetwork-bounces@mtl.mit.edu]
<b>On Behalf Of </b>Adithi Umamaheswara<br>
<b>Sent:</b> Friday, June 21, 2013 7:26 AM<br>
<b>To:</b> labnetwork@mtl.mit.edu<br>
<b>Cc:</b> iisc mcc<br>
<b>Subject:</b> [labnetwork] SiC stress<o:p></o:p></span></p>
<p class="MsoNormal"><o:p> </o:p></p>
<p class="MsoNormal">Dear Sir/Madam<br>
<br>
<br clear="all">
<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> I have deposited Amorphous Silicon Carbide using PECVD (OXFORD INSTRUMENTS PLASMA LAB SYSTEM 100). I did the Stress measurement using DEKTAK; I found that the SiC layer
had both compressive stress and tensile stress.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><o:p> </o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"> Getting both compressive stress and tensile stress on same SiC layer, is this normal?
<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto;mso-margin-bottom-alt:auto"><o:p> </o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto"> Deposition temperature: 400°C.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto"> Pressure: 1400 mT.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto"> <o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto"> Requesting for a reply asap.<o:p></o:p></p>
<p class="MsoNormal" style="mso-margin-top-alt:auto"><o:p> </o:p></p>
<p class="MsoNormal"><br>
With Regards, <br>
<br>
Adithi.U<br>
Facility Technologist,<br>
National Nano Fabrication Centre,<br>
CeNSE, Indian Institute of Science<br>
Bangalore<o:p></o:p></p>
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